Category Archives: MEMS

March 2, 2009: Pixavi has launched a MEMS-featured videoconferencing camera that it is billing as “recession-proof technology.”

The Xcaster, the Norway-based company said in a news release, is a compact, wireless videoconferencing and collaboration camera, capable of communication and collaboration using high definition video and cd quality audio to any computer, video conferencing or telepresence endpoint. It offers an “audiovisual experience so far offered only by stationary and meeting room HD video conference systems,” the release said. “The result is obvious: Reduced travel cost and increased efficiency.”

The MEMS component is an integrated gyroscopic sensor, enabling the user to collaborate in real time over HD video and audio ubiquitously with his or her surroundings.


The Xcaster wireless HD camera contains MEMS gyros for stabilization

March 2, 2009: Norcada Inc., a MEMS design and product development company, has announced the availability of a new TEM (transmission electron microscope) nitride window array device to the TEM research community.

The new TEM window array devices enable the end users to conduct multiple analyses in-situ on a single TEM nitride membrane device, which increases the throughput significantly, Norcada announced in a news release.

The TA301 series TEM nitride window array device has nine individual membrane windows in a 3×3 array pattern on a single 200μm-thick octagon-shaped silicon frame, which fits inside a 3mm diameter circle. Each silicon nitride window of the 3×3 array is 100μm × 100μm in size, and the spacing between two adjacent windows is 350μm (edge to edge).

The initial devices being offered have a 100nm thickness low-stress silicon nitride membrane (part number TA301C). Additional TEM devices with 30nm and 50nm thickness silicon nitride membranes will become available shortly.


Norcada TEM Window. (Photo courtesy of Norcada Inc.)

February 24, 2009: Seer Technology Inc. has announced a new MEMS-based personal navigation system called the NaviSeer, at a military and security conference in the United Arab Emirates.

“NaviSeer uses advanced MEMS technology to provide a lightweight and compact wearable unit so that exact locations of personnel are always visible,” Kent Garland, NaviSeer’s product manager, said in a news release. “With NaviSeer’s lifelike 3-D user interface, a field commander can constantly see all personnel and make educated critical decisions in harsh and GPS denied environments.”

NaviSeer is designed to integrate seamlessly into civilian and military GPS communication systems to provide personnel position information to within 2% accuracy of distance traveled, the release said. The unit, which weighs less than 5oz, fits comfortably on the wearer’s back and translates body movement into latitude, longitude and elevation digital positions which are continuously updated to the command and control center.

Seer Technology is now taking orders for NaviSeer with product delivery scheduled for early 2Q09.


The NaviSeer allows commanders to know exact location of personnel. (Photo courtesy of Seer Technology Inc.)

L


February 23, 2009

L

February 20, 2009: EPCOS AG is introducing what the Munich-based company is calling the world’s most compact packaged sensors for barometric pressure measurement, and it comes with the firm’s chip-sized MEMS packaging.

With dimensions of only 1.7×1.7×0.9 mm2, the components are many times smaller than comparable competitor products and open up numerous applications for portable electronics, the company said in a news release.

A further advantage of the new sensors is the cost-effective CSMP (chip-sized MEMS package) packaging technology developed by EPCOS, the news release said.

EPCOS also offers a sensor variant in a conventional package with a gel-protected stainless steel pressure port. With a footprint of only 3×3 mm2 the ASB1200E SMD pressure sensor enables the further miniaturization of barometric applications that are exposed to high humidity, the company said.


Tiny barometric pressure sensors open up numerous portable electronics applications, EPCOS says. (Photo courtesy of EPCOS AG)

February 13, 2009: NanoInk has introduced its next generation Dip Pen Nanolithography system for desktop nanofabrication, the DPN 5000.

Having evolved from the popular NSCRIPTOR DPN System, this new instrument brings greater control and performance to the world of desktop nanofabrication, the company announced in a news release.

The company said the DPN 5000 offers versatile nanopatterning capabilities coupled with high-performance AFM imaging for immediate characterization of the deposited patterns. NanoInk has developed a variety of custom MEMS-based ink delivery devices, allowing a wide range of materials to be deposited under precisely controlled conditions.

System highlights include a new, ultra-low noise scanner with closed loop flexure technology to produce accurate and repeatable nanoscale patterns. For subsequent imaging of substrates, a low coherence laser with a reduced laser spot size assures high quality lateral force imaging. In addition, NanoInk’s enhanced lithography software, InkCAD 4.0, includes improved control of tip-based patterning, along with nanoscale mapping and positioning, allowing users to precisely position multiple features even when created from different materials.

The company said the DPN 5000 comes fully equipped with a full range of enabling MEMS based ink delivery consumable items. Manufactured in NanoInk’s MEMS facility, these DPN patterning tools include single probes, 1D passive probe arrays, individually actuated Active Pen Arrays, 2D probe arrays with up to 55,000 pens (2D nano PrintArray), Inkwells for coating tips, and substrates to be written upon. These devices allow researchers to rapidly create nanostructures using numerous materials including proteins, DNA, nanoparticles, and polymers.


