Issue

Semicon Southwest2001 Preview

10/01/2001

Exhibit dates & hours:
Tuesday, October 16, 10 am-6 pm
Wednesday, October 17, 10 am-5 pm

PROGRAMS & EVENTS
Austin Convention Center, Austin, TX
Programs, conferences, and the exhibit at Semicon Southwest '01 promise to provide the tools and solutions needed to support the semiconductor industry's rigorous technical roadmap. Attendees will have the opportunity to meet with industry leaders and view the latest global innovations, gaining a new, practical knowledge of semiconductor issues.

This year's events begin Sunday, October 14, and continue through Friday, October 19. Events are at the convention center unless otherwise noted. As in the past, Semicon Southwest will showcase business and technology programs designed to meet the demands of today's market. These will include a three-day "Semiconductor Processing Technology" course, the new Semi Technology Symposium, and several new self-assessment training courses to be held at Advanced Micro Devices in Austin on October 18-19.

Business Education Program
Semiconductor Processing Technology
Sunday, October 14-Tuesday,
October 16, 8:00 am-5:00 pm
This introductory course will familiarize attendees with the aspects of a wafer fab, enabling them to better support customers and their problems. The material is presented in understandable language, and the instructor, with two decades of hands-on engineering experience, enjoys taking the time to answer all questions.
Who should attend: Field service engineers, equipment maintenance personnel, sales, finance, marketing personnel, managers, and others who do not have extensive formal training in semiconductor technology.
Instructor: Peter Gwozdz, San Jose State University
Registration fee: Pre-registration by October 9, $1395; after October 9 or on site, $1595. Registration includes Semi's Semiconductor Processing Technology workbook, and Microchip Fabrication by Peter Van Zant. Continental breakfast and lunch are provided each day.

Semi Technology Symposium
Monday, October 15
MEMS/MST Technology: The Second Micromanufacturing Revolution
9:00 am-5:00 pm
Microsystems Technology (MST) or microelectromechanical systems (MEMS) technologies are revolutionizing existing markets and creating entirely new ones. The instructors in this session will focus on emerging front- and backend manufacturing technologies for these new devices, including sacrificial surface micromachining, high-aspect-ratio micromachining, and specific packaging techniques. At the end of the presentations, a panel of experts will address questions.
Who should attend: Managers and staff members from marketing, sales, engineering, manufacturing, and R&D.
Chairs: Uwe Behringer, Institute of Microstructure Technology, FZK, and Steven Walsh, University of New Mexico
Registration fee: Pre-registration by October 9, $295; after October 9 or on site, $395.

A Partnership for PFC Emissions Reduction Workshop
9:00 am-6:00 pm
This course presents state-of-the-art cost-effective technologies, including alternative gas technologies, process optimization studies, and various abatement methods. Regional and global regulatory and implementation issues will also be discussed.
Chairs: Laura Mendicino, Motorola; Mike Mocella, DuPont Electronic Gases
Registration fee: Pre-registration by October 9, $195; after October 9 or on site, $295.

Wednesday, October 17
Critical Technologies Conference: Gate Stack Engineering
Cosponsored with International Sematech
9:00 am-5:00 pm
Gate stack engineering is instrumental for next-generation processes. It deals with the materials and equipment needed to solve problems introduced by reduced feature size and the resultant effect on device performance. The conference will focus on those wafer-processing issues that are critical to connecting the technical requirements of the ITRS to the realities of manufacturing.
Who should attend: Engineers and managers involved in developing new processes, equipment, and devices for 100nm and below.
Chairs: Howard Huff and Michael Jackson, International Sematech
Registration fee: Pre-registration by October 9, $295; after October 9 or on site, $395.

_______________________________________________

STEP Programs
Monday, October 15
STEP: Semi E10 and E79
8:00 am-12:00 pm
Workshop 1:00-4:30 pm
This half-day STEP will describe Semi Standards E10 and E79, which define the metrics and calculations for the measurement of equipment reliability and productivity. Semi E10 gives industry a standard way for calculating equipment-specific metrics such as uptime, downtime, MTBF, etc. Semi E79 addresses equipment productivity measurement. Two new standards efforts in equipment performance tracking and factory-level productivity measurement will also be introduced.
Session chair: Jim Irwin, IC Irwin Consulting
Registration fee: Pre-registration by October 9, $195; after October 9 or on site, $295

STEP: Practical Experience with Semi F47 Voltage Sag Immunity
1:00-5:00 pm
The new Semi F47 standard sets requirements for how equipment must tolerate voltage sags on the AC power line. This STEP will review the practical experience with this standard and its associated testing standard Semi F42. Hands-on experience by test houses, subsystem suppliers, tool manufacturers, and fabs will be presented.
Who should attend: This seminar is geared toward electrical engineers and compliance engineers at semiconductor tool manufacturers. Electrical engineers responsible for semiconductor fab power would also benefit from this program.
Session Chairs: Cliff Greenberg, Nikon Precision; Alex McEachern, Power Standards Lab
Registration Fee: Pre-registration by October 9, $195; after October 9 or on site, $295

