Strasbaugh, OnTrak to integrate CMP technology

Strasbaugh, OnTrak to integrate CMP technology

San Jose, CA

Strasbaugh is integrating its symphony-CMP chemical mechanical planarizer with OnTrak Systems` synergy integra CMP wafer cleaning system to allow automated dry-wafer-in, dry-wafer-out CMP processing. Officials say the combined system will provide chip makers with high wafer throughput and a fully characterized CMP process as well as make better use of cleanroom space than the standalone system approach. Terms of a formal OEM agreement hold Strasbaugh responsible for sales and marketing and CMP tool process support. OnTrak will provide applications support, end-user training and field support for the cleaning portion of the system. The integrated system is scheduled for release in August 1998.–TGW

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