CMP filter

Spiraltek rolled filters from Osmonics are designed to reduce chip failure by removing agglomerations from chemical mechanical planarization (CMP) slurry, making polishing slurries more effective. Unlike conventional filters, Spiraltek filters utilize tangential flow and retain gelatinous material to prevent premature plugging. Agglomerations cause destructive scratches and gouges on wafer surfaces, resulting in failed chips. These agglomerations are swept from the filtering surface and held inside the filter, leaving the surface free and clean for more filtration. Spiraltek filters have extremely high dirt-holding capacity that provides up to six times the life of standard pleated cartridge filtration, according to the company.

Osmonics

Minnetonka, MN

(800) 848-1750