Category Archives: Materials and Equipment

April 3, 2012 — Ferro Electronic Materials expanded its low temperature co-fired ceramic (LTCC) portfolio, adding a line of cost-effective matched materials. The L8 LTCC system claims better performance over a greater range of frequencies and easier manufacturability than market alternatives.

The L8 LTCC system’s dielectric properties provide lower loss than competitive, price-sensitive LTCC products, Ferro reports, enabling lower-power components. L8 performs well at up to 40GHz (see the figure below). The lead-free, RoHS-compliant glass-ceramic formulation provides high strength and may be used in wire-bond, solderable, brazable, and plateable packaging applications.

Ferro supplies L8 ceramic tape with a full complement of matched metallization pastes that include silver, gold, plateable silver, and mixed-metal formulations. Gold and nickel may be electrolessly plated onto silver surfaces to improve performance in harsh environments and for easier wire bonding. L8 pastes have good printability and the material set has a broad processing window with multiple co-firing options with either belt or box furnaces.     

The L8 system is suitable for cost-sensitive low- to mid-frequency telecommunications, automotive, and medical modules, components and sensors as well as higher frequency aerospace, satellite and other high-reliability applications.

Learn more about the Ferro L8 LTCC product line in booth 9-212 at SMT Hybrid Packaging 2012, May 8-10 in Nuremberg, Germany.

Ferro Corporation is a global supplier of technology-based performance materials for manufacturers in electronics, solar, and other end markets. Learn more at http://www.ferro.com.

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April 2, 2012 — The global semiconductor materials — wafer fabrication and packaging materials — market increased 7% in 2011 compared to 2010, with record revenues of $47.86 billion. This is the second record year for the sector in a row, following $44.85 billion spent in 2010.

The semiconductor sector spent $24.20 billion on wafer fabrication materials (increased from 2010’s $23.05B) and $23.67 billion on packaging materials (up from $21.80B in 2010).

Steady revenue growth in all materials categories contributed to the year-over-year growth of the total semiconductor materials market, though currency effects were a contributing factor as well.

Taiwan yet again consumed the most semiconductor materials (see the table), due to its large foundry and advanced packaging base. Japan’s chip materials market contracted 1%, and all other regions spent modestly more YOY.

The market in South Korea was driven by fab materials, while the market in China was driven by packaging materials in 2011.

Table. 2010-2011 Semiconductor materials market by world region
(Dollars in U.S. billions; Percentage Year-over-Year). Source: SEMI April 2012.

 


Region

2010

2011

% Change

Taiwan

9.40

10.04

7%

Japan

9.39

9.34

-1%

Rest of world: Singapore, Malaysia,

Philippines, other areas of Southeast

Asia and smaller global markets

7.59

8.19

8%

South Korea

6.35

7.15

13%

North America

4.59

4.92

7%

China

4.31

4.86

13%

Europe

3.22

3.38

5%

Total

44.84

47.86

7%

The Material Market Data Subscription (MMDS) from SEMI provides current revenue data along with seven years of historical data and a two-year forecast. A year subscription includes four quarterly updates for the material segments reports revenue for seven market regions (North America, Europe, ROW, Japan, Taiwan, South Korea, and China). The report also features detailed historical data for silicon shipments and revenues for photoresist, photoresist ancillaries, process gases and leadframes. For more information or to subscribe, contact SEMI customer service at 1.877.746.7788 (toll free in the U.S.) or 1.408.943.6901 (International Callers). SEMI is a global industry association serving the nano- and micro-electronic manufacturing supply chains. Internet: www.semi.org.

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April 2, 2012 — Intel, SEMATECH, and other top chip makers, suppliers, and research organizations will send speakers to SEMICON West, July 10-12 in San Francisco. The event will single out new transistor architectures, advanced lithography, 450mm wafers, and other major developments for the microelectronics sector.

Shekhar Borkar, director of Extreme-scale Technologies at Intel Labs, will provide the technology keynote on Intel’s mid- and long-term development efforts in IC scaling, power reduction, and performance improvements. Attend at 9:00am, July 10.

SEMI plans 3 TechXPOT sessions at SEMICON West: Fully depleted transistor architectures on Tuesday, next-generation lithography on Wednesday, and the International Technology Roadmap for Semiconductors (ITRS) on Thusday.

