Copper barrier seed

Copper barrier seed

The Lynx2 CBS is a chemical vapor deposition (CVD) integrated Copper Barrier Seed (CBS) that enables scaling of copper metallization to the 0.18 to 0.15 micron generation and beyond. According to the manufacturer, the CBS product is based on an established low-temperature, highly conformal plasma-enhanced CVD tungsten nitride (WN) barrier film and takes advantage of the Lynx2 modular system architecture.

Genus

Sunnyvale, CA

(408) 747-7120

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