Amtech partners with DSG on vertical microwave for sub-50nm semicon processing

May 10, 2007 — Amtech Systems, Inc., supplier of production and automation systems and related supplies for the manufacture of semiconductors, solar cells and wafers, has entered into a manufacturing agreement with DSG Technologies to manufacture a vertical microwave system, combining Amtech’s vertical furnace platform with DSG’s Micro-Mode Microwave (M3) heating technology.

This new product will be used in the curing processes of sub-50nm semiconductor devices: low-k dielectric, shallow-trench isolation, pre-metal dielectric, and polymide.

The manufacturing agreement has an initial term of five years and provides for automatic one year renewals. It calls for Amtech and DSG to enter into a separate sales and service agreement granting Amtech exclusive rights for all of Europe and its existing customers worldwide.

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