Category Archives: MEMS

For the 26 million Americans with diabetes, drawing blood is the most prevalent way to check glucose levels. It is invasive and at least minimally painful. Researchers at Brown University are working on a new sensor that can check blood sugar levels by measuring glucose concentrations in saliva instead.

The technique takes advantage of a convergence of nanotechnology and surface plasmonics, which explores the interaction of electrons and photons (light). The engineers at Brown etched thousands of plasmonic interferometers onto a fingernail-size biochip and measured the concentration of glucose molecules in water on the chip. Their results showed that the specially designed biochip could detect glucose levels similar to the levels found in human saliva. Glucose in human saliva is typically about 100 times less concentrated than in the blood.

“This is proof of concept that plasmonic interferometers can be used to detect molecules in low concentrations, using a footprint that is ten times smaller than a human hair,” said Domenico Pacifici, assistant professor of engineering and lead author of the paper published in Nano Letters, a journal of the American Chemical Society.

The technique can be used to detect other chemicals or substances, from anthrax to biological compounds, Pacifici said, “and to detect them all at once, in parallel, using the same chip.”

Caption: Each plasmonic interferometer – thousands of them per square millimeter – consists of a slit flanked by two grooves etched in a silver metal film. The schematic shows glucose molecules “dancing” on the sensor surface illuminated by light with different colors. Changes in light intensity transmitted through the slit of each plasmonic interferometer yield information about the concentration of glucose molecules in solution. Credit: Domenico Pacifici

To create the sensor, the researchers carved a slit about 100 nanometers wide and etched two 200 nanometer-wide grooves on either side of the slit. The slit captures incoming photons and confines them. The grooves, meanwhile, scatter the incoming photons, which interact with the free electrons bounding around on the sensor’s metal surface. Those free electron-photon interactions create a surface plasmon polariton, a special wave with a wavelength that is narrower than a photon in free space. These surface plasmon waves move along the sensor’s surface until they encounter the photons in the slit, much like two ocean waves coming from different directions and colliding with each other. This “interference” between the two waves determines maxima and minima in the light intensity transmitted through the slit. The presence of an analyte (the chemical being measured) on the sensor surface generates a change in the relative phase difference between the two surface plasmon waves, which in turns causes a change in light intensity, measured by the researchers in real time.

“The slit is acting as a mixer for the three beams — the incident light and the surface plasmon waves,” Pacifici said.

The engineers learned they could vary the phase shift for an interferometer by changing the distance between the grooves and the slit, meaning they could tune the interference generated by the waves. The researchers could tune the thousands of interferometers to establish baselines, which could then be used to accurately measure concentrations of glucose in water as low as 0.36 milligrams per deciliter.

“It could be possible to use these biochips to carry out the screening of multiple biomarkers for individual patients, all at once and in parallel, with unprecedented sensitivity,” Pacifici said.

The engineers next plan to build sensors tailored for glucose and for other substances to further test the devices. “The proposed approach will enable very high throughput detection of environmentally and biologically relevant analytes in an extremely compact design. We can do it with a sensitivity that rivals modern technologies,” Pacifici said.

Tayhas Palmore, professor of engineering, is a contributing author on the paper. Graduate students Jing Feng (engineering) and Vince Siu (biology), who designed the microfluidic channels and carried out the experiments, are listed as the first two authors on the paper. Other authors include Brown engineering graduate student Steve Rhieu and undergraduates Vihang Mehta, Alec Roelke.

The National Science Foundation and Brown (through a Richard B. Salomon Faculty Research Award) funded the research.

January 23, 2012 — Texas Instruments (TI, NASDAQ:TXN) DLP Products released DLP LightCrafter, an advanced, compact evaluation module for TI’s spatial light steering DLP technology. Designers can use the evaluation module to create industrial, medical, security and scientific products, among others.

