New Literature
09/01/2000
Optical 3D profiler catalog
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Featured in this catalog is a family of optical 3D profilers for surface height measurements of advanced materials, precision surfaces and optics, MEMS, and semiconductor packaging. The Wyko NT series noncontact measurement systems provide detailed surface and roughness analysis of heights from 0.1nm to 5mm with repeatable area measurements over a large field of view. The product line ranges from the NT1000 and the NT2000 for large samples to the fully automated NT3300 for long-scan, high-production throughput. Other features of the systems include data analysis, gauge capability, and push button operation. Veeco, Tucson, AZ; ph 888/248-3326, e-mail [email protected].
Supply chain web site
A gas manufacturer has added a supply chain and management system, which features online purchasing of cylinder gases and equipment, to its web site. The eScott system streamlines administrative tasks by providing online MSDS and certificates of accuracy; automatic notification of gas mixture expiration; and electronic invoicing and automatic reordering of contract products. In addition, customers can access large transaction archives that can be used for cylinder inventory control and trend/consumption analysis and reporting. Scott Specialty Gases, Plumsteadville, PA; ph 215/766-8861, fax 215/766-2476, www.scottgas.com.
IC production tool brochure
This full-color, illustrated brochure describes a line of semiconductor processing tools designed to provide solutions for 100nm and smaller linewidth technologies. Products highlighted include the Epsilon series of single-wafer epitaxial reactors for a range of SiGe application processes; the A400 series of vertical thermal batch furnaces for atmospheric and LPCVD processes; the Eagle series of single-wafer plasma CVD systems for TEOS, ARC, and etch stop; the A600 UHV clustered vertical furnace system for selective HSG processing; the Pulsar 2000 atomic layer CVD module and reactor for high-k gate dielectrics; the polygon 8200 cluster program, a platform for process integration based on single-wafer reactor technology; and the Levitor 4000 RTP module for deep submicron processes like TiSi2 and CoSi2 anneals (T<850°). ASM International, Bilthoven, The Netherlands; ph 31/30-22984-11, fax 31/30-22874-69.
Heated vacuum valve brochure
This revised, eight-page brochure features the HPS Jalapeño series of heated vacuum valves for semiconductor processes, including CVD nitride, aluminum metal etch, and others. Containing applications, a technical overview, specs, dimensions, part numbers, and pricing information, it describes the poppet-style valves, which will reach a minimum internal temperature of 150°C. The valves are available in single- or two-stage models with an angle or inline body and a choice of seal, limit switch, and solenoid options. MKS Instruments Inc., Vacuum Products Group, Boulder, CO; ph 800/345-1967 or 303/449-9861, www.mksinst.com.