Product News
05/01/2008
Precision dispensing pump for UV-sensitive fluids
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The VMP electronic variable displacement metering pump dispenses UV-sensitive fluids such as UV-curable adhesives, UV coatings, and photolithography chemicals. The VMP variable displacement dispenser uses this company’s CeramPump Valveless piston pump design. A precision stepper motor controls the pump speed. The VMP has a second stepper motor that electronically adjusts the piston displacement, providing ultra-fine dispense adjustments through varying of piston stroke length. The VMP can be programmed for a variety of functions using a user-friendly Touch Screen Inter-face (TSI) that can control up to 16 pumps on a single bus. The VMP will store up to 100 programs letting you change between setups on-the-fly. For UV applications, the pump head is made from either 316 stainless steel or opaque PVDF to isolate UV light from the process fluid as it travels through the pump head. Fluid Metering Inc., Syosset, NY USA; www.fmipump.com.
Thin-film photovoltaic laser scribing systems
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These PV series photovoltaic laser scribing systems are built on the ChromaDice DPSS laser platform and are designed for the isolation and series interconnection of thin film solar cells. This company employs high peak power, short pulsed diode pumped solid state (DPSS) laser sources to remove a wide range of thin films from large glass, metal, or polymer substrates. A variety of wavelengths suitable for different layer materials are available, including 1064nm, 532nm, 355nm, and 266nm. These systems use advanced laser technology scribing to produce fine scribed lines with >30MΩ isolation. The range of applications includes thin film, P1 front contact, P2 semiconductor, P3 back contacts, border deletion, and bulk deletion of all three layers to provide an edge isolation border. PV Series workstations are modular and scalable to accommodate substrate sizes up to 1300 ?? 1300 mm. J P Sercel Associates, Manchester, NH USA; www.jpsalaser.com.
Vacuum pump inlet trap
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The Multi-Trap 16-in. vacuum inlet trap protects vacuum pumps used in highly corrosive deposition processes that generate large amounts of condensable by-products. The trap features a knock-down stage, two stages of user-selectable filter elements, and cooling coils for removing condensable by-products and corrosives from deposition process forelines. Designed to protect vacuum pumps used in ALD, HCD, nitride, TEOS, TiN, and other demanding processes, this trap is constructed from 304 stainless steel and is available with ISO-160 flanges. The filters are 4.5 in. and 9 in. tall. MV Products, Division of Mass-Vac Inc., No. Billerica, MA USA; www.massvac.com.
Longer-travel nanopositioning stages
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The PIHera family of flexure-guided piezo nanopositioning stages offers travel ranges to 1.8mm. These precision closed-loop flexure-guided stages can be used for scanning probe applications (surface metrology) and static positioning. Due to the long travel ranges, they can reportedly scan areas more than 200 times larger than conventional piezo stages with typical ranges of 100 ?? 100μm. Most PIHera stages provide sub-nanometer resolution and even the 1.8mm versions achieve 3nm resolution in closed-loop operation. The stages are equipped with noncontact capacitive-sensors and provide linear motion with up to 99.98% accuracy and effective resolution in the sub-nanometer range. Typical applications are surface metrology, quality assurance, scanning probe microscopy, nanometrology, interferometry, nanopositioning, nano-alignment/semiconductor technology. PI (Physik Instrumente) LP, Auburn, MA USA; www.pi-usa.us.
Ergonomic vibration isolation workstation
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The new ergonomic MK26 workstation achieves low net vertical stiffness without affecting its capability to support static loads, thanks to its Minus K stiff spring and negative-stiffness mechanism. Horizontal isolation is provided by beam columns connected in series with the vertical-motion isolator. Adjusted to a 0.5Hz natural frequency, the MK26 achieves 93% isolation efficiency at 2Hz, 99% at 5Hz, and 99.7% at 10Hz. Class 100 cleanroom-compatible with optional Class 10 compatibility, the MK26 is available with two tabletop sizes (30” ?? 36” and 36” ?? 48”) and up to 650 lbs (295Kg) gross load capacity. The tabletop can be either lightweight “honeycomb” or composite construction. Kinetic Systems Inc., Boston, MA USA; www.kineticsystems.com.
Coating and dispensing system for RTV materials
The Precisioncoat RTV System, designed to apply Room Temperature Vulcanization (RTV) materials, is controlled by proprietary SCS software on a Windows XP operating system and is fully programmable. RTV silicone adhesives and sealants offer reliable protection and flexibility to components that may be exposed to vibration, temperature extremes, moisture, salts, electricity, and many other harmful elements. As form-in-place gaskets, RTV materials seal and protect housings. The system offers reliable bead control and accurate application, resulting in reduced material use. The standard configuration applies coatings on a three-axes system, and fourth and fifth axes can be added for tilt angles up to 45?? or 360?? rotation functionality. Specialty Coating Systems Inc., Indianapolis, IN USA; www.scsequip.com.
