Oct. 28, 2003 – Albany NanoTech has ordered two atomic-layer deposition systems from Genus Inc., a Sunnyvale, Calif.-based developer of semiconductor and data storage device manufacturing equipment, according to a company news release.
The nano center at the State University of New York in Albany will use the equipment for its 45-nm research and development activities. The StrataGem300 bridge tool will be used for advanced dielectric research, and the StrataGem200 for extreme ultraviolet lithography, the release said.