Category Archives: Materials and Equipment

March 26, 2007 — Arrowhead Research Corp. has formed a new wholly-owned subsidiary and has agreed to acquire the assets, as well as the name, of C Sixty, Inc. (C-60), a company pioneering the development of drugs based on buckministerfullerenes.

“The future of medicine lies in targeted delivery of therapeutics through nanotechnology,” said R. Bruce Stewart, Arrowhead’s Chairman. “Our experience and expertise in this area makes C-60 a great strategic complement to our other majority owned subsidiaries.”

Buckministerfullerenes, also known as fullerenes or buckyballs, are a highly structured, water soluble, nanoscale form of carbon, similar to carbon nanotubes, discovered by Richard Smalley, who received the Nobel Prize for his work in this area. The molecules allow drug designers the opportunity to attach therapeutic and targeting chemical groups in many configurations.

C-60 has secured and developed a strong patent position covering the strategic biomedical uses of fullerenes. Initially, the company will focus on the antioxidant activity of fullerenes. Arrowhead believes that drugs based on fullerene antioxidant molecules may have significant impact on several unsolved diseases, including Parkinson’s disease, Alzheimer’s, stroke, atherosclerosis, complications from diabetes and protection of bone marrow cells from cancer chemotherapy and radiotherapy. Solutions for any of these diseases could represent billion dollar annual market opportunities.

In December 2004, C-60 merged with CNI, which calls itself the world leader in the production of single-wall and other small-diameter carbon nanotubes. On March 22 Unidym acquired CNI.

Arrowhead Research Corporation is a publicly-traded nanotechnology company commercializing new technologies in the areas of life sciences, electronics, and energy. The company also operates two other majority owned subsidiaries commercializing nanotherapeutics. Calando Pharmaceuticals is a leading RNAi company specializing in the design and delivery of siRNA therapeutics. Insert Therapeutics is commercializing drug-delivery-enhanced small-molecule therapeutics and nucleic acids. Insert’s first anti-cancer drug candidate is in Phase I clinical trials.

(March 23, 2007) IRVINE, CA &#151 Designed for manufacturability and flexibility in various regional climatic conditions, the Multicore LF600 lead-free solder paste from the electronics group of Henkel provides humidity resistance, 24-hour open times, and low voiding.

By Charles Q. Choi, Small Times Contributing Editor

Image: Unidym

Mar. 22, 2007 — Nanotube manufacturer Carbon Nanotechnologies Inc. (CNI), co-founded by late Nobel Laureate and nanotube pioneer Richard Smalley, will merge with nanotube patent aggregator and product developer Unidym in Menlo Park, Calif.

Unidym has exclusive licenses to carbon nanotube patents from eight universities, including the California Institute of Technology, the University of California Los Angeles, Duke University and Rensselaer Polytechnic Institute. The combined company, known as Unidym, will also have exclusive licenses to all the intellectual property in CNI’s portfolio, for control of 59 U.S. issued carbon nanotube-related patents. The merger is expected to close in early April.

While Hyperion Catalysis in Cambridge, Mass., “controls the large-diameter multi-walled carbon nanotube landscape, Unidym will control the small-diameter carbon nanotube space,” asserts John Miller, vice president of business development at Arrowhead Research in Pasadena, Calif. Unidym is a majority-owned subsidiary of Arrowhead.

Unidym plans to begin selling transparent nanotube-based films in 2008 as replacements for indium tin oxide (ITO) in products such as touch screens and solar cells. While Unidym previously made carbon nanotubes for demonstration purposes, the merger will allow for mass production for commercial development of the ITO replacement.

The merger also enables Unidym to establish a program to license packages of patents covering carbon nanotube-based products. Such a “one-stop shop for licensing” would make previously scattered intellectual property available for product development, hopefully encouraging manufacturers to make new investments, Miller said.

CNI will “definitely benefit from this merger, since it was not able to penetrate the market as it hoped, and applications for carbon nanotubes didn’t materialize as quickly as they might have liked,” said Lux Research senior analyst Vahe Mamikunian in San Francisco. “And Unidym gains with CNI’s intellectual property, making it a more significant player.”

“We recognized that we were at a state in our growth where we needed to be nearer to downstream markets and thought Unidym was probably the farthest along in the electronics area, a high-value area we’re excited about,” said CNI president Bob Gower, who will take on a board member and advisor role in the merged company.