Learn about advances — and challenges — in fully depleted devices and III-V channel materials for new transistors at 10:30am, July 10, in the South Hall TechXPOT session. Speakers:

  • Raj Jammy, VP, Materials and Emerging Technologies, SEMATECH
  • Carlos Mazuré, EVP  and CTO, Soitec
  • Kaizad Mistry, VP, director of Logic Technology Integration, Intel
  • Aaron Thean, director, Logic Program, imec

Lithography achievements, technology roadmaps and development efforts will be discussed in the July 11,10:30am, South Hall TechXPOT session. Learn about extreme ultraviolet lithography (EUVL) readiness from transmission and conversion efficiency to mask and resist work. The session will also cover double-patterning and the role of complementary technologies, such as e-beam lithography. Speakers:

  • Yan Borodovsky, senior Intel fellow, director, Advanced Lithography, Intel
  • Stefan Wurm, director, Lithography, SEMATECH
  • Hans Meiling, director, Product Management EUV, ASML
  • Franklin Kalk, CTO, Toppan Photomasks
  • Serge Tedesco, IMAGINE (MAPPER), program manager, CEA-Leti
  • Donis Flagello, NRCA fellow, Nikon Research Corporation of America

The International Technology Roadmap for Semiconductors (ITRS) sessions will be part of the TechXPOT and Extreme Electronics platforms, July 12.

The Test Vision 2020 Conference will be held in conjunction with SEMICON West, on July 11-12.

A special session on supply chain opportunities in 450mm wafers will be held on July 12.  

Other TechXPOT sessions, yet to be announced, will address new materials, advances in 3D-IC, MEMS, test, advanced packaging, LEDs, OLEDs, and productivity solutions for 200mm and 300mm fabs.  

Register through April 12 for a free Expo Only badge. For more information, including keynotes, programs, registration, and exhibiting, please visit www.semiconwest.org.

SEMI is a global industry association serving the nano- and microelectronics manufacturing supply chains. For more information, visit www.semi.org.

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April 2, 2012 – BUSINESS WIRE — Bruker Corporation (NASDAQ:BRKR) acquired all of the shares of SkyScan N.V., a scientific instruments company serving materials science and life sciences/pre-clinical imaging needs.

SkyScan makes advanced, high-resolution micro computed tomography (micro-CT) systems for 3D X-ray imaging, including 3D imaging of electronic components; synthetic materials, ceramics, and other materials; new devices such as microsensors and fuel cells; and medical and geological applications.

Financial details of the buy were not disclosed, but Bruker expects it to add approximately $13 million in revenue for the remainder of 2012. SkyScan will be renamed Bruker microCT NV, providing CT instruments under the SkyScan brand. It will operate at its Belgium facility under the same management, with founder and CEO Dr. Alexander Sasov taking on the title managing director and CEO. Bruker will invest in additional micro-CT applications and demo centers worldwide.

SkyScan micro-CT 3D X-ray imaging tools will now be sold through Bruker

March 30, 2012 — Semiconductor fab equipment supplier SUSS MicroTec has acquired Tamarack Scientific Co. Inc. in a share purchase of $9.34 million, plus an additional variable earn-out component which depends on the development of revenues for the next 3 financial years.

Tamarack makes ultraviolet (UV) projection lithography tools and laser micro-structuring systems for manufacturing 3D semiconductor packages, micro electro mechanical systems (MEMS), and light-emitting diodes (LEDs). Laser processing tools include excimer and solid state; photolithography tools include proximity and projection.

Tamarack products are installed from R&D facilities to high-volume manufacturing plants. The company in based in the US, with an applications lab, cleanroom, and short-run manufacturing support in addition to its capital equipment offering.

The acquired intellectual property (IP) complements SUSS’s exposure technology portfolio with projection lithography. The additional core technology and product line for back-end semiconductor lithography gives SUSS a range of price/performance offerings for customers, said Frank P. Averdung, president and CEO of S

Sensors in Design 2012 was opened March 28 at the San Jose McEnery Convention Center, in conjunction with Design West, an agglomeration of seven individual design-related symposia with a common exhibition floor. This is my first time attending this meeting, but I overheard several other folks remarking that it’s good to see attendance is back up after a slump the past two years.