The evaluation kit is built around the reference design for Texas Instruments’ 0.3" WVGA resolution DLP chipset for high-speed spatial light modulation. The chipset comprises the DLP3000 micro electro mechanical system (MEMS) device with 415,872 microscopic mirrors, and the DLPC300 controller for high-speed operation of the micromirror array. DLP LightCrafter integrates the 0.3 WVGA chipset with an RGB LED light engine that is capable of producing more than 20 lumens of light output. DLP LightCrafter also includes Texas Instruments’ TMS320DM365 embedded processor; 128MB of NAND flash memory for pattern storage; an embedded Linux OS; and a configurable I/O trigger for integrating cameras, sensors, and other peripheral devices.

THe 0.3" WVGA chipset displays up to 4000 binary patterns per second, and is commonly used in pico projectors.

DLP LightCrafter offers enhanced processing speed and power for developers to create, store, and display high-speed pattern sequences through DLP LightCrafter’s USB-based application programming interface (API) and graphical user interface (GUI). It joins TI’s development kit platform, targeting reduced development time and greater creativity.

"Over the past few years, our company has had great success in using DLP’s development tools to build out our designs for contactless, 3D fingerprint scanners, among other biometrics products," said Mike Troy, CEO, FlashScan3D. "DLP technology allows us to capture greater detail in fingerprints with higher accuracy, thus cutting down on the possibilities of technician error and fraud, and with the new DLP LightCrafter development module, we can scan prints faster, store data internally versus on a laptop or separate storage device and, because of its size, create even smaller, portable products."

Texas Instruments will show DLP LightCrafter at SPIE Photonics West, January 24-26 in San Francisco, CA at booth #2415.

Texas Instruments (NASDAQ: TXN) is a global semiconductor company. Texas Instruments’ award-winning DLP MEMS display technology has powered the world’s top projectors and displays, delivering pictures rich with color, contrast, clarity and brightness to screens of all sizes. DLP’s technology spans movie theaters (DLP Cinema) and large-scale, professional venues; in conference rooms, classrooms, and home theaters; and with DLP Pico-enabled mobile devices, the ability to project images from the palm of your hand. Learn more at www.TI.com/DLPLightCrafter.

View recent issues of the MEMS Direct newsletter

January 20, 2012 — MM, MEMS & NANO Live UK 2012 will take place at NEC Birmingham, UK, September 25-26, co-located with TCT Live and Mediplas, a show focused on design and manufacture of plastic parts for the medical industry, as well as Sensing Technology 2012. The 5 shows showcase engineering and manufacturing technology in the UK with a projected attendance of 6,000.
 
To present at MM, MEMS & NANO Live, submit an abstract on:

  • Micro Molding of Plastics
  • Powder (PIM), Ceramic (CIM), Metal (MIM) Micro Molding
  • Conventional Micro Machining Techniques
  • New/Emerging Micro Machining Techniques
  • Micro Fabrication, Welding, Assembly
  • Micro Metrology: Optical, Tactile, CMMs
  • Advances in MEMS & Nano Manufacturing Processes
  • The Path to Commercialization for NANO and MEMS Technologies

All submissions must be non-promotional in content and presented by companies or institutions that are utilizing and/or researching technologies for an industrial application. Exhibitors are welcome to submit practical application-based case studies.

Interested parties should submit an abstract by February 28. This should include the working title, all authors/contributors and their affiliations. All submissions will be reviewed to ensure that they meet the necessary and exacting requirements of the Micro Manufacturing Conference. Anyone submitting a presentation must be available to present on either day. Submit abstracts to Aleksandra Wisniewska via email: [email protected]. Learn more at www.mmliveuk.com.

View recent issues of the MEMS Direct newsletter

January 20, 2012 — Purdue University researchers have created microtweezers for the manufacture of tiny structures in micro electro mechanical systems (MEMS), printing coatings on advanced sensors, and live stem cell sphere manipulation.

The variety of miniature structures in MEMS could be expanded using this microtweezer manufacturing technology, which assembles components like microscopic Lego pieces moved individually into place, said Cagri Savran, an associate professor of mechanical engineering at Purdue University. The microtweezers are compact and user-friendly, he added, and the team has demonstrated them by assembling 40um-diameter polystyrene spheres into three-dimensional shapes (at left below). It can also place tiny particles on the tip of a microcantilever (at right below).

