Product News
06/01/2008
Fiber–optic temperature sensors
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FluoTemp–HT (high temperature) is a new series of fiber–optic temperature sensors capable of accurate temperature measurement up to 450??C, claims the company. Operating beyond the capabilities of conventional temperature measurement technology, the FluoTemp–HT features a nonmetallic design, enabling 100% EMI immunity and total RF compatibility. The unit incorporates the company’s optical technology, which provides good performance in extreme environments. Photon Control, Burnaby, BC, Canada; www.photon–control.com.
Plasma etching system
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The PE–100 plasma etching system is suitable for universities, small R&D laboratories, and pilot production facilities. The system provides a small vacuum chamber that accommodates up to 240 inches of process area capacity per run cycle. An RF power supply with matching network, vacuum pumping, and a PLC–based process/vacuum controller with touch–screen programming are included as a complete “turn–key” package. Any process developed on the PE–100 can be scaled up to the larger Plasma Etch systems as required by substrate size and throughput demands. The system uses a dry RF–induced ionized plasma process enabling uniform removal of undesirable contaminants such as organics, coatings, and metal oxide, as well as providing a hydrophilic surface for adhesion of subsequent part processing. Plasma Etch Inc., Carson City, NV USA; www.plasmaetch.com.
Toolset for process setup and control
VR Matching provides an interactive, graphic toolset to comparatively quantify and model changes in Inter–Lot or Intra–Lot performance as well as process and tool matching for sub–65nm lithography. Outputs consist of descriptive Internet formats. VR Matching enables you to see ultrafine structure response of process and tool corrections that result from sources such as multiple tool matching, lens heating, process alignment, post exposure bake (PEB) stability, alignment drift, process windows, double–patterning overlay, and critical feature size. The tool lets you compare two or more lots or datasets or performance within a single or multi–wafer dataset using as reference a designated wafer or field or an averaged field of data. It also lets you evaluate Process Window performance of multiple films and device designs for design–rule extrapolation and product yield optimization. TEA Systems, Alburtis, PA USA; www.teasystems.com.
Attachment for scanning electron microscopes
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The microCT module produces 3D images that reveal the internal 3D microstructure of an object without requiring any sample preparation. The module attaches to any SEM in place of a standard sample stage. The device consists of an X–ray anode, an X–ray camera, and a high–precision sample rotation stage and works the same way as a laboratory or medical tomography system. The high–energy electron beam of the SEM is used to produce X–rays from the anode that then pass through the sample and are collected by the camera. A series of discrete X–ray images of the object are recorded at different angles by rotating the sample in small steps. These “shadow projections” are combined in the software to produce a 3D interior picture of the sample. The magnification is variable and typically can resolve down to 800 nm. Micro Photonics, Allentown, PA USA; www.micro photonics.com.
Laser for FPD repair applications
The Polaris–300 laser for advanced flat–panel display (FPD) repair applications employs diode pumped solid state (DPSS) laser technology to achieve a 100Hz repetition rate in continuous air–cooled operation. The high–performance laser system provides flexibility with four wavelengths and optical beam attenuation for accurate welding and cutting control. According to company claims, selectable repetition rates from 1Hz to 100Hz facilitate fast throughput to reduce LCD manufacturing process time by allowing quicker removal of shorts and defects. Multiple user–selectable wavelengths (1064nm, 532nm, 355nm, and 266 nm) and motorized optical attenuators provide the ability to cut a variety of materials and selectively remove certain materials while leaving others unaffected. ESI, Portland, OR USA; www.esi.com.
Dry DC–drive vacuum pumps
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Variflow vacuum pumps are suitable for OEM and laboratory applications. These totally dry DC–drive variable speed vacuum pumps can be used for full chemical–duty and standard–duty operation. They offer a high–performance, two–stage diaphragm mechanism with 45 LPM flow rate and ultimate vacuum to 1.5 torr (<2mbar). The Chemical Duty Model 8115D–20 uses PTFE heads and diaphragms and FKM valves, while the Standard Duty Model 8115D–25 uses aluminum heads, EPDM diaphragms, and valves. Flexible OEM designs are available with or without power supply and controller in an enclosure or as a bare pump. All models use 24V brushless DC motors with a maximum power consumption of 85W and can restart under vacuum. Gardner Denver, Niles, IL USA; www.welchvacuum.com.