The sensors symposium opened with a panel discussion on the future of MEMS. Rob O’Reilly of Analog Devices, Dave Rothenberg of Movea, and Stephen Whalley of Intel comprised the panel, moderated by Alissa Fitzgerald of AM Fitzgerald & Associates. Intel is a MEMS user and systems designer but not a manufacturer, noting that more standardization is required for greater scalability and a robust foundry infrastructure. Healthcare opportunities range from smart phone consumer apps to implantable devices, and will take greater advantage of printable electronics for end device integration. MEMS accelerometers and gyroscopes have been around for 30-40 years, but did not proliferate widely until the price dropped below $5. Other devices that may be poised for their own volume explosion are being hindered by their dependence on expensive TSV solutions for system integration; other system integration architectures must be developed. Whalley opined gyroscopes need to drop below $1 for broader system implementation, but O’Reilly said that this will never happen. There was also some lively misalignments as to whether component margins were adequate. Medical device realms are broadly divided into wearable and implantable, or by clinical devices and lifestyle devices. Either way, FDA approvals will throttle one group severely, while those not requiring such approval will lead the market growth. O’Reilly noted that the MEMS manufacturers are adapting SEMI and JEDEC standards to their industry, but they don’t happen to be MEMS-specific standards. The entry of CMOS foundries like TSMC into MEMS production will likely accelerate the broader adoption of standards. Pricing is an incentive for more implementation of printed electronics, but the requisite manufacturing repeatability is still lacking for many applications. The oil and gas industry has the potential to drive innovation with healthier margins, and without the bureaucratic inhibitors found in medical applications. Energy harvesting MEMS are more likely to prosper with thermoelectric Peltier devices than with piezoelectric vibration harvesters, due to the power density opportunity available.

Nancy Dougherty of Proteus Biomed talked about mindfulness pills for the quantified self. The quantified self is a conceptual platform for self-monitoring of health-related factors based on the premise that you have to be able to measure it before you can fix it. Our national healthcare system is based on population statistics, not on individual metrics. This technology-enabled movement can help change that. Proteus itself designs digestible electronics that can be embedded in pills and report biometric data to a receiver patch worn on the torso, including the identity of the pill and the time it was ingested. An interesting experiment with the use of placebo pills to effect real change in mood can be found at http://theengineeress.com/mindfulness. The pill electronics are powered by opposing calcium and magnesium electrodes that are activated by stomach fluids.

Peter Himes of Silex Microsystems (self-identified as the world’s largest MEMS foundry) gave several examples of MEMS implementation for biomedical applications. MEMS are particular adept for applications in which only very tiny analyte samples are available, though they can also provide significant cost advantages where MEMS functionality can displace bench top equipment alternatives. Microfluidics technology is particularly prevalent in this arena, though devices like micro defibrillators and micro needle patches for drug delivery and bodily fluid sampling also play a large role here.

Alissa Fitzgerald of AM Fitzgerald and Associates described more medical research applications of MEMS technology. Blood pressure cuffs in doctors’ offices have used MEMS pressure sensors since the 1980s; who knew? Contact lenses with a strain sensor to measure intraocular pressure constantly and in real time (made by Sensimed) may displace the need for annual glaucoma testing. Second Sight is commercializing a prosthetic retina that can provide a degree of optical nerve stimulation in lieu of natural sight to circumvent some forms of blindness. The introduction of flexible and biodegradable materials is expanding the repertoire of MEMS tools well beyond its traditional silicon origins.

Jamshid Avloni of Eeonyx Corporation took a look at innovations and applications in interactive fabric sensor technology. Taken to its extreme, this means electronic clothing. The underlying technology is conductive textiles, with coatings that are robust enough to stand up to conventional laundering. Fabric sensors have several advantages over thin film sensors, not the least of which are comfort and invisibility, not in the Harry Potter magic cloak sense but in the sense of presenting nothing foreign or unfamiliar to the user. I’ve already seen a commercial implementation of these materials in a shoe store, where you can step on a platform and get a precise pressure map of your footstep to assist with sizing shoes or designing inserts. Pressure sensing gloves have been used in applications ranging from golf and piano lessons to sniper training. A clean version of paintball has been developed, using rubber balls and impact sensing vests in place of paint, making cleanup a non-issue. A sample of coated material felt no different from conventional clothing fabric. Resistivities of a fabric sample pack ranged from 15 Ω/square to 104Ω/square.

See http://www.eksobionics.com for an example of a biomechanical exoskeleton that makes extensive use of these materials to enable paralyzed people to walk.

