GaSonics system used to ramp up six-inch GaAs fab

GaSonics system used to ramp up six-inch GaAs fab

San Jose, CA

GaSonics is installing its third Performance Enhancement Platform (PEP) system in the Vitesse Pierre Lamond wafer fabrication facility in Colorado Springs, CO — a six-inch Gallium Arsenide (GaAs) fab. The PEP system features a fluorine-compatible clean chamber and a high throughput module for rapid resist removal. According to Vitesse, the system meets criteria for tool uptime and flexibility. The facility will support current generation technology and future technology development. — TGW

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