The merger will “really consolidate intellectual property from many diverse sources here, which will hopefully further speed up commercialization of carbon nanotube applications,” Mamikunian said. “This merger could also be the impetus for consolidation activity in the carbon nanotube space to accelerate.”

“There’s a need to get companies larger in the nanotech space. This does that. There’s a need to strengthen nanotech company intellectual property position. This does that. There’s a need to get to real in-use markets, and is a giant step forward for that,” Gower said.

The merger involves both assets and operations. Former CNI personnel will continue to work in Houston.

No investment bank assisted with the transaction. The Goodwin Proctor law firm represented Arrowhead; Gower said that as a matter of course CNI does not disclose its law firm in such matters.

March 21, 2007 – Nearly one year to the day after acquiring overlay metrology firm Soluris Inc., metrology equipment supplier Nanometrics Inc. says it is closing the firm’s Concord, MA facility and consolidating all of its overlay metrology production at a facility in Asia.

The decision essentially closes down Soluris’ Concord, MA headquarters, and shifts production of all of Soluris’ IVS product lines into one location in South Korea, where Nanometrics already makes its Orion and Caliper systems. The company says engineering and design resources will be pooled at the Korea site, though advanced overlay development will continue through a team in York, UK. The move is expected to be completed by 3Q07 and save more than $1 million annually.

“By consolidating our overlay manufacturing operations into one central facility in Asia, we are able to focus dedicated resources and improve manufacturing systems, providing our customers with enhanced product consistency, reliability and overall quality,” said Bert Plambeck, Nanometrics’ director of overlay product marketing, in a statement. “We see this convergence as a key factor in our ability to continue to provide best-in-class overlay metrology systems to our customers worldwide.”

Soluris was formed in 2003 through a management buyout of optical and electron metrology assets of Schlumberger Ltd.’s semiconductor group. The company’s flagship IVS 155 product, used for 200mm semiconductor overlay and CD measurement, boasted a user base of 150 installed systems worldwide.

The Nanometrics buyout of Soluris — just a month after it snapped up other complimentary technology with scatterometry pioneer Accent Optical Technologies — officially ended Soluris’ other project, Yosemite CD-SEM technology, which had drained all the company’s profits and faced a long uphill battle vs. entrenched and far larger competitors.

March 21, 2007 – Kenici Sekiya, former president/CEO/chairman of DISCO Corp., and Arthur Zafiropoulo, chairman/CEO of Ultratech Inc., have been appointed emeritus members of the SEMI board of directors, in recognition of their service to SEMI and the semiconductor industry, the association announced.

Skye led DISCO for 43 years until his retirement in early 2006. He was a voting member of SEMI’s International Board of Directors from 1994-2002 (and as a non-voting member through 2004), and also served on SEMI’s Japan Regional Advisory Board and International Trade Partners Conference organizing committee.

Zafiropoulo, a member of SEMI’s International Board of Directors since 1995, was a founding member and chairman of the SEMI Foundation Board of Trustees, which promotes SEMI education and workforce development initiatives. He was also the first recipient of SEMI’s Bob Graham Award, recognizing those who enhance customer value and promote the growth of the semiconductor equipment and materials industry through marketing excellence. His dry etch startup Drytek was acquired by General Signal in 1986, after which he led the company’s semiconductor equipment group international operations, and became president of its Ultratech Stepper business unit, which was spun out in 1993.

“These individuals have made significant and long-standing contributions to SEMI and its worldwide membership over many years,” said Stanley Myers, president and CEO of SEMI, in a statement.

March 19, 2007 – SEMI today reported that worldwide sales of semiconductor manufacturing equipment totaled $40.47 billion in 2006, compared to $32.88 billion in 2005, representing a year-over-year increase of 23 percent. The data is available in SEMI’s Worldwide Semiconductor Equipment Market Statistics (SEMS) Report.

“The worldwide semiconductor equipment industry resumed strong growth in 2006 as the robust memory chip market and continued transition to 300mm wafers fueled sales of manufacturing technology,” said Stanley T. Myers, president and CEO of SEMI. “With double-digit gains in all market regions, the equipment industry posted annual sales second only to the extraordinary levels in 2000.”

