New Products
11/01/2003
Standalone metrology platform offers high throughput
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The Flexible Metrology System (FMS) is a cost-efficient, standalone platform that supports up to four modules configured according to the user's process-module needs for integrated metrology capability. Modules can be set up for various parallel metrology functions that include lithography, CMP, etch, CVD, and other deposition processes, thereby accelerating process development. The 300mm, closed-loop system can be equipped with dual multi-axis robots for a maximum throughput of 500 wafers/hr, while providing data handling, system control, and wafer edge-gripping capability for improved wafer handling and staging. Nanometrics Inc., Milpitas, CA; ph 408/435-9600, e-mail [email protected], www.nanometrics.com.
Loadlock system handles substrates up to 300mm
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The TEAM-Mate Cassette 300 loadlock system loads flat substrates from a cassette into Semi-standard or custom process modules. The magnetically coupled elevator system and linear glide mechanism allow substrates to be loaded and removed without breaking vacuum. The small-footprint system can mimic the motions of a complex robot, and works with various applications, including process development and low-volume production. Transfer Engineering and Manufacturing Inc., Fremont, CA; ph 510/651-3000, [email protected], www.transferengineering.com.
Liquid particle counter measures to 0.2??m
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The CLS-700 T corrosive-liquid sampler measures process chemicals at temperatures up to 150°C, extracting fluid from a bath or drum and compressing it to remove unwanted bubbles that cause measurement inaccuracies. The sampler has triggering capability for in situ process control applications. A LiQuilaz particle sensor measures with up to 15 adjustable sizing thresholds, starting as low as 0.2µm. A plastic external housing now meets the FM4910 flame-retardant standard. The CLS-700 T can be integrated into a process or placed on a cart for mobile sampling of chemicals. Particle Measuring Systems, Boulder, CO; ph 303/443-7100, [email protected], www.pmeasuring.com.
Liquid-based control systems provide temperature stability
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A new line of liquid-based temperature-control systems has single- and dual-channel capabilities to provide semiconductor production tools with temperature stability from 20–200°C. The systems feature a fully sealed fluid system with O ring-based plumbing and magnetically coupled turbine pumps for leak-free operation. Control can be either analog or PID-based with analog or RS-232/485 remote access. The systems are Semi S2-93 and CE certified for semiconductor electrical safety standards. Bay Voltex Corp., Modesto, CA; ph 209/522-3701, e-mail [email protected], www.bayvoltex.com.
Perfluoroelastomer for plasma systems
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The new Chemraz 639 perfluoroelastomer for sealing aggressive plasma systems reduces contamination in oxygen- and fluorine-processing environments. The product's cleanliness ..is supported by its low metallic-ion content (<7000ppb), resulting in less downtime and a lower cost-of-ownership. Chemraz 639 is recommended for both static and dynamic dry wafer-processing applications such as etch and CVD. Greene, Tweed Semiconductor Group, Kulpsville, PA; ph 215/256-9521 ext. 1453, [email protected], www.gtsemi.com.
Metrology software
The newly released WAFERMAP version 2.3 metrology software now supports new file formats, importing data files from Filmetrics and QC Solutions for nondestructive, real-time process monitoring. Now used under Windows XP, the software collects, edits, and visualizes physical parameters on semiconductor wafers, and can also import data files from metrology tools such as ellipsometers. The software interprets the imported data as line scans, contour plots, 2-D or 3-D plots, or as a histogram. Boin GmbH, Tomerdingen, Germany; ph 49/0-7348-928233, [email protected], www.boin-gmbh.com.
Flip-chip bonder
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The Mach FC Plus high-speed, automated flip-chip bonder performs parallel processing of flip-chip devices to achieve high throughput. Process steps such as picking, flipping, fluxing, vision alignment, and controlled die placement are performed with asynchronous parallel motion. Advanced features include 8µm placement accuracy, an automatic 300mm ..wafer changer compatible with industry-standard wafer-cassette docking carts, closed-loop placement force control, and up to 53mm2 die-handling capability. Newport Corp., Irvine, CA; ph 800/222-6440, [email protected], www.newport.com.
Vacuum-management tool
The SmartPump vacuum-management tool features high vacuum flow, low air consumption, an intuitive programming interface, and automatic blowoff; if vacuum builds up, the system will inject pressurized air into the cup to destroy the vacuum. It will automatically switch off the compressed air flow once preset levels have been achieved and will switch back on only if system leakage is detected. SmartPump only requires one air, vacuum, and electrical connection, for quick installation and reduced system costs. IMI Norgren Inc., Littleton, CO; ph 303/794-2611, [email protected], www.norgren.com.
X-ray inspection system
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The FMS-080.20 x-ray inspection system is designed for contract manufacturers, failure-analysis labs, and other end users who ..require small systems with simple functionality for lead-free solder-joint inspection. The microfocus sealed tube operates at voltages up to 80kV, with a maximum target power of 15W, and offers a focal spot size of ~10µm. The sealed tube does not require a vacuum system or a separate high-power generator, which reduces maintenance, system weight, and cost. Standard features include a three-axes manipulator, a 6-in. image intensifier, and a black-and-white monitor. A video printer, 9-in. image intensifier, and the FIP-600 image-processing system are offered as options. FEINFOCUS, Stamford, CT; ph 978/794-5441, [email protected], www.feinfocus.com.
Photomask cleaning tool extends mask-set lifetimes
The ClearIQ photomask cleaning tool is an enhanced version of a previous tool for cleaning masks and glass plates. ClearIQ's cleaning capabilities for both binary and phase-shift mask layers can extend the lifetime of a mask set and lower the overall cost-of-ownership by reducing mask contamination with minimal changes to phase-shift and transmittance features. The cleaning tool can be used for photoresist strip, post-ashed residue removal, pre-clean after-strip, and final clean. ClearIQ provides stress-free, static-free drying and includes SECS/GEM interfacing and optional SMIF handling for easier integration. Akrion, Allentown, PA; ph 610/391-9200, e-mail [email protected], www.akrion.com.
Powder coating
The Kynar Flex 2850PC grade of PVDF designed for powder coating applications is of a grade that contains no additives and offers the same high purity as other Kynar grades. Complex components coated with Kynar Flex 2850PC resin meet semiconductor and cleanroom requirements and have excellent chemical and abrasion resistance, low permeation and inherent flame resistance. The coating has a smooth, high-gloss surface finish, which enhances the low extraction characteristic of Kynar resins and reduces micro-organic deposits and growth. ATOFINA Chemicals Inc., Paris, France; www.atofina.com.
Compact nanopositioning system
The TRITOR100 SG Compact system handles sub-nm positioning with a closed loop motion of 80µm in three axes. The small size of the TRITOR100 SG Compact allow it to be easily combined with other mechanical positioning systems. 100mm motion per axis; resolution is 0.16nm. It has a fast settling time and an integrated feedback system. The stage consists of actuators integrated into a housing with an internal lever transmission. The system is constructed of stainless steel, in combination with anodized aluminum, which results in a rugged yet compact design. Selected components can be mounted on the top plate by two diagonally tapped holes and can be accurately located by using the precision pin holes. As an option, the TRITOR may be specially prepared for vacuum and/or low-temperature applications. Applications include fiber positioning, scanning; microadjustment, semiconductor, metrology, and laser techniques. Size: 40 ¥ 40 ¥ 34mm. piezosystem jena GmbH, Jena, Germany, www.piezojena.com.