Test system
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Automated Characterization Suite (ACS) software includes optional wafer level reliability (WLR) test tools for semiconductor reliability and lifetime prediction testing applications. Version 4.0 builds on the ACS software’s existing single– and multi–site parallel test capabilities, adding a database capability, as well as software tools and optional licenses for the new Reliability Test Module (RTM) and ACS Data Analysis capabilities. Together, the Reliability Test and Data Analysis tools allow ACS–based test systems to produce lifetime predictions as much as 5?? faster than traditional WLR test solutions, claims the company. The new RTM option available with ACS 4.0 provides an interactive interface for testing device reliability (HCI, BTI, etc.), gate oxide integrity (TDDB, JRAMP, VRAMP, etc.), and metal inter–connects (EM). The module’s test sequencing capabilities support pre– and post–testing, and intra–stress testing and stress monitoring. Keithley Instruments Inc., Cleveland, OH USA; www.keithley.com.
Safety frame for raised access floors
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The new Safety Frame For RAF provides a previously unavailable degree of safety for most major types of raised access floor systems, according to company claims. Fabricated with 304 stainless steel, the frame purportedly reduces the risks associated with open floor tiles and offers a more–effective solution than cone– or PVC–based systems. The unit is available in three standard sizes???2’??2’, 2’??4’, and 4’??4’???and is designed to fit most major floor types, including Dawtech and Tate. Custom sizes are also available. Centering rails and a lockdown system provide for a secure connection. NEHP Inc., Williston, VT USA; www.nehp.com.
Micro–fabricated VROC
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This “Viscometer/Rheometer–on–a–Chip” technology enables microliter size samples to be used for high–resolution, accurate, and repeatable viscosity measurement. The small chip geometry extends viscosity measurements beyond conventional instrumentation limits into the realm of very high shear rates. The VROC allows viscosity characterization at the conditions occurring in actual applications. The chip is packaged in a small form factor. RheoSense Inc., San Ramon, CA USA; www.RheoSense.com.
Photovoltaic panel scribing system
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Featuring both mechanical and air–bearing versions of split–axis and gantry–style systems for maximum application flexibility, the SolarScribe Photovoltaic Panel Scribing System has a control system with real–time position–based laser firing output. Options include single or multiple step–axis carriages, multiple Z–axis options, theta stage with integral brake, passive or active vibration isolation, machine base, and control enclosure. The SolarScribe is controlled by Aerotech’s Automation 3200 control system. The A3200 is a 100% digital system. Advanced trajectory generation capabilities, such as multi–block look ahead, minimize dynamic errors while the Position Synchronized Laser Firing Output (PSO) functionality automatically adjusts the laser pulse frequency to match the current scribing speed, providing an additional throughput boost. Aerotech, Pittsburgh, PA USA; www.aerotech.com.
Silicon drift detector
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The Apollo XV SDD silicon drift detector for X–ray microanalysis uses the latest generation of SDD chip technology leading to performance specifications such as energy resolutions of <128eV at Mn K and <52eV at C K. The detector expands the company’s portfolio of silicon drift detectors for all X–ray microanalysis applications, including accurate qualitative and quantitative analysis, fast and ultrafast X–ray mapping, phase analysis, and complex particle analysis. EDAX, Mahwah, NJ USA; www.edax.com.
Piezoceramic nanopositioning motor
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The NEXACT ceramic linear motor actuator bridges the micropositioning/nanopositioning gap and combines high forces and long travel ranges with sub–nanometer resolution. It features millisecond responsiveness and high bandwidth, stepping mode plus sweep mode for picometer resolution, 1kg push/pull force, 20mm travel, and 10mm/sec speed. The drive reduces the operating voltage to 40V or less, with minimal power consumption. The actuator exhibits high stiffness and is self–locking when powered down with nanometer position stability, and zero heat dissipation or servo–dither at–rest. Physik Instrumente, Auburn, MA USA; www.pi.ws.
Pantera 12W UV Picosecond Laser
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Newport introduces the innovative Spectra-Physics Pantera™ fiberbased UV laser with 12W output power at 355nm. The Pantera laser platform offers a unique combination of picosecond pulse operation, high UV output power and excellent beam quality for applications such as cutting, dicing, scribing and ablation with highest precision and no thermal damage. Customers in semiconductor, solar cell and fl at panel display manufacturing benefit from improved processing quality, higher throughput and lower cost per part.
Phone: 800-775-5273
www.newport.com/Pantera8