For the third year in a row, the Japan market region spent the most on semiconductor equipment, growing almost 13 percent over 2005 to reach US$9.20 billion. North America reclaimed the number two spot with $7.32 in equipment sales. Following closely behind were the regions of Taiwan and South Korea with spending of $7.31 billion and $7.01 billion. respectively.

After experiencing negative growth in 2005, the China market region grew the most in 2006, rising over 74 percent to US$2.3 billion. The Rest of World region, which aggregates Singapore, Malaysia, Philippines, other areas of Southeast Asia, and smaller global markets, increased almost 30 percent. The equipment market in Europe increased 10% in 2006.

The global wafer processing equipment market segment increased 26 percent; the assembly and packaging segment grew 14 percent; the total test equipment sales increased 21 percent.

Compiled from data submitted by members of SEMI and the Semiconductor Equipment Association of Japan (SEAJ), the report is a summary of the monthly billings and bookings figures for the global semiconductor equipment industry. The report includes data for seven major semiconductor producing regions and 22 product categories.

Thermal Gap Fillers


March 16, 2007

THERM-A-GAP 569 and 579 thermal gap-filler materials offer high conformability in pre-formed thicknesses of 0.02

March 16, 2007 – Bede X-ray Metrology has announced that Austin, Texas-based SEMATECH, the global semiconductor consortium for commercializing of technology innovations into manufacturing solutions, will use a Bede x-ray metrology system to evaluate novel semiconductor materials needed for the 45nm and 32nm technology nodes and beyond.

The Bede system will be used by SEMATECH researchers to investigate leading-edge frontend materials including SiGe, metal gates, and high-k dielectrics. More specifically, the system will assist metrologists in investigations into the phase and degree of crystallinity present in high-k dielectrics and metal electrodes, and the determination of the strain in SiGe films.

“Our evidence shows that the phase and crystallinity in high-k material have an impact on a device’s electrical characteristics,” says Alain Diebold, SEMATECH Senior Fellow and metrology expert. “Using XRD allows us to fine-tune the process, and speed up high-k development. Currently, XRD is a leading technique for measuring strain and composition in SiGe.”

X-ray metrology offers increased analysis of material properties and parameters, including thickness, at atomic levels, as a result of its short wavelength. However, Bede claims, unlike optical and opto-acoustic metrology, the system also measures strain, relaxation, phase, composition, and density — information that is key for full characterization of materials.

Frank Hochstenbach, director of sales and marketing, and responsible for customer partnerships at Bede X-ray Metrology, says, “I am delighted that SEMATECH, an organization which addresses critical challenges in advanced technology and manufacturing effectiveness on behalf of its worldwide membership of semiconductor manufacturers, is using our system to help to deliver new solutions and value to its customers and to the industry.”

For more recent SEMATECH news, see “SEMATECH: Planar CMOS, not finFETs, favored through 22nm”.

March 16, 2007 – North American-based manufacturers of semiconductor equipment posted $1.65 billion in orders in February 2007 (three-month average basis) and a book-to-bill ratio of 1.05 according to the February 2007 Book-to-Bill Report published today by SEMI. A book-to-bill of 1.05 means that $105 worth of orders were received for every $100 of product billed for the month.

The three-month average of worldwide bookings in February 2007 was $1.65 billion. The bookings figure is about one percent under the final January 2007 level of $1.67 billion and about 28 percent above the $1.29 billion in orders posted in February 2006.

The three-month average of worldwide billings in February 2007 was $1.58 billion. The billings figure is about two percent under the final January 2007 level of $1.60 billion (see Jan. 07 book-to-bill report) and 23 percent higher than the February 2006 billings level of $1.28 billion.

“The three month average for North American bookings and billings remained steady in February,” said Stanley T. Myers, president and CEO of SEMI. “Though semiconductor industry market trends have slowed some in the first part of 2007, current equipment data are at levels well above one year ago.”

The SEMI book-to-bill is a ratio of three-month moving averages of worldwide bookings and billings for North American-based semiconductor equipment manufacturers. Billings and bookings figures are in millions of U.S. dollars.

March 15, 2007 – According to research reported by the Georgia Institute of Technology, the 3D shells of tiny ocean creatures known as diatoms could provide the foundation for novel electronic devices, including gas sensors able to detect pollution faster and more efficiently than conventional devices.