Figure 1. Microtweezers constructing tiny structures at Purdue University. SOURCE: Birck Nanotechnology Center.

The new tool comprises a thimble knob from a standard micrometer, a two-pronged tweezer made from silicon, and a graphite interface that converts the turning motion of the thimble knob into a pulling-and-pushing action to open and close the tweezer prongs. No electrical power sources are needed. The new microtweezers are designed to be attached easily to translation stages and can be easily detached from a platform and brought to another lab while still holding a micro-size object for study, Savran said.

The two-pronged tweezer is micromachined in a cleanroom with the same techniques used to create semiconductors. The design’s one-piece "compliant structure," which is springy like a bobby pin or a paperclip, replaces the more complex hinges and other components of common microtweezers.

Figure 2. Purdue researchers’  microtweezers. SOURCE: Birck Nanotechnology Center.

"We currently are working to weigh single micro particles, individually selected among many others, which is important because precise measurements of an object’s mass reveal key traits, making it possible to identify composition and other characteristics," Savran said. That work is a collaboration with the research group of Timothy Ratliff, the Robert Wallace Miller Director of Purdue’s Center for Cancer Research.

The microtweezers also could facilitate the precision printing of chemical or protein dots onto microcantilevers to functionalize them for specific purposes. Microprinting a sequence of precisely placed dots of different chemicals on each cantilever, rather than coating it in one chemical, could functionalize a device to detect several substances at once with a smaller sample size.

The research was based at the Birck Nanotechnology Center in Purdue’s Discovery Park. Purdue has filed for a provisional patent on the design.

The research is described in the Journal of Microelectromechanical Systems (JMEMS) by Savran, mechanical engineering graduate students Bin-Da Chan and Farrukh Mateen, electrical and computer engineering graduate student Chun-Li Chang, and biomedical engineering doctoral student Kutay Icoz. Access the journal here: http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=84

Courtesy of Emil Venere at Purdue University.

Research contact: Cagri A. Savran, 765 494-8601, [email protected].

Recently, National Institute of Standards and Technology (NIST) and the University of Virginia (UVA) have demonstrated that electron microscope beams can be used to move around nanoscale objects, raising the possibility of positioning and assembling nanoelectronics. Learn more: Electron beam could assemble nanoscale objects

View recent issues of the MEMS Direct newsletter

January 19, 2012 — Sensors in Design 2012 takes place March 28-29 in San Jose, CA. With speakers from Texas Instruments and Intel, InvenSense, Analog Devices, and more, the event is designed for attendees to better understand sensor technologies and their applications.

Highlights of the 2012 event include a tablet PC teardown, with accompanying mobile-device sensor discussion; a panel on micro electro mechanical system (MEMS) future design trends and applications; and sessions on sensor integraion for smart grids and wireless cloud sensor networks.

Confirmed speakers include:
Steve Nasiri, Founder, President & CEO, InvenSense
Stephen Whalley, Director, Sensors, Intel
Steven Arms, President & CEO, Microstrain
Jamshid Avloni, President & CEO, Eeonyx
Brian Maccleery, Principal Product Manager for Clean Air Technology, National Instruments
Jamie Wiczer, Founder & President, Sensor Synergy
Thurston Brooks, VP Product Marketing. 3eTi
Mark Buccini. Director, Texas Instruments
Bob Scanell, Business Development Manager, Analog Devices, Inc.

View full sessions and register at www.sensorsindesign.com.

View recent issues of the MEMS Direct newsletter

January 19, 2012 – Marketwire — The National Institute for Research and Development of Isotopic and Molecular Technologies Cluj-Napoca (INCDTIM) in Romania has installed a DPN 5000 tip-based lithography system from NanoInk’s NanoFabrication Systems Division. The instrument resides within the Department of Molecular and Biomolecular Physics, which is headed by Dr. Ioan Turcu.

