Filtration system

Filtration system

The VaporSorb CDA filter purifies the clean dry air used in semiconductor lithography processes. According to the manufacturer, it combines adsorption, chemisorption and catalytic destruction to remove airborne molecular contaminants, including acids, bases, dopants, condensable silicones and hydrocarbons; it also captures particulates down to 0.1 micron. The CDA filter is available with a flow rate of 3 or 30 lpm and can be equipped with an optional drying module.

Extraction Systems Inc.

Franklin, MA

(508) 553-3900

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