PRODUCT NEWS
03/01/2005
Chemical management system
The CR-288 is a point-of-use liquid-chemical concentration system designed to monitor and control the concentrations of liquid process chemicals. The system is fully compatible with all liquid-chemical manufacturing processes, with current applications in chemical mechanical planarization and wafer-surface preparation. It utilizes miniaturized optical-reflectivity technology with a compact (2×2×3 in.), process-transparent, real-time sensor without moving parts. Jetalon Solutions Inc., Campbell, CA; ph 408/866-6318, e-mail [email protected], www.jetalon.com.
Polymer-reduction system
The hot N2 solution (HNS) reduces polymer production in exhaust pipes of semiconductor deposition, etch, and ion-implant systems. The HNS normalizes the inside of piping and the exhaust gas stream to the same temperature, while eliminating moisture and maintaining dry conditions inside the piping. Hot N2 units and powder transfer units effectively treat 5m of piping. System controller modules regulate N2 flow rate and temperature. OAI, San Jose, CA; ph 408/263-4944, fax 408/263-6389, e-mail [email protected], www.oainet.com.
Heating elements for process furnaces
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The full line of Ultra Performance vertical replacement heating elements for semiconductor processing systems is compatible with a range of OEM vertical furnaces. The elements feature an interlocking spacer design with end caps that increase the life expectancy of the heating coil. A locking lead retainer/insulator pins lead terminals in place to secure them from external force and potential movement during operation, yet allows them to be removed. MRL Industries Inc., Sonora, CA; ph 209/533-1990, fax 209/533-4079, e-mail [email protected], www.mrlind.com.
Prober conversion kit
A low-temperature conversion kit for automatic probers gives 200mm tools the ability to conduct moisture-free tests at temperatures down to -55°C. The kit includes a ThermoChuck temperature-controlled precision platform; a sealing kit; a dry gas distribution system to avoid condensation and frost; a gas drier for factory-compressed air; and a dewpoint monitor. Labor for installation and certification of performance are included in the kit’s cost. Temptronic Corp, Sharon, MA; ph 781/688-2319, e-mail [email protected], www.temptronic.com.
Singulation system
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The SBS 9100 package singulation system allows choice of the most suitable cutting engine from various saw engines with plug-and-play configurations. A pattern-recognition alignment feature offers both one-point and multipoint alignment. Two head assemblies have seven pick-and-place heads each, with post-singulation vision inspection performed in parallel with pick-and-place operations. Towa Intercon Technology Inc., Morgan Hill, CA; ph 408/778-5992, e-mail [email protected], www.towaintercon.com.
Ultrafast piezo-scanner
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The PXY 16 OEM two-axis, linear piezo-scanner provides a positioning and scanning range up to 16 m, and has a centrally located free aperture to allow moving optics. To avoid creep and hysteresis, the piezo-scanner can be equipped with a high-resolution measurement sensor. Piezosystem Jena GmbH, Jena, Germany; ph 49/3641-66-88-0, fax 49/3641-66-88-66, e-mail [email protected], www.piezojena.com.