February 1, 2011 — Aerotech ANT95-R and ANT130-R direct-drive rotary stages, part of Aerotech’s nano Motion Technology product line, offer in-position stability of 0.005 arc sec and incremental motion of 0.01 arc sec using the company’s direct-drive technology. They suit demanding high-throughput manufacturing applications such as disk-drive and MEMS manufacture and test, fiber-optic device alignment, as well as super-high-precision laboratory R&D applications.
The ANT95-R and ANT130-R rotary stages are available in 20°, 180°, or 360° continuous travel. Maximum speed is 200rpm and maximum acceleration is 400rad/s2. Axial load capacity is 2kg for the ANT95-R and 3kg for the ANT130-R. These rotary stages also offer an 11mm clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements.
The ANT95-R and ANT130-R series are designed for compatibility and easy integration with Aerotech’s ANT linear stages. Together these stages provide the accuracy, stability, and performance required for current and future nano-manufacturing and inspection applications. Their low profile reduces the effective working height, minimizing "stack-up" related errors when used as part of a multi-axis system.
The ANT95-R and ANT130-R were designed to operate in a 24/7 manufacturing environment while providing laboratory-grade accuracy. Unlike other extremely precise rotary devices, they require no periodic maintenance, and direct-drive technology ensures years of trouble-free operation.
Aerotech offers a complete motion system solution to get the most from your ANT series stage. Motion control options include the software-only 1-32 axis Automation 3200 machine controller, the stand-alone 1-10 axis Ensemble series motion controller, and the stand-alone single-axis Soloist series. Both PWM and ultra-low-noise linear amplifiers are available to complete your Aerotech motion system. Learn more at http://www.aerotech.com/
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