 

Keithley Instruments, Inc. introduced the Model 2657A High Power System SourceMeter® instrument, which is optimized for high voltage applications such as testing power semiconductor devices, including diodes, FETs, and IGBTs, as well as characterizing newer materials such as gallium nitride (GaN), silicon carbide (SiC), and other compound semiconductor materials and devices. It is also useful for characterizing high speed transients and performing breakdown and leakage tests on a variety of electronic devices at up to 3,000V.


The instrument offers a flexible, four-quadrant voltage and current source/load coupled with precision voltage and current meters. It combines the functionality of multiple instruments in a single full-rack enclosure: semiconductor characterization instrument, precision power supply, true current source, 6-1/2-digit DMM, arbitrary waveform generator, voltage or current pulse generator, electronic load, and trigger controller, and is fully expandable into a multi-channel, tightly synchronized system via Keithley’s TSP-Link® technology. The Model 2657A can source or sink up to 180W of DC power (±3,000V@20mA, ±1500V@120mA). The Model 2657A also offers 1fA resolution, allowing it to make fast, accurate sub-picoamp measurements even when sourcing up to 3000V.

Price starts at $17,900 USD, depending on configuration and geography. Shipments will begin in May, with lead times of two weeks ARO. ACS Basic Edition software: $5,000 USD. Model 8010 High Power Test Device Fixture: $6,500 USD.

RED Micro Wire (RWM), a subsidiary of RED Equipment, announced a new high-quality copper wire featuring glass insulation for use in semiconductor wire bonding. Using a new technology where the wire is cast instead of drawn, the wire can be used like traditional copper bonding wire but offers several advantages that make it more cost-effective.

The industry is interested in copper as an alternative to gold, which has become quite expensive due to the rise in gold prices.  There is also interest in moving to smaller diameter wires for high pincount devices. RED Micro Wire is able to scale the wire down to 4 microns, which is far smaller than the 16-14 micron limit of other approaches.  

"OSAT suppliers, IDMs, wafer companies, and fabless semiconductor companies will find RMW’s solution a highly reliable alternative to using gold wire, which, until now, has been known the standard,” said Shimon Dahan, CEO, RED Micro Wire. "By providing cost-effective, low diameter, insulated micro wire that is as ‘good as gold,’ we can help our OEM customers keep up with Moore’s law, as they prepare their own designs for the future."

Danny Hacohen, VP Business Development & Marketing, said the bonding wire market is expected to be $6 billion in 2012, and that the market share of copper is expected to exceed 70% within the next two years.

"Advanced packaging technology is recognized as an essential ingredient in delivering cost-effective semiconductor solutions to a variety of electronic applications today.  Manufacturers are challenged in adopting new technologies for wire bonding," said Joanne Itow, analyst, Semico Research Corp. "If RED Micro Wire can show cost-efficiencies in addition to their ability to deliver scalability, quality and yield as compared to current packaging technology, the industry should be very excited by the company’s glass-insulated bonding wire."

Unlike traditional wires, RMW’s wires are cast, not drawn. This enables the production of a soft metal core with a high strength, ultra-fine glass coating. RMW’s innovative control-over- core and glass coating enables unmatched synergetic efficiency.

Copper has oxidation issues, which is presently being addressed by a coating of palladium (Pd). The glass-coating, which is a beneficial byproduct of how the wire is fabricated by casting, provides the same protection. Hacochen said that glass is very flexible is does not crack or break in normal use. He also said that the glass does not get incorporated into the bond during wire bonding (typically ball or wedge bonding).

Red Micro Wire offers a number of benefits including:

•             Avoids anti-oxidation enabling a longer shelf life

•             Able to support larger spools enabling simpler materials management

•             Protects against “shorts” since the wire is coated and cannot make contact

•             Able to scale down to 4 microns far smaller than the 16-14 microns current wire can scale enabling it to support designs of the future and the overall scalability of the industry 

•             Flexibility in design, relaxed design rules due to no exposed wire

RMW will begin to sample the technology with OEM customers in March 2012 with full production by the end of the year. RMW R&D is done in Israel and manufacturing is planned to be at RED premises  in Singapore while providing best proximity to major Asia Pacific assembly and packaging players.

The technology will be used initially with copper wire, but will also be used with other types of metal cores (including Pt, Au, Ag,), and can be used in applications outside, as well as within the semiconductor industry. RED Micro Wire is a subsidiary of Singapore-based RED Equipment.

