Product News
03/01/2006
Ion implanter for high-dose implants and 65nm
 |
The Optima HD ion implanter addresses traditional high-dose implants as well as the expanding range of applications in sub-65nm generation device manufacturing. The low-energy, high-dose system offers a wide energy range from 200eV to 80KeV, covering high-dose implants while providing significant mid-dose applications overlap for maximum versatility. The Optima HD also supports molecular and hydrogen implants for emerging dual polygate and SOI applications for improved device speed and performance. The implanter delivers precise implants using advanced spot-beam technology, which ensures all points across the wafer see the same beam at the same angle. The system uses proprietary RadiusScan technology, a hardware feature that allows the system to cover a broad dose range. Axcelis Technologies Inc., Beverly, MA; ph 978/787-4000, www.axcelis.com.
300mm strip system delivers high throughput for sub-90nm apps
 |
The 300mm Suprema strip system is designed to provide chipmakers an efficient and cost-effective strip solution for high-volume manufacturing at the 90nm node and below. The system’s proprietary platform is based on a flexible, modular design that allows it to work in both development and production environments. The system features high-speed vacuum and atmospheric robotics that deliver increased throughput of greater than 300 wafers/hr. The system’s proprietary inductively coupled plasma (ICP) source provides increased strip rates of over 9µm/min. Its vacuum robot utilizes a transfer mechanism, capable of transferring four wafers simultaneously, to minimize overhead time. With a compact footprint for space efficiency, Suprema can be configured with two dual-wafer modules. Mattson Technology Inc., Fremont, CA; ph 510/657-5900, www.mattson.com.
Mixed wafer metrology tool offers ALM accuracy
 |
The Mentor DF3 nondestructive tool handles high-volume production of 300mm semiconductor wafers and has been designed to easily adapt to handling a mixed-wafer fab environment where 200mm and 300mm wafers are continually interchanged. The tool is capable of measuring resolutions as low as 10 µgram (~1 angstrom of material thickness). Capable of throughputs in excess of 60wph, the tool has a 2m² footprint and provides nanotechnology-weight measurement of product, test, and blanket wafers independent of substrate size or material. The tool is designed to monitor changes in process performance and quickly determine whether device manufacture process steps are operating correctly after deposition, wet or dry etch, or CMP processing. Metryx Ltd., Nailsea, Bristol, UK; ph 44/127-586-6260, www.metryx.net.
Next-generation metrology system for photomasks
 |
The n&k 5700-CDRT next-generation photomask system combines the capabilities of a CD-SEM, a DUV dual-beam laser-interferometer, and a spectroscopic ellipsometer into a single unit. The tool simultaneously furnishes polarized reflectance (R) and transmittance (T) spectra in the DUV-Vis-NIR wavelength range. Correlation studies demonstrated nearly perfect linearity between the optical CD measurements of the n&k 5700-CDRT and those taken with a CD-SEM. The system exhibits good correlation of phase-shift measurements with interferometer output at both 193 and 248nm for a variety of trench structures and materials. The system measures both blank and patterned photomasks. It also provides film thickness, values of n and k, and phase-shift of MoSiON, even with the presence of a chrome layer. An optional features allows the tool to make accurate optical measurements on photomasks through attached pellicles. n&k Technology Inc., Santa Clara, CA; ph 408/850-7300, www.nandk.com.
Thermoelectric heater/chiller
Kool-Pure is an ultra-high purity thermoelectric heat exchanger used to heat and cool chemicals for semiconductor and medical applications. It utilizes a patented, leak-proof, all PFA (Teflon) flow path to ensure chemical resistance, high purity, and many years of maintenance-free operation. The exchanger has a compact design and high flexibility, allowing for a wide range of heating and cooling capacities (100W to 1.5kW) and flow rates (up to 20 lpm). Other benefits include a FM-4910 polypropylene enclosure for ultimate protection against corrosive fumes, manual or remote control via 4-20mA, 0-10VDC, or RS-232, and a power control methodology resulting in a temperature accuracy of ±0.1°C. Applied Integrated Systems Inc., Livermore CA; ph 925/362-4137, www.appliedintegratedsystems.com.
Micro gas sensor
 |
The Micro gas sensor is a rugged, modular and fully upgradeable environmental measurement device for extreme environments and commercial applications. The environmental monitors include a GUI output with full sensor control and data analysis software. The sensor incorporates this company’s laser spectroscopy techniques in a robust and portable unit and has sub-ppm sensitivity. The gas sensor platform can detect multiple gases fingerprints simultaneously. It has <1 sec response time. With its compact size (400 × 250 × 240mm), it can be carried on site for direct gas monitoring at the source. Its modular design makes it easy to use and to maintain. Cascade Technologies Ltd., Glasgow, UK; 44/141-303-8381, www.cascade-technologies.com.
Liquid flow controllers
 |
The InFlo liquid flow controller product line is used in semiconductor tools for monitoring and controlling liquid process chemicals. The controllers are based on nonintrusive ultrasonic sensors and sophisticated signal processing algorithms, and enable users to control liquid flows with an accuracy of 1% of flow. The controllers have been specifically designed to control and monitor slurry and liquid chemical recipes at point-of-use. Efficient chemical usage can increase process repeatability, gain flexibility, and realize savings. Celerity Inc., Milpitas, CA; ph 408/946-3100, www.celerity.net.