Upgrades for XLA products
High-performance (HP) upgrades for this company’s XLA 105, XLA 300, and XLA 400 products are now available. The HP upgrade to the XLA 105 can be used on critical- to mid-critical dry ArF layers, and offers users E95 reporting to support better critical dimension (CD) control, in addition to Gas Lifetime eXtension control system technology to enable increased light source productivity coupled with improved bandwidth stability. The XLA 300 and 400 product upgrades can be used on critical- to mid-critical immersion ArF layers and will consist of the advanced bandwidth control line narrowing module (ABC LNM) in addition to the GLX control system. While the GLX system improves system uptime and bandwidth stability, ABC enables the operator to achieve light source to light source bandwidth matching, improving process control and easing the transition to high-volume immersion lithography. Cymer Inc., San Diego, CA USA; www.cymer.com.
Toolset for mask aligners
This advanced nanotechnology toolset for this company’s mask aligners is a nano-imprint lithography (NIL) tool that enables this company’s aligners to print resist thicknesses from <100nm to a few hundred microns with a printing resolution down to a few nanometers. UV-NIL is a low-cost production technology that is based on UV-curing. It has been developed as a cost-effective alternative to high-resolution e-beam lithography to print sub-20nm geometries. UV-NIL applications with promising perspectives include semiconductor, MOEMS, NEMS, and opto-electronic technologies. This toolset can be upgraded on any previously installed SUSS MA6 mask aligner with very limited effort. SUSS MicroTec Inc., Waterbury Center, VT USA; www.suss.com.
UV laser for high-speed die singulation
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The AVIA 355-23-250, with the highest pulse repetition rate of any Q-switched ultraviolet laser, is designed for high-speed integrated circuit die singulation with high yields. The laser can deliver more than 8 watts of 355nm output at repetition rates of 250kHz and higher. The combination of high average power and high pulse repetition rate translates into high process throughput with minimal silicon microcracking. The tool can be tailored for both scribing and dicing. It can deliver low pulse energy at a 250kHz repetition rate for gently scribing through the thin (typically 10-micron) epitaxial circuitry layers, yet can also be operated at lower repetition rates, with pulse energies as high as 80μJ for dicing through the wafer itself. Coherent Inc., Santa Clara, CA USA; ph 408/764-4598, www.coherent.com.
1% RH dry cabinets
The XSD Series is designed to help meet the challenges associated with IPC J-STS-033 for handling of moisture sensitive devices. It offers precision measurement, 24??7 data logging, and ergonomic touch-screen operator interface. The SDR Series combines the high-performance features of the XSD in a configuration that accepts full feeder trolleys from all pick-and-place manufacturers. Both products deploy self-regenerating desiccant, widely regarded as the safest, most reliable, energy-efficient, and virtually maintenance-free dehumidifying technology available. Totech Superdry, Chicago, IL USA; ph 312/513-3513; www.totech.eu.com.
P30 production probe card
The 20GHz P30 Pyramid Probe card is designed for high-volume wafer testing of RF filters and switches. Using unique membrane probe technology, Pyramid Probe cards offer multi-site support, high accuracy, low scrub, and low materials displacement.
The P30’s patented Microscrub feature creates a smaller scrub mark, reducing the material displacement by 15 times, causing a dramatic reduction in particles created during wafer testing. Needle probes also need regular realignment, resulting in downtime during production testing. The P30 Pyramid probes never need to be realigned. Cascade Microtech Inc., Beaverton, OR USA; ph 503/601-1000; www.cascademicrotech.com.
Star-RCXT extraction
The Star-RCXT parasitic extraction product offers a near 2?? performance boost over the previous release with dual-core support. The unit works with popular commercial grid computing management software, maximizing efficiency across multi-core processors as well as multi-processor compute farms. Multi-core processing consists of easy-to-set-up compute resource allocation, automated design partitioning to multiple processor cores, and automatic failure recovery. The dual-core license support delivers an average 1.8?? performance boost using a single license with two processor cores, and 3?? performance boost using two licenses with four processor cores. The dual-core licensing feature will apply to both the Star-RCXT and Star-RCXT VX products and is expected to be generally available to customers with the June 2008 release. Synopsys Inc., Mountain View, CA USA; ph 650/584-5000; www.synopsys.com.
HiPace turbopumps
The HiPace line of compact and powerful turbopumps is available in pumping speeds that range from 10???700 liters/second. The pump features a new rotor design that reduces run-up time and provides high gas throughput and exceptional compression for light gases, according to company claims. HiPace is suitable for use in analytical instrumentation and vacuum processes, semiconductor technology, research and development, coatings, and industrial applications. The unit comes in a variety of drive versions, including Profibus and DeviceNet without an increase in package size, and can be installed in any orientation. Corrosive gas versions are also available. Pfeiffer Vacuum Inc., Nashua, NH USA; ph 408/956-2578 x309; www.pfeiffer-vacuum.com.
Pantera 12W UV Picosecond Laser
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Newport introduces the innovative Spectra-Physics Pantera??? fiber-based UV laser with 12W output power at 355nm. The Pantera laser platform offers a unique combination of picosecond pulse operation, high UV output power and excellent beam quality for applications such as cutting, dicing, scribing and ablation with highest precision and no thermal damage. Customers in semiconductor, solar cell and flat panel display manufacturing benefit from improved processing quality, higher throughput and lower cost per part.
Phone: 800-775-5273
www.newport.com/Pantera8