Tool companies collaborate on AFM tip development

May 31, 2005 — Veeco Instruments Inc. (Nasdaq: VECO), a developer of atomic force microscopy (AFM) products, announced last week that it signed a joint development program with CEA Leti, an applied research electronics laboratory in Europe, and Team Nanotec, a fabricator of AFM probe tips.

Under the terms of the two-year agreement, Veeco, Leti and Team Nanotec will jointly develop tips to be used in Veeco’s AFMs for the semiconductor market. Each organization has designated a team of personnel and will provide resources including tips, tools and samples for the project.

The goal of the collaboration, according to prepared statements of Paul Clayton, vice president and business unit manager of Veeco’s automated AFM business, is to develop production-worthy AFM tips and qualification standards that will meet semiconductor customers’ future technology requirements for 65nm, 45nm and sub-45nm metrology.

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