Product News
11/01/2008
AOI for solar cells
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The S2012PV automated optical inspection system targets solar cell production, including wafer material control, cell characterization, and cell control (i.e., geometry, print image, cracks, color, micro cracks). Interlinked matrix cameras enable various resolutions (48, 37. or 34??m/pixel). A specially developed calibration concept ensures genuine measurement accuracy and sustained reproducibility for all inspection tasks. The image field is large enough for standard 156 ?? 156mm (6.1” x 6.1”) wafers. Viscom AG, Hanover, Germany; ph +49/511.949.960, www.viscom.com.
Tunable Cu CMP system
The ACuPLANE copper barrier CMP system for advanced Cu/low-k interconnect applications combines Rohm and Haas’s EcoVision 4000 CMP Pad and ACuPLANE 5000 Series slurries. This tunable CMP system offers <5% within-wafer and within-die nonuniformity, and “extremely low” defectivity when used with the company’s Politex and VisionPad products. The company says customer tests indicate 2-3?? extension of average pad life. Rohm and Haas Electronic Materials, CMP Technologies, Newark, DE; ph 302/366.0500, www.rohmhaas.com.
Spectrograph for etch control
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The SD1024FH spectrograph is designed for demanding semiconductor process control applications such as very low exposed area contact etch, ion beam etch, and photomask etch. Features include a 200-800nm spectral range optical system with a 1024-element thermoelectrically cooled CCD sensor, optimized UV response, resolution <2nm, signal/noise ratio of >1000 at full scale, and 7msec readout time. Verity Instruments Inc., Carrollton, TX; ph 972/446.9990, www.verityinst.com.
Gas monitoring system
The ChemLogic 96 point continuous monitor provides quick detection of low-level toxic and corrosive gases. Features include new intelligent optics and an optimized flow system. Gases detected include a variety of hydrides (AsH3, PH3, B2H6, GeH4, SiH4, H2Se, and H2S) and mineral acids (HDL, HF, BF3, and HBR), as well as ammonia, chlorine, and phosgene. Use of 1/4” tubing allows for easy upgrades of other obsolete sample draw systems. DOD Technologies Inc., Crystal Lake, IL; ph 815/788.5200, www.dodtec.com.
ESD monitoring
The TREK model 875 electrostatic voltage sensor is designed for in-line monitoring of electrostatic charge build-up on production lines and other manufacturing process. An automatic calibration technique maintains high accuracy and speed over wide variations of spacing between the non-contacting measurement probe and the surface under test. Features include a voltage measurement range of ?? 500V DC or peak AC, accuracy of ??0.5%, speed of 25msec, and low noise of 2.5% of full scale. Buffered output voltage and current monitors (4-20mA) are provided for remote monitoring and alarm purposes. Trek Inc., Medina, NY; ph 585/798.3140, www.trekinc.com.
Literature Showcase
Precision Actuator Catalog
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PI’s new line of compact ceramic piezo motors & actuators replaces classical actuators & motion control components. Advantages: no lubricants, high-speed, millisecond responsiveness, vacuum compatible, non-magnetic. Zero-wear flexure designs available. Applications: Lithography, optics & imaging, nanotechnology, high magnetic fields, vacuum, fast pumps, scanning microscopy, OCT, MRI.
PI (Physik Instrumente) L.P.
16 Albert St., Auburn, MA, 01501
T: 508.832.3456
www.pi-usa.us
[email protected]