Veeco says its new InSight 3D AFM is “a true fab tool”

January 28, 2008 — Veeco Instruments Inc., has introduced its new InSight 3D Automated Atomic Force Microscope (AFM) Platform.

According to the company, the new platform is “the only metrology system available with the accuracy and precision required for non-destructive, high resolution three-dimensional measurements of critical 45nm and 32nm semiconductor features, with the speed to qualify as a true fab tool.”

Veeco’s InSight 3DAFM was designed specifically to address Critical Dimension (CD), depth and chemical mechanical planarization (CMP) metrology in a production environment, the company said.

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