The DPN 5000 System is a full-featured tip-based lithography platform capable of multi-component deposition of a wide range of materials with nanoscale accuracy and precision. Its user-friendly interface enables the deposition of complex patterns by precisely controlling tip movements during the writing process. Using NanoInk’s proprietary MEMs devices and deposition protocols with multiple printing materials and substrates, DPN 5000 System users design, create, and analyze nano and microstructures composed of sub-micron sized features. Pattern design and product fabrication are highly scalable and can be completed in less than an hour.

INCDTIM intends to use the NanoInk system to fabricate and characterize supramolecular structures with controlled architecture, study molecular recognitions, and develop self-assembling processes. These application areas have the potential to lead to significant advancements in the fields of printed electronics, sensor devices, and biotherapeutics. Researchers, including a team headed by Dr. Adrian Calborean, will use the DPN 5000 System for a number of leading-edge molecular electronic and bionanoelectronic applications, including the design, development and investigation of molecular structures assembled on metallic, glass and polymer surfaces. The DPN 5000 System’s atomic force microscope will also drive the characterization of geometrical structures and functionalized surfaces and the NanoInk platform’s ability to functionalize SAMs on various surfaces will enable molecular recognition studies.

Dr. Adrian Bot, the head of INCDTIM, noted the platform’s "ability to directly write a wide range of feature sizes (from 50nm up to 10um) to existing surfaces in ‘bottom-up’ nanofabrication applications or to deliver etch resists or etchant materials in ‘top-down’ lithography applications."

INCDTIM is the only national research and development institute in the northwestern region of Romania. More information on INCDTIM is available at: www.itim-cj.ro/en/index.php.

NanoInk, Inc. is an emerging growth technology company specializing in nanometer-scale manufacturing and applications development for the life sciences, engineering, pharmaceutical, and education industries. For more information on products and services offered by NanoInk, Inc., visit www.nanoink.net.

January 18, 2012 — In 2011, Apple Inc. became the world’s largest purchaser of micro electro mechanical system (MEMS) microphones, passing Samsung Electronics Co. Ltd. Apple’s share of MEMS buying amounted to 27% for the year, compared to 20% for Samsung.

Top 4 brand purchasers of MEMS microphones in 2011 (Ranking by Unit Shipments in Millions of Units). SOURCE: IHS iSuppli.

2011 Rank Brand 2010 Unit Shipments 2010
Market Share
2011 Unit Shipments 2011
Market Share
2010-2011 Growth
1 Apple 127.8 18% 348.8 27% 173%
2 Samsung 132.2 19% 250.8 20% 90%
3 LG 90.4 13% 88.3 7% -2%
4 Motorola 44.0 6% 61.9 5% 41%
  Others 309.3 44% 533.9 42% 73%
  Grand Total 703.7 100% 1283.6 100% 82%

Overall global shipments of MEMS microphones rose to 1.3 billion units in 2011, up 82% from 704 million in 2010. MEMS microphone revenue in 2012 is projected to reach $493.5 million, up 32% from $373.2 million in 2011, shows an IHS iSuppli MEMS Market Brief. This year’s revenue expansion continues last year’s remarkable 64% increase. By 2015, MEMS microphone revenue will hit approximately $667.0 million, equivalent to a five-year compound annual growth rate of 24% starting from 2010. Shipments in 2015 will amount to some 2.9 billion units.

Apple primarily purchases MEMS microphones for its iPhones, headsets, and most notably iPads. Apple bought 173% more MEMS microphones year-over-year, or 349 million units, IHS reports.
 
MEMS microphones use a pressure-sensitive diaphragm etched on a semiconductor, replacing conventional electret condenser microphones (ECM) with a smaller form factor and better sound quality, among other benefits. Learn more in MEMS microphones make noise in 2012 from IHS director and principal analyst, MEMS and sensors, Jérémie Bouchaud.

Apple began its MEMS microphone buying spree with its iPhone 4, said Bouchaud. The iPad 2’s success pushed Apple into the #1 spot, with help from handsets and iPhones. Apple uses two analog MEMS microphones in its iPhone 4 and 4S phones, one analog MEMS microphone in the headset sold with the iPhone, and one digital MEMS microphone for Pad 2 tablets. "There has been a rapid adoption of multiple microphones in smartphone devices for noise compression, particularly important for voice commands such as those used in the Siri speech-recognition feature of the iPhone 4S," Bouchard notes.