X-ray image processor
For advanced inspection, failure analysis ,and process verification, verifier image processor (VIP) application software series VIPx offers an extended feature set of advanced SMT/BGA inspection capabilities and image enhancement tools to address current industry requirements. VIPx is a PC/Windows XP-based image processor that delivers advanced solder joint, package and PCB board level diagnostic software capabilities for enhanced visualization, precise measurement, and user defined (pass or fail) analysis of SMT/BGA solder joints, PCBs, components, mechanical parts, and electrical interconnections. VIPx is suitable for upgrading almost any x-ray inspection system, (manual or semi-automated) with PC-based functionality. FocalSpot Inc., San Diego, CA; ph 858/536-5050, www.focalspot.com.
Flowmeters for aggressive and ultra-pure liquid applications
The mini-Pathfinder is the latest addition to this company’s line of variable area flowmeters for aggressive and ultra-pure liquid applications. The new meter incorporates the design features of the Pathfinder series flowmeters into a 28% smaller package. It is available for flows up to 6 lpm in a panel-mount configuration with or without an integrated precision metering valve, and is available in a variety of port connection types and sizes. A patented valve provides stable and repeatable flow of process fluids. It is constructed of premium-grade fluoropolymers and other high performance plastics that resist corrosion and prevent process contamination. The Futurestar Corp., Minneapolis, MN; ph 952/942-8388, www.futurestarcorp.com.
Spectroscopic ellipsometer
 |
The MM-16 spectroscopic ellipsometer extends the capabilities of classical ellipsometry for the characterization of thin-film thickness and optical properties with high accuracy. It can collect full spectral ellipsometric data (2048 points) at high resolution and calculate the complete 16-element Mueller Matrix in <2 sec. This allows simple characterization of complex birefringent materials and also simplifies the investigation of samples exhibiting depolarization effects. The capabilities fulfill the requirements for standard thin-film metrology as well as many emerging applications using complex materials and structures. The MM-16 is controlled from the DeltaPsi2 integrated software package to provide turnkey operation. Horiba Jobin Yvon Ltd., Stanmore, Middlesex, UK; ph 44/208-204-8142, www.jobinyvon.co.uk.
Bulk purifiers
 |
The GPT series of bulk palladium purifiers provide optimum performance when flows of pure hydrogen up to 80 nm3/hr are required. They can purify inlet gas quality as low as 99.99%. The GPT 20-40 bulk purifiers have been fitted with this company’s patented V-purge system, which quickly purges the purifier during start-up, shutdown, and power failure. The GPT series units feature catalytic oxygen removal units to protect against ingress of air; feed gas pressure regulators; pressure relief valves; dump facility on pure line to avoid contamination; and a separate electric panel incorporating a PLC. Johnson Matthey, West Chester, PA; ph 610/232-1968, www.pureguard.net.
UHP flow controller
The model U802 UHP Liquid FLO-CONTROLLER precisely measures and controls flow rates of virtually any fluid as low as 15 ml/min. or as high as 10 lpm. Repeatable results are achieved by utilizing a patented microturbine flow sensor design. This controller integrates all electronics and fluid components into a single package, eliminating the need for any external modules. It integrates a proportional double-diaphragm valve to accurately control flow rate. Accuracy is ±1.0% full-scale (including linearity & hysteresis) An optional temperature rating of 0-90°C allows use in most UHP applications. McMillan Company, Georgetown, TX; ph 512/863-0231, www.mcmflow.com.
Coating technology for microelectronics
The Novolay coating technology allows extremely precise, homogenous microscopic glass structures and compact hermetic glass layers to be designed on top of silicon, glass, ceramic or organic substrates. Substrates that have been coated with Novolay are especially well suited for encapsulating miniature electronic and opto-electronic components, such as sensors, MEMS, CMOS image sensors, and photo diodes inside a wafer laminate. Novolay is based on a unique vaporization technique. Glass is heated to approx. 2000°C inside a specially designed vacuum chamber until a “glass fog” emerges, which condensates on top of the substrates and forms layers that are between 0.1µm and 30µm thick. Schott, Elmsford, NY; ph 914/831-2200, www.us.schott.com
In-line transport platform
The VPX in-line transport platform enables up to three process chambers to share a low-cost, common wafer-transport system. Designed to reduce the cost for pilot production of devices used in developing end markets such as fuel cells and MEMS automotive sensors, VPX provides an automation platform to service up to three STS plasma process modules with a single-vacuum 25-wafer cassette, offering a low-cost clustered processing system whilst maintaining high standards in terms of handling accuracy and wafer-transport integrity, as well as improved productivity, production-proven hardware, and ease of maintenance. The Brooks Marathon Express MX400 automation platform is the backbone of the new system. Surface Technology Systems plc, Newport, Wales, UK; ph 44/163-365-2400, www.stsystems.com