NanoInk’s DPN 5000 Desktop NanoFabrication System. (Image courtesy of NanoInk)

February 3, 2009: Researchers at Korea’s Ewha Womans University have developed a MEMS-based combination telescope and camera that can “instantly track and film events that occur without prior warning, according to a report in the Korea Herald.

Researcher Park Il-hung said the first-of-its kind MEMS system is capable of following the movements of superfast projectiles.

“If this equipment is placed on a space station, it has the capability to track light sources traveling at light speed on the Earth’s surface, while if it is placed on the ground, the telescope can successfully follow a bullet that is moving a meter away from the lens,” the scientist told the newspaper.

January 28, 2009: CETR has released its next-generation Apex nanomechanical test instrument, the company announced in a news release.

Apex comes with two interchangeable modules: Nano indenter (NH-3) and Micro indenter (MH-2), which can easily be interchanged, the company said. Both modules can be used to indent or scratch the material as well as wear and friction at nano- and microscales.

Apex was designed for use with thin-films, PVD & CVD coatings, microelectronics, solar cells, MEMS, and other applications.

Jan. 28, 2009 – SVTC Technologies (née Cypress Semiconductor’s Silicon Valley Technology Center, spun out to VC/private equity owners in March 2007) and CMP outsourcing firm Entrepix are expanding their existing partnership to 300mm wafer processing. Under the deal, Entrepix will handle all 300mm chemical mechanical polishing (CMP) development and production services — including experimental planning/support, engineering project oversight/execution, data analysis, interpretation and reporting, and pilot production activities — for customers of SVTC’s Tool Access Program at its Austin, TX facility.

The two cite shrinking resources and cost-cutting needs as key factors pinching devicemakers, particularly for next-generation products. “Traditional [chipmakers] are still advancing down technology nodes: low-k, 32nm for 300mm, etc.,” said Dave Anderson, VP of corporate business development for SVTC. “We see people needing new materials polished all the time. There’s a continual demand for CMP expertise for which customers are seeking fast solutions.”

The majority of SVTC’s overall work (~75%-80%) is for 200mm-level processes, mainly traditional and project-based development services for larger customers, Anderson explained. But SVTC is seeing growing interest in 300mm areas, from test wafers and blanket films, primarily to equipment and materials firms, and most of that is 300mm, he noted.

Going forward, added Entrepix VP/GM Bob Tucker, the two partners want to not only offer IDMs support on next-generation materials evaluation, but also a path to cost reduction or the next required technology path that can be transferred back into a customers facility. And materials/equipment suppliers selling to these IDMs need help too, he pointed out; “they have to have good data sets on pads and slurries,” for example.

One area the two are already working on today is MEMS through-silicon vias (TSV), for example. “People aren’t doing TSV on 300mm, but it’s evolving from 200mm to 300mm,” Tucker pointed out. Synergies developed now “will pay dividends three, five, ten years from now; they’ll be 300mm technologies then, just like MEMS has evolved to 200mm.”

Tim Tobin, CEO of Entrepix, noted how CMP processes have become dramatically more complex in just the past few years, and even across applications. What a MEMS device will need from CMP is on the scale of a couple of microns in size, vs. Angstrom-level scale for semiconductor manufacturing, and each with completely different materials, tools, and processes, he pointed out.

He noted that Entrepix can port CMP work from one toolset to another, handling complexities regardless of toolset or processes. Combined with SVTC’s abilities in 300mm work (and expanded capabilities, e.g. metrology equipment) offers “instant credibility,” he said.

SVTC, like everyone else, is feeling the squeeze from the current economic crisis, Anderson noted, with some customers pulling back “to better understand their budgets.” But this actually makes the outsourcing option even more attractive, as they look to find ways to still get what they need from a development standpoint even if they can’t do it internally.

And in these economic times it helps to have patient owners, too. Anderson pointed out that one SVTC’s two owners, private equity firm Oak Hill (the other is Tallwood Venture Capital), has several investments in outsourced services (e.g., financial and HR), so “they understand growth opportunities in a down market.” — J.M.

January 27, 2009: MEMS switches and varicap products are finding their way into commercial products despite the economic downturn, thanks to increased interest from cell phone companies, according to a report from the research group Yole Développement.

Yole’s report highlights the companies it says are poised to be the next leading players and which applications will drive the MEMS switch and varicap sales in the 2007-2012 period.

Six players are currently commercializing or sampling products on the market (RadantMEMS, MEW, Advantest, XCOMwireless, MEMtronics, Wispry) and more than 20 additional products development projects have been listed in the report, according to Yole.

The report also focuses on RF MEMS switches for increasingly in-demand cell phone applications.