Tuesday, October 16
STEP: Semi E89 — Analysis of Gauge Measurement Capability
8:00 am-12:00 pm
Until the adoption of Semi E89 in 1999, the semiconductor industry had no generally accepted method to carry out measurement system capability analyses (gauge studies). While this standard proposes a methodology for conducting such studies, due to the variety of measurement instruments, only limited examples can be given. This STEP will show in great detail how one would set up, conduct, and analyze the results of a gauge study according to Semi E89.
Who should attend: This course is targeted toward engineers, managers, scientists, and technicians who need to carry out or understand the execution of Semi Standard E89.
Session chair: Don McCormack, International Sematech
Registration Fee: Pre-registration by October 9, $195; after October 9 or on site, $295.

Wednesday, October 17
STEP: 300mm Wafer ID Mark — Requirements and Challenges
1:00-5:00 pm
This STEP educates suppliers about the ubiquity of marked 300mm wafers, and the requirements they face for reading and reporting wafer ID data. This program will discuss technical and schedule challenges, and investigate what Semi can do to assist both suppliers and users.
Who should attend: This STEP is vital for users: 300mm program managers; process integration managers; 300mm process/ metrology tool manufacturers; robotics/ sorter/handler producers; wafer manufacturers; and 300mm system integrators.
Session chair: Stephen Brunkhorst, MEMC
Registration Fee: Pre-registration by October 9, $195; after October 9 or on site, $295

Meetings and Committees
Tuesday, October 16
Semi Chemical and Gas Manufacturing Group General Meeting
3:00-5:00 pm
The Chemical and Gas Manufacturers Group (CGMG) is a Semi-sponsored special interest group for Semi members who supply chemicals, gases, resists, and related products to the semiconductor industry. The CGMG holds regularly scheduled meetings in conjunction with Semicon shows the US, Europe, and Japan, and provides a forum and a point of focus for its members to address issues of special importance to their segment of the semiconductor industry. The CGMG has international membership and all interested parties are invited to join.
Who should attend: Representatives from Semi member companies that produce chemicals, resists, and gases, or which package and distribute these products for applications in the semiconductor industry; also, representatives from Semi members that produce equipment, provide packaging, perform services, or utilize chemicals and gases in semiconductor applications.
Registration fee: Free (pre-registration is required)

EHS Issues in Advanced Lithography Roundtable
8:00 am-12:00 pm
The Roundtable's mission is to identify environmental, health, and safety (EHS) issues associated with advanced lithographic materials and processes; the meeting will allow information exchange among the photolithography research, chemical and equipment supplier and device manufacturer communities. Its ultimate goal is to gain a better understanding of the EHS challenges facing advanced lithography and how they affect each industry segment.
Who should attend: Photolithography chemical suppliers, photolithography tool suppliers, EHS professionals, and photolithography technologists and researchers.
Registration fee: Free (pre-registration is required)

Self-Assessment Training

Advanced Micro Devices, Austin
Thursday, October 18
Basic Self-Assessment and Validation Methodology
8:00 am-1:30 pm

Friday, October 19
SSQA Methodology
8:30 am-12:30 pm
SSQA Lead Validator
1:30-4:30 pm

iViva La Fiesta...Texas style!
Semicon Southwest
Welcome Reception
Tuesday, October 16, 2001
6-7:30 pm
Austin Convention Center
On Tuesday, Semi hosts the annual Semicon Southwest Welcome Reception. This year's show will kick off with a spicy fiesta, including Tex-Mex fare, margaritas, and a selection of local beers! Meet, network, or just enjoy the festivities. Free to all event participants.

Exhibitors' List
This list of exhibitors is correct as of August 27, 2001.

A&N CORP.
ABB BOMEM INC.
ABRASIVE TECHNOLOGY INC.
ACCUREL SYSTEMS INTERNATIONAL
ACECO PRECISION MANUFACTURING
ADEXA
ADVANCED CERAMICS CORP.
ADVANCED STAINLESS TECHNOLOGIES INC.
ADVANTEK INC.
AERA CORP.
AERONEX INC.
AFFINITY INDUSTRIES INC.
AG FLUOROPOLYMERS USA
AIR LIQUIDE ELECTRONICS
AIR PRODUCTS
AJA INTERNATIONAL
AKETON TECHNOLOGIES
AKRION
ALBANY INTERNATIONAL, HIGH PERFORMANCE MATERIALS
ALCATEL VACUUM PRODUCTS INC.
ALLIED HIGH TECH PRODUCTS INC.
ALMA INC.
AMERIMADE TECHNOLOGY
AMETEK INC.
AMTECH SYSTEMS INC.
ANATECH LTD.
ANATEL CORP.
AP TECH
ARC MACHINES INC.
ARIES ELECTRONICS INC.
ASHTEAD TECHNOLOGY RENTALS
ASPEN TECHNOLOGY INC.
ATOFINA CHEMICALS INC.
ATS PRODUCTS INC.
AUGUST TECHNOLOGY CORP.
AUSTIN INDUSTRIAL COMPANY INC.
AIS - AUSTIN INTEGRATED SYSTEMS
AUSTIN SEAL COMPANY
AXIC INC.
A2C2

