New technologies highlight first CleanRooms Asia conference
By Lisa A. Karter
Singapore — New contamination control technologies premiered at the first CleanRooms Asia show July 28-31 at the Singapore International Convention Centre.
The three-day show ran concurrently with DataStor Asia `97 and IC Fabrication Symposium Asia (IFSA) sponsored by CleanRooms` sister magazines, Data Storage and Solid State Technology. The shows are owned by Penn Well Publishing Co.
“We are extremely pleased with attendance at the launch of CleanRooms Asia,” said Michelle Keyworth, Director of Conferences and Exhibitions for Penn Well Publishing`s Advanced Technology Division. “Conference delegates, as well as exhibition visitors, exceeded our expectations for a first-year show. An excellent percentage of exhibitors have re-signed for CleanRooms Asia `98, which will be held July 27-30, 1998 at the Raffles City Convention Center. Co-locating the show with DataStor Asia provided excellent cross-participation from the disk-drive industry.”
The contamination control conference program highlights included: ULPA/HEPA testing; a keynote presentation on contamination-free facilities by Dr. Tadahiro Ohmi of the Ultra Clean Society of Japan; retrofitting a Class 100 cleanroom to Class 1; controlling electrostatic discharge; ultrapure gas delivery; and cleanroom monitoring, among several other topics.
Among the many papers presented, Dr. James J. Sun, David Thimsen and F. John Turner of MSP Corp. (Longmont, CO) and Dr. Benjamin Y.H. Lui of The University of Minneapolis presented a new method for testing filters. The test method uses automated control combined with polystyrene latex (PSL) sphere aerosol challenges, which can replace di-octyl phthalate (DOP) and similar oil challenge filter testing. According to Dr. Sun et al., manufacturers of HEPA and ULPA filters typically have not used automated control of filter test parameters during the certification of their filters. According to the authors, if the certification tests are not accurately controlled, the HEPA/ULPA filter may have been certified to meet specification, but it may have undetected deficiencies.
The new filter test can replace oil-based filter challenges with high-output PSL sphere challenges. The new test is also designed as a replacement of the typical operator-controlled tests. The new method combines leak detection and 99.9999 percent efficiency certification into one automated filter test system.
In another presentation, researchers at the National University of Singapore found that reducing the height of a ceiling chamber can lead to significant savings on construction costs. The researchers discussed how they set up a simulated clean environment as a model for new construction.
In other show news, DataStor Asia `97 featured contamination control conferences with topics such as identifying in-drive contamination; microcontamination control; in-process cleaning; maintaining clean disk drive production lines; in-drive contamination control; and low outgassing adhesives for the disk drive industry.
At the IFSA, point-of-use chemical purification; wafer surface cleaning enhancements, and integration of shallow trench isolation for deep-sub-micron manufacturing was presented. In addition, Semiconductor Equipment and Materials International`s George Lee presented a paper on the transition to 300 mm wafers.
Editor`s Note: Proceedings for CleanRooms Asia `97, DataStor Asia `97 and IFSA are available from Ms. Nuala (pronounced “New-La”) Kimball, CleanRooms Conferences, 10 Tara Blvd., 5th Floor, Nashua, NH 03062. Tel: (603) 891-9267; or Fax: (603) 891-9200.