Load port

Load port

This 300-mm pod door opener load port is modular and allows all drive and control modules to be replaced in 15 minutes or less without disturbing minienvironments, according to the manufacturer. It can be removed and replaced without realignment or adjustments. Options include wafer mapping, E23 communications and rotating kinematic coupling.

PRI Automation Inc.

Billerica, MA

(508) 663-8555

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