Akrion ships system to MEMS manufacturer

Aug. 16, 2005 — Akrion Inc. announced receipt of a purchase order for a GAMA Series pre-diffusion cleaning tool. The $2.5 million system will ship to a repeat customer’s MEMS device manufacturing facility on the west coast of the United States.

The company says the 200mm system incorporates its latest innovations for the platform, including the new integrated Omega Carrier and poly-cassette stockers.

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