Brooks Automation to provide tools to STS

Sep. 13, 2005 — Brooks Automation Inc., a maker of products to enable manufacturing efficiencies for the semiconductor and other industries, and Surface Technology Systems PLC (STS), a provider of specialized plasma etch and deposition systems, announced that STS will be introducing new etch systems utilizing Brooks’ Marathon Express family of vacuum cluster tool automation platforms.

STS offers a range of products for semiconductor device manufacturing process applications such as advanced silicon etch, advanced oxide etch, inductively coupled plasma etch, reactive ion etch, chemical vapor etch, and plasma enhanced chemical vapor deposition.

The Brooks vacuum automation platform is an important enabler for STS, according to a prepared statement by Leslie Lea, deputy chief executive officer and chief technical officer at STS, who said that it allows the company to focus its R&D investments more efficiently on its core process technologies.

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