New book covers MEMS reliability

January 28, 2008 — Research and Markets has announced the availability of a new book, “Reliability of MEMS”.

The company describes the book as the first “to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices.”

The book is divided into two major parts, the first covering the mechanical properties of the materials used in MEMS and the second discussing devices.

The book was written by MEMS researcher Osamu Tabata.

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