Using a chemical process that converts the shells’ original silica (silicon dioxide, SiO2) into the semiconductor material silicon, researchers have created a new class of gas sensors based on the unique and intricate shells produced by diatoms. The converted shells, which retain the 3D shape and nanoscale detail of the originals, could also be useful as battery electrodes, chemical purifiers, and in other applications requiring complex shapes that nature can produce better than humans.

“When we conducted measurements for the detection of nitric oxide, a common pollutant, our single diatom-derived silicon sensor possessed a combination of speed, sensitivity, and low-voltage operation that exceeded conventional sensors,” says Kenneth H. Sandhage, a professor in the School of Materials Science and Engineering at the Georgia Institute of Technology. “The unique diatom-derived shape, high surface area, and nanoporous, nanocrystalline silicon material all contributed towards such attractive gas sensing characteristics.”

The unique devices, part of a broader long-term research program by Sandhage and his research team, were described in the March 8 issue of Nature. The research was sponsored by the U.S. Air Force Office of Scientific Research and the U.S. Office of Naval Research.

According to the journal paper, scientists estimate that roughly 100,000 species of diatoms exist in nature, and each forms a microshell with a unique and often complex 3D shape that includes cylinders, wheels, fans, donuts, circles, and stars. Sandhage and his research team have worked for several years to take advantage of those complex shapes by converting the original silica into materials that are more useful.

Ultimately, the team says it would like to conduct such conversion reactions on genetically modified diatoms that generate microshells with tailored shapes. However, to precisely alter and control the structures produced, further research is needed to learn how to manipulate the genome of the diatom. Since scientists already know how to culture diatoms in large volumes, harnessing the diatom genetic code could allow mass production of complex and tailored microscopic structures. Sandhage’s colleagues, professor Nils Kroger (School of Chemistry and Biochemistry at Georgia Tech) and Mark Hildebrand, PhD, (Scripps Institution of Oceanography) are currently conducting research that could allow for genetic engineering of diatom microshell shapes.

Silicon is normally produced from silica at temperatures well above the silicon melting point (1414 degrees Celsius), so that solid silicon replicas cannot be directly produced from silica structures with conventional processing. The Georgia Tech researchers used a reaction based on magnesium (Mg) gas that converted the silica of the shells into a composite containing silicon (Si) and magnesium oxide (MgO). The conversion took place at only 650 degrees Celsius, which allowed preservation of the complex channels and hollow cylindrical shape of the diatom.

The magnesium oxide — making up about two-thirds of the composite — was then dissolved out by a hydrochloric acid solution, which left a highly porous silicon structure that retained the original shape. The structure was then treated with hydrofluoric acid (HF) to remove traces of silica created by reaction with the water in the hydrochloric acid solution.

The researchers then connected individual diatom-derived silicon structures to electrodes, applied current, and used them to detect nitric oxide. The highly porous silicon shells, which are about 10 microns in length, could also be used to immobilize enzymes for purifying drugs in high-performance liquid chromatography and as improved electrodes in lithium-ion batteries.

Tests showed that the silicon the researchers produced was photoluminescent — which also shows the fabrication process produced a nanoporous, nanocrystalline structure, and may have interesting photonic applications in addition to electronics.

Though Sandhage and his colleagues have demonstrated the potential of their technique, they must address significant challenges: The sensors will have to be packaged into useful devices, for example, connected into arrays of devices able to detect different gases, and scaled up for volume manufacture, before they can produce useful devices.

The Aulacoseira diatoms used in the research reported by Nature were millions of years old, obtained from samples mined and distributed as diatomaceous earth. To provide samples with other geometries, Sandhage’s group has set up a cell culturing lab, with the assistance of Georgia Tech colleagues Kroger and Nicole Poulson, to grow the diatoms.

Sandhage, a ceramist by training, says he would like to work directly with electronics engineers and others who have specific interests in silicon-based devices.

In addition to Sandhage, other researchers who contributed to the paper included Zhihao Bao, Michael R. Weatherspoon, Samual Shian, Ye Cia, Phillip D. Graham, Shawn M. Allan, Gul Ahmad, Matthew B. Dickerson, Benjamin C. Church, Zhitao Kang, Harry W. Abernathy III, Christopher J. Summers, and Meilin Liu.