New Quick Polymer Stamp available for nanoimprint module

April 21, 2009: NIL Technology now offers a Quick Polymer Stamp (QPS), facilitating a fast nanoimprint approach. The QPS is a working stamp, easily produced from a silicon or quartz master, to be directly used for UV nanoimprint lithography.

The QPS solution greatly reduces the time of producing working stamps for the NIL process, while preserving both high resolution performance and easy-to-use features of the NanoLithoSolution (NLS) nanoimprint module, the company said in a news release.

The NLS nanoimprint module is a low cost tool used as add-on to existing UV-lithography mask aligners. The module is easily installed, has integrated Auto-Release and comes with all needed features for imprinting. The module has now been successfully installed at several locations in Europe and the US.


Two SEM pictures of a line grating pattern with approximately 400nm pitch: (left) Original laser-written silicon master from which a replicated QPS stamp was made, and (right) the result from the imprint in polymer, using the QPS stamp as master. (Source: NIL Technology)

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