March 26, 2012 — Applied Materials (AMAT) will host its annual Analyst meeting this week (March 28). Barclays Capital and Citi share expectations for AMAT’s update and the wafer fab equipment (WFE) outlook in general.

Figure. WFE spending by segment ($B). Source: Barclays Research.

A more bullish outlook from foundries might increase AMAT’s projections, though Barclays expects limited changes to the H2 2012/2013 gameplan. Applied Materials is more optimistic on 2012 spending outlook, citing increasing fab capacity needs due to higher unit demand of mobile devices and increasing die size of key mobile chips, Citi analysts report after a pre-Analyst Day call with AMAT CEO Michael R. Splinter. 2013 will also see a boost, Splinter said.

Mobile competition and higher capital intensity (due to lack of EUV/450mm) will drive wafer fab equipment (WFE) to the mid/high-$30 billion level in the next several years, Citi reports.

More information is also expected around AMAT’s Varian Semiconductor (VSEA) purchase. The company expects record revenue from its recent VSEA acquisition in FQ2 on foundry strength, leading Citi to say that AMAT is clearly "ahead of its curve in integrating VSEA into its semi operation."

Industry trends, such as the use of deposition in 3D packaging and the slow growth in displays, will also be covered. Barclays expects AMAT to focus on the recovery roadmap and the future growth potential, such as metal-oxide and LTPS technologies for displays.

Silicon — 2012 WFE market at ~$31B, focus on 2013
Applied Materials should maintain its outlook for the 2012 WFE market to total ~$30-35 billion (flat to -15%), likely including the LED MOCVD market. Barclays models 2012 WFE market at ~$31B (or flat to down slightly), with order sustainability at least through 1H12 driven primarily by foundries. Specifically, Barclays sees AMAT’s Silicon orders growing from ~$1.42B in Jan Q to ~$1.55B in April Q and ~$1.50B in July Q. Barclays does see foundry strength as 1H12 loaded, and looks to a resumption in NAND spending growth to pick up the slack in 2H12 (though the magnitude of the likely order decline in foundry remains uncertain). At this point, Barclays sees a potential for a $28-32B 2013 WFE market as largely driven by macro-economic forces. In terms of segments, Barclays expects, on a Y/Y basis, a slight uptick in NAND and MPU, flattish DRAM, and a decline in Foundry. For Foundry, although the magnitude of the decline will likely be dictated by whether and how much leading foundries like TSMC raise their 2012 capex budget to compensate for currently poor 28nm yields, Barclays expect a rise in capital intensity coupled with growing customer demand for leading edge capacity should enable a 2013 WFE market of $28-32B.

AMAT lost share in WFE market
At last year’s analyst day, management highlighted expectations for AMAT to gain 1+% share in the WFE market, driven by gains in etch, inspection, and ECP. On its most recent call, however, management discussed the fact the company actually lost market share in etch and CMP, though AMAT did see some gains in electroplating, deposition, and other. AMAT’s portion of the overall WFE pie appears to have declined by ~3% in 2011. This looks to be the case even when factoring in the portion of the company’s AGS business likely attributable to 200mm equipment and Silicon service. Barclays does recognize that the WFE mix shift in 2011 turned more to litho as well as AMAT’s relatively higher exposure to DRAM likely played a role in the decline. However, Barclays does believe that share gains continue to prove somewhat more difficult than likely expected.

VSEA’s implant tools
With the completion of the Varian acquisition in November 2011, AMAT once again takes part in the Ion Implant market, which Barclays estimates at ~3-3.5% of WFE in 2012. Barclays expects management to highlight the attractiveness of this segment with Varian’s 75+% share of the market now fully tucked in under SSG. Prior to acquisition, Barclays would recall that Varian had two remaining areas for share gains — the High Energy market and Japan, where share gains lagged compared to other served areas. Going forward, Barclays expect AMAT not only to address traction in those markets but also to highlight continued traction with the PLAD (plasma doping) tools, which enabled Varian to have a 100% market share in the Ultra high dose market.

Currently, Varian’s PLAD tools are mainly used by memory manufacturers, though DRAM has a larger share. With NAND spending expected to pick up in 2H and a potential lift in DRAM in 13, Barclays expects AMAT to highlight the increasing TAM over the next several years. Barclays also notes that among the various development work Varian has done to date to expand into adjacent markets (solar, LEDs, CMOS image sensors), the Solion solar tool remains the key revenue contributor in the near-term, though look for incremental color on the longer-term opportunities from the other adjacent markets during the Varian break-out.

