Literature
05/01/2000
Furnace-cooling brochure
FastCool Element Systems, designed to accelerate furnace cooling after processing while wafer loads remain in the controlled atmosphere of the process chamber, are described in this brochure. The systems are available for new or retrofitted MRL Aztec Black Max heating elements, and reduce furnace cycle time, prevent unwanted oxide growth, and protect Qss. They are suitable for such processes as baking polyimide, spin-on glass, platinum silicide, gate oxides, and other oxidation procedures. System features, components, operation, and furnace control system connections are detailed in the illustrated brochure. MRL Industries, Sonora, CA; ph 209/533-1990, fax 209/533-4079, e-mail [email protected].
Temperature products catalog
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This 36-page catalog describes a line of temperature-sensing, monitoring, and controlling equipment. Among the items featured are handheld thermocouple thermometers (including single and multiple inputs); an extensive selection of Type J, T, E, K, R, S, and infrared probes; smart temperature controllers; RTDs; thermistors and a handheld unit that measures air velocity, temperature, and humidity; and accessories, including field kits. The company's OEM/private label/custom-designed temperature capability and its calibration services are also described. Barnant Co., Barrington, IL; ph 800/637-3739, fax 847/381-7053, e-mail [email protected], www.barnant.com.
Vacuum products catalog
A newly expanded equipment and component catalog features items including valves, ISO-KF and butt weld fittings, flanges, flexible hoses and foreline traps, pumping systems, chambers, controls, and accessories. Many items are available from stock for immediate shipment. The company also offers custom one-of-a-kind items for specific requirements. Key High Vacuum Products Inc., Nesconset, NY; ph 631/360-3970, fax 631/360-3973, www.keyhigh.com.
Wastewater recycling web site
Recycling process water and minimizing wastewater is the focus of this new interactive web site. The Semiconductor Applications area, divided into wafer fabrication and assembly test sections, offers technical articles, case histories, client references, and wastewater recycling solutions for specific applications like copper CMP, metal and oxide CMP, backgrinding wafer shaping, dicing and sawing, fluorides, and gallium arsenide. A Contact Us section offers assistance from experts, providing answers to technical questions within 24 hours. A viewer may also request a proposal online by submitting an overview of his application and wastewater treatment needs. Kinetico Inc., Newbury, OH; ph 440/564-5397, e-mail [email protected], www.kinetico.com.
Computer-based measurements catalog
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A line of hardware and software measurement products are highlighted in this 672-page catalog. Included are DMMs; electrometers; precision sources; voltmeters; picoammeters; ohmmeters; source-measure units; power supplies; switching systems; and semiconductor characterization systems. The catalog also aids users in selecting the proper equipment for their applications by providing a reference guide with application examples and selector guides that enable spec comparison. Keithley Instruments Inc., Cleveland, OH; ph 888/534-8453, 440/248-0400, fax 440/248-6168, e-mail [email protected], www.keithley.com.
Two-stage vacuum valve brochure
This 6-page brochure describes the HPS LoPro two-stage valve. Included inside is a comprehensive description, applications, specifications, dimensions, and pricing. The valves are a line of compact vacuum ones that are a combination of a standard isolation valve and a bypass valve. They are smaller than standard vacuum poppet valves, requiring less space on a system. Formed bellows within the valve make it resistant to particle damage. The bypass valve creates a small opening for the initial system pump down, which slows system evacuation. In the second stage, the main valve opens, allowing use of full pumpinb speed. These valves can be tailored to the user's needs with options available in flanges, seals, solenoids, and limit switches. The brochure contains schematic diagrams and a chart detailing ordering information for the NW 25, NW 40, and NW 50 sizes. MKS Instruments, Boulder, CO ph 800/345-1967 or 303/449-9861, fax 303/442-6880, www.mksinst.com.
Seal design and spec software
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Total inPHorm is a software package containing five programs that facilitate the design of application-specific glands and seals. It automatically cross-references thousands of part numbers and recommends materials based on the requirements of MIL, SAE, and other standards. The program O-Ring inPHorm includes a media compatibility tool that lists more than 2000 fluids and chemical compounds; a custom-sizing utility; and technical references for design and material selection. The total software package also contains four other standalone programs for hydraulic and pneumatic applications, static face sealing, standard O-Seal products, EMI shielding, and thermal management. Parker Hannifin Seal Group, Irvine, CA; ph 800/272-7537, 949/833-3000; fax 949/851-2127.
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