Also read: Apple shares list of suppliers

Samsung uses dual MEMS microphones for its smartphones, and the microphones are also in the Galaxy 10.1 tablet. Samsung’s share in 2011 was roughly the same as it was in 2010.

Other notable MEMS microphones buyers include LG Electronics for its phones and G-Slate tablet; as well as Motorola Inc., an early adopter via its Razr phones as early as 2003.

Learn more about this topic with the forthcoming IHS iSuppli report, MEMS Microphones Go Digital in 2012: http://www.isuppli.com/MEMS-and-Sensors/Pages/MEMS-Microphones-Go-Digital-in-2012.aspx?PRX

View recent issues of the MEMS Direct newsletter

 

January 18, 2011 — Die bonder supplier Hesse & Knipps Inc., the Americas subsidiary of Hesse & Knipps Semiconductor Equipment GmbH, will discuss "Wedge Bonding for RF and Microwave Devices" at the Advanced Technology Workshop and Tabletop Exhibition on RF and Microwave Packaging, February 7-8, 2012 in San Diego, CA.

The objective of the RF and Microwave Packaging Workshop is to provide a unique forum that brings together scientists, engineers, manufacturing, academia, and business people from around the world who work in the area of RF and Microwave packaging technologies. For a full program at the event, visit http://www.imaps.org/rf/index.htm.

RF and microwave device interconnection requires wedge bonding with ribbon wire, due to its ability to create flat, extremely low loop shape, and constant wire length. For high-frequency electrical signals, conduction occurs in the skin, or outer 0.5

January 18, 2012 — 36% of semiconductor fabs are in high-risk zones, finds Semico in its Semiconductor Updated Fab Database. Semico notes the industry disruptions caused by the Japan earthquake and tsunami (March 2011) and the flooding in Thailand (Fall 2011) and the challenges these presented to large chip manufacturers in the regions, as well as strains put on the semiconductor and electronics supply chains.

Highlights from Semico:

  • The 36% of fabs that are in the ring of fire contribute 41% of the world’s total semiconductor capacity.
  • From a capacity standpoint, Japan contributes 47.7% of that 41%, Taiwan has another 47.5%, and the US only 4.8%.
  • Only 15% of the fabs are memory fabs, but those fabs supply half of the world’s total memory capacity. 
  • 42% of the world’s total logic capacity is produced in the high-risk area of the ring of fire.

In 2011, another analyst firm, IC Insights, estimated that almost two-thirds of worldwide IC industry capacity was located in seismically active areas, owing to the size of the fabs in the Asia-Pacific. Video: Bill McClean discusses seismic risk for IC manufacturing, supply & demand

The Thai floods will cause disruption into 2012. A resolution of Thailand supply constraints in 1H will be followed by stronger product cycles/easier compares in 2H, said Credit Suisse’s J. Pitzer in a bulletin this week. Near term, the semi space saw "multiple challenges in C4Q11 from the impact of the Thai flooding to reduced demand from Europe and the consequential effect on consumer sentiment," agreed Vijay Rakesh of Sterne Agee.

These changes, also with the economic crisis in Europe, caused a flat growth year in 2011, impacted the status of semiconductor fabs worldwide: capacity, capex, wafer size, closures, launches, production ramps, technology node migration, and employee count.

Semico’s 2011 Fab Database study provides information on changes that occurred in 2011, and what plans are in place for upcoming fab construction and closures in 2012-2013. The report addresses development work occurring with 450mm and 3D production. A special section is devoted to DRAM and NAND fab trends. The report compares the number of fabs used by IDMs versus the number for foundries, and how many are used for major semiconductor categories including logic, memory, analog/discretes, LED and MEMS production.

Semico’s fab database includes 769 entries, covering fabs that are planned, under construction, installing tools, operating, closing, and closed. Fabs that were planned, never built, and then cancelled were excluded from this report.

Semico is a semiconductor marketing & consulting research company. Learn more at www.semico.com.