Deposition intensifying thanks to 3D structures
As 3D transistors become more popular and as back-end semiconductor packaging turns to more wafer level packaging (WLP) of 3D multi-die structures with TSVs, both the importance and spending on deposition equipment is expected to increase. In the memory market, NAND is currently reaching a point where cost reduction from shrinks isn’t necessarily enough. Thus, vertical scaling, which accomplishes similar results as 2D planer shrinks by increasing performance and lowering power consumption, becomes more attractive. The key implication here is that capital intensity per square mm actually moves higher by utilizing this 3D process. Thus, as a leader in deposition with close to 40% share, AMAT is poised to capitalize on such industry shifts. To this end, Barclays expect AMAT to highlight and provide updates on its wide Deposition product suit across CVD, ALD, PVD, and ECP equipment offerings.

Display capex mix-shift to metal oxide/LTPS a positive
Big picture, Barclays expects AMAT to update its Display segment roadmap by highlighting technological shift to Metal Oxide and LTPS (low temperature polysilicon) for OLED and high-resolution LCDs as AMAT provides an update on its latest display products. As volume production for these processes ramp up in ’12, Barclays expect AMAT to benefit from Metal Oxide backplane, where Barclays see better CVD (+20-25%) and PVD (+50%) intensity vs. the thin film a-Si technology. Likewise, LTPS should also enable AMAT to see increasing CVD (~2x+ higher) dollar opportunities. Specific to the latest systems, Barclays believes metal oxide and LTPS are enabling 30% and 60-70% bigger TAM, respectively, relative to a-Si. As for spending this year, Barclays notes that Samsung (SMD’s) spending this year will be targeted at LTPS (rather than metal oxide) backplanes, with a focus on scaling to Gen 8 production, which remains difficult given the limitations of fine metal mask technology at the larger motherglass sizes. For metal oxide backplanes, LG Display and Sharp are the dominant spenders this year, though the volume ramp for Sharp’s IGZO technology continues to slip.

Currently, Barclays’ checks indicate that AMAT is seeing supply chain tightness on its latest models in these two categories, though Barclays don’t expect recovery in Display until panel prices stabilize (Barclays model revenues -40% Y/Y in CY12). In terms of end demand, Barclays expects AMAT to highlight smartphones, tablets, and also emerging market countries as the expanding drivers of demand for display. Altogether, Barclays look for AMAT to affirm the bottoming process is now complete for Display and to shift the focus towards growth opportunities in both orders and products (though timing here remains uncertain).

EES trajectory continues to be uncertain
In the latest quarter, EES revenues not only declined 34% Q/Q, but orders were also down
62% due to continued industry overcapacity. OMs even slipped to negative territory (-8%),
though excluding the inventory write-down, OMs were generally breakeven. With so much
negative news around this segment, Barclays expect management will concentrate on providing
color on the recovery roadmap from here. In terms of optimistic areas, Barclays expect AMAT to
maintain that it is the #1 PV equipment provider, is a top supplier to Chinese manufacturers,
and the company continues to have ~50% share in served markets. Moreover, Barclays expect
AMAT to focus on the healthy long-term growth in installations with updates on
upside/downside scenarios for the industry. In terms of product highlights, Barclays expect
AMAT to bring its c-Si PV system to the limelight and showcase an expanding addressable
market in the industry as a result of new process steps and Gen 2 solar cells. While Barclays views the long-term opportunities for EES as attractive, overcapacity and macro conditions will be near term headwinds for the industry (Barclays models revenues -71% Y/Y in CY12).

Updated target model
Applied failed to meet its target model in FY11, led by relative underperformance
particularly in SSG and AGS. Here, Barclays points to pricing pressure from a consolidated
customer base (i.e., read Samsung) as well as higher mix of 200mm lower margin service
revenues (in part due to AMAT’s difficulty in 2011 to fill the early ramp in 200mm
equipment demand). Looking ahead, and considering growing reliance on TSMC and
Samsung as well as initial investments in 450mm R&D, Barclays looks for AMAT to offer a more
conservative target model for both SSG and AGS. For Display, Barclays notes that the tools being
sold for metal oxide and LTPS production are somewhat lower margin than the a-SI
deposition tools, suggesting that the display capex mixshift to these two technologies may
cause some adjustment to the Display target model as well.

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