EV Group makes deal with Taiwan foundry

Feb. 13, 2003 — EV Group, an Austrian maker of MEMS and semiconductor wafer processing equipment, has completed a multimillion-dollar deal to sell equipment to Asia Pacific Microsystems Inc. (APM) in Taiwan, according to a news release.

The equipment has been installed in APM’s new MEMS wafer foundry. It includes a precision alignment and lithography system, automated resist processing systems, a wafer and mask cleaner and a wafer bonder.

APM designs and makes MEMS sensors and wireless communication components.

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