Featured Products
09/01/2008
Turbopumps
 |
HiPace, an expanded line of compact turbopumps, comes in pumping speeds that range from 1000 to 2000 liters/second. The pumps feature a new rotor design that reduces run-up time by 50% and provides high gas throughput for light and heavy gases, claims the company. The use of aluminum housing and innovative materials reportedly makes this turbopump 40% lighter in weight and doubles the service life to five years between bearing changes. HiPace is available in both standard and corrosive models. The integrated drive electronics reduces the need for bulky cabling. In addition to semiconductor applications, the turbopumps are suitable for photovoltaic coating, industrial applications such as brazing furnaces, general sputter coating, and coating of architectural glass and ophthalmic lenses. Pfeiffer Vacuum Inc., Nashua, NH USA; ph 603/578-6500, www.pfeiffer-vacuum.com.
Anisotropic etching system
 |
The PE-200-RIE Convertible is suitable for anisotropic etching of nitrides, oxides, and polyimides. The system has a 13”??13” water-cooled RIE electrode for substrate processing as well as a movable parallel plate ground electrode on a unique shelving assembly so that the distance between the powered electrode to the ground can be varied by half-inch increments. Three 13”??13” electrodes with 3-inch fixed spacing is provided to place parts for uniform plasma cleaning/etching. The system includes a 300W 13.56MHz RF power supply with automatic matching, as well as two mass flow controllers. The unit is completely PLC-controlled using a six-inch touch screen display for user configuration setup and operation. Plasma Etch Inc., Carson City, NV USA; ph 775/883-1336, www.plasmaetch.com.
Automated material handling
 |
Agile Automation is a new approach to automated material handling in semiconductor fabs. It enables increases in fab productivity through modular enhancements to the existing AMHS system and can load and unload several tools in parallel while reducing dependency on OHT vehicles. The unit integrates with standard factory automation systems in existing or Greenfield environments. Agile Automation is the result of the integration of the company’s hardware, software, and services capabilities, and permits customizable applications that seamlessly integrate within the Fab environment via standard industry interfaces. The company is integrating several new technologies as part of the Agile Automation offering, including DLT Lifting Loadport for OHT-independent tool loading. Other new technologies and products include Satellite Stocker, which provides near-tool buffering; the Velocity HTC conveyor for high-speed, high-throughput material handling in both inter-bay and intra-bay applications; and new VAO software, which allows real-time visualization of fab processes and material flow. Asyst Technologies Inc., Fremont, CA USA; ph 510/661-5000, www.asyst.com.
Software packages
 |
The TEMography Suite software package automates data acquisition, 3D reconstruction, and visualization on the company’s TEMs. TEMography allows cross sectional and 360?? observation at any tilt angle. Automated alignment algorithms allow the operator to specify a reconstruction range after image acquisition, which eliminates the need to photograph the same sample (see photo of sample capture) more than once. The Automated Data Acquisition System (JADAS) software, which was developed in collaboration with the NCMI, Baylor College of Medicine, automates data acquisition for cryoelectron microscopy. JADAS gives researchers the flexibility to customize imaging parameters for ice-embedded macro-molecular complexes under low dose conditions. JEOL USA Inc., Peabody, MA USA; Ph 978/535-5900, www.jeol.com.