May 7, 2003 — Applied MEMS Inc.of Houston is providing packaging foundry services for Massachusetts-based Ion Optics’ MEMS-based gas sensors, according to a company news release.
Applied MEMS, a subsidiary of Input/Output Inc., will offer vacuum-packaging services for the SensorChip, which uses silicon micromachined infrared gas detector elements for consumer, automotive, environmental and medical applications. An Ion Optics official said Applied MEMS also could be helpful once the chips are produced in high volume.