Piezosystem jena intros nanopositioner, distributes SIOS nanomeasurement tools

May 2, 2008 — The German firm piezosystem jena — known for development, design, and engineering of piezoelectric actuator-based systems for micro- and nano-positioning and nano-automation — announces two developments intended to serve those needing high-resolution precision. The company has expanded its TRITOR line of field-tested nanopositioning tools, and has become the exclusive U.S. distributor for SIOS, the German manufacturer of nanoprecision measurement systems.

SIOS’s interferometric measurement systems, designed for calibration and control of nanoscale movements, are now available in the U.S. exclusively through piezosystem jena, which has offices in Hopewell, Massachusetts. The new metrology product line includes single-, double-, and triple-beam interferometers for length measurements down to 0.1nm, and for angular measurements down to 0.01 arcsec. A vibrometer is also available for vibrational analysis. Applications include semiconductor analysis, microscopy, materials analysis, and microstructure measurement.

And piezosystem jena’s new TRITOR 50 CAP is a compact (55 x 42 x 35 mm), three-axis nanopositioner that provides a travel of 50 microns. Specially designed solid-state hinges enable movement without friction; and specific, mechanical FEM-optimized design of the actuators enables dynamic features. Promising sub-nanometer resolution in open-loop operation and one nanometer in closed-loop operation, the system guarantees high-precision positioning.

An integrated capacitive measurement sensor subsystem eliminates hysteresis and drift to provide extremely high stability, linearity, and repeatability in closed-loop operation. The TRITOR 50 CAP is available with vacuum and cryogenic capabilities, and is particularly well suited for applications in optics and biology, laser tuning and fiber positioning, and scanner systems.

This past fall, piezosystem jena released a new amplifier to enable sub-nm positioning.

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