FEB. 11–MARLBORO, Mass.–Shipley Company, LLC., has opened its Advanced Technology Center (ATC), a facility dedicated to the development of lithography, interconnect, low-k dielectric and other critical materials needed to produce new generations of microelectronic devices.

Shipley, a subsidiary of Rohm and Haas Co., has invested $30 million in the center as part of its ongoing commitment to deliver advanced materials capabilities to the global semiconductor market.

The new 65,000-square-foot ATC building represents the first phase of Shipley’s multi-phase plans for the center. Leo Linehan, director of research and development for Shipley Microelectronics, will manage the ATC’s day-to-day operations and research staff.

The ATC’s ISO Class 3 cleanroom is home to 193-nanometer exposure systems and track technologies. The new building also includes a comprehensive metrology and modeling facility. Designed for modular cleanroom expansion, the ATC includes an additional 65,000 square feet that would enable Shipley to double the size of the facility in the future.

Dozens of industry leaders representing Shipley’s customers, partners and suppliers attended the Feb. 5 opening, along with Massachusetts State Senator Pamela Resor, Massachusetts State Representative Steven Leduc, and Marlborough Mayor William Mauro.

The event also featured a series of technical poster presentations focused on Shipley’s advanced lithography capabilities and the broader microelectronics materials capabilities of Rohm and Haas’ Electronic Materials Business Group, a $1 billion global enterprise.