Subscribe to Solid State Technology

January 17, 2012 — IBM (NYSE: IBM) scientists have developed a flexible, non-contact, silicon microfluidic probe to accurately stain tissue sections at the micrometer scale for drug discovery and disease diagnostics research.

Tissue staining is widely used in pathology to detect disease markers in a patient’s sample. Traditional staining involves multiple chemical steps and precise exposure times. Mistakes at tissue staining can lead to false diagnoses. Biopsy samples are typically a few millimeters long. Staining is performed on many thin slices of the sample to identify and sub-type diseases.

The probe developed by IBM will "ensure a high diagnostic capability while minimizing patient discomfort," said Prof. Dr. Ali Khademhosseini, Associate Professor at Harvard Medical School and Brigham and Women’s Hospital. The probe stains a very small section of tissue with virtually any biomarker. Multiple stains can be used on the same sample.

The 8mm-wide, diamond-shaped probe comprises a silicon microfluidic head with 2 microchannels at each tip (See Figure 1). The head injects the liquid on the surface, then continuously aspirates the liquid to prevent spreading and accumulation on the surface, which can lead to overexposure.

Figure 1. The probe is similar to an inkjet head; however, unlike an inkjet printer cartridge, the head re-aspirates the liquid that it injects on a surface.

For tissue section analysis, the probe can deliver an antibody very locally in a selected area of a tissue section with pinpoint accuracy. Since analysis can be done on spots and lines instead of on the entire tissue section, the tissue is better preserved for additional tests, if required. In addition, only a few picoliters (one trillionth of a liter) of liquid containing antibodies are needed for each analysis spot.

The microfluidic probe fits to standard workflows in conventional pathology. In addition, it is compatible with current biochemical staining systems and is resistant to a broad range of chemicals. The small size of the probe also enables easy viewing of the sample from above and below by an inverted microscope commonly used in research and clinical laboratories. Pathology can be put on a "modern roadmap," thanks to "the latest developments in silicon-based microfluidics," said Govind Kaigala, a scientist at IBM Research – Zurich. Also read: Microfluidics: $4B in 2016, thanks to life sciences

Figure 2. Marios Georgiadis, currently a PhD student at ETH Zurich, Institute for Biomechanics, takes a closer look at a silicon wafer containing dozens of microfluidic probes.

Prof. Dr. Khademhosseini said, "The developed system may have great potential in applications where sample size and the need for testing various types of biological analysis are required. I am confident that one day such approach will enable us to take small tissue biopsies and be able to obtain significantly more information."

IBM scientists will continue to test and improve the probe and potentially begin using it in laboratory environments in the next several months. The team plans to explore specific clinical applications, possibly with partners in the field of pathology.

IBM’s work is reported in the peer-reviewed journal Lab on a Chip. The scientific paper entitled "Micro-immunohistochemistry using a microfluidic probe" by Robert D. Lovchik, Govind V. Kaigala, Marios Georgiadis and Emmanuel Delamarche, appears at http://pubs.rsc.org/en/content/articlelanding/2012/lc/c2lc21016a.

Figure 3. A concept and workflow of micro-immunohistochemistry (μIHC) using a vertical microfluidic probe (vMFP). Dewaxing and rehydration of the tissue are performed according to conventional IHC (1). Using injection and aspiration apertures at the apex of a vMFP head, a solution of primary antibody is hydrodynamically confined (in the presence of an immersion liquid) to selected areas of a tissue section (2). Post-processing for visualization of the antigens on the tissue section continues as in standard IHC: the tissue section is incubated with secondary antibodies, and enzymatic precipitation of 3,3′-diaminobenzidine (DAB) chromogen leads to a visual signal, indicating the expression level of specific antigens in the tissue section semi-quantitatively. Typical parameters for the vMFP scans are indicated. Source: Lab on a Chip, DOI:10.1039/C2LC21016A

See all the photos from the microfluidic probe development on Flickr

Learn more about IBM at http://www.ibm.com/us/en/

Recent IBM news: IBM discovers magnetic storage limit at 12 atoms

View recent issues of the MEMS Direct newsletter