BALAZS ANALYTICAL LABORATORY
BANDY INC.
BANNER ENGINEERING CORP.
BARTH ELECTRONICS INC.
BAY VOLTEX CORP.
BEARD MECHANICAL CONTRACTORS
BECO MFG CO
BEDE SCIENTIFIC INC.
BERKSHIRE CORP.
BH THERMAL CORP.
BID SERVICE
BL ENTERPRISES
BOC EDWARDS
BOEDEKER PLASTICS INC.
BP MICROSYSTEMS
BREWER SCIENCE INC.
BROOKS INSTRUMENT
BUSCH SEMICONDUCTOR VACUUM GROUP

CAHNERS-SEMICONDUCTOR INTERNATIONAL
CAMSTAR SYSTEMS INC.
CANON USA INC.
CEIBA TECHNOLOGIES
CENTRAL TEXAS ECONOMIC CORRIDOR
CERAMASEAL
CETAC TECHNOLOGIES
CFD RESEARCH CORP.
CHEMTRACE CORP.
CHIEFTECH PRECISION CO. LTD.
COASTAL INSTRUMENTS INC.
COGNEX CORP.
COMPOSITES USA INC.
CONTEC INC.
CONTECH SOLUTIONS INC.
CORNING TROPEL CORP.
CRAFTECH INDUSTRIES INC.
CUNO INC.
CURBELL PLASTICS
CXE EQUIPMENT SERVICES

DAIKIN AMERICA INC.
DELTA-F CORP.
DISCO HI-TEC AMERICA INC.
DOCKWEILER-USA INC.
DOMNICK HUNTER
DONALDSON COMPANY
DPR CONSTRUCTION INC.
DUPONT COMPANY
DURATEK INC.
DUREX INDUSTRIES
DXL USA INC.

E/G ELECTRO-GRAPH INC.
EAGLE-PICHER TECHNOLOGIES LLC
EARTH TECH MICROELECTRONICS
EBARA TECHNOLOGIES INC.
ECO PHYSICS AG
ECT
EDAX INC.
EKC TECHNOLOGY INC.
ENI
ENSINGER INC.
ENVIRCO CORP.
EPRI PEAC CORP.
ERGOTRON INC.
ESHINUI INC.
EV GROUP INC.
EVANS ANALYTICAL GROUP
EXTRACTION SYSTEMS INC.
EXTRUDE HONE CORP.

FAB-TECH INC.
FAITH ENTERPRISES
FAULKNER GROUP (THE)
FEI COMPANY
FERROTEC (USA) CORP.
FIBERCOR DIVISION OF MINNTECH CORP.
FILTERITE ELECTRONICS
FIRE SENTRY CORP.
FISHER CO. & MOORE
FLUENT INC.
FLUOR DANIEL
FLYNN CONSTRUCTION INC.
FOAMEX ASIA WILSHIRE CONTAMINATION CONTROL
FOSS INDUSTRIES INC.
FUGASITY
FUJIKIN OF AMERICA INC.

G & K SERVICES
GARLOCK HELICOFLEX/BF GOODRICH HIGH PURITY
GARNER ENVIRONMENTAL SERVICES
GEMU VALVES INC.
GENERAL CHEMICAL CORP.
GENERAL PHYSICS CORP.
GENERAL PRECISION INC.
GL AUTOMATION INC.
GREENE, TWEED & CO. INC.
GTI COATINGS INC.
GYROTRON TECHNOLOGY INC.

H&D DISTRIBUTORS INC.
H-SQUARE CORP.
HAM-LET USA (HTC)
HARRISON ELECTROPOLISHING, L.P.
HARVEL PLASTICS INC.
HD SPECIAL PRODUCTS INC.
HEPA CORP.
HEPATECH CLEANROOM SERVICES INC.
HERAEUS QUARTZ TECH INC.
HITACHI AMERICA LTD.
HITACHI SCIENTIFIC INSTRUMENTS
HIWIN CORP.
HOLOGENIX
HONEYWELL DATA INSTRUMENTS
HONEYWELL SENSING AND CONTROL
HORIBA/STEC INC.
HPG INTERNATIONAL INC.

ICD/HEATEFLEX
IGC POLYCOLD SYSTEMS
IGC-APD CRYOGENICS INC.
IKO INTERNATIONAL INC.
INFICON INC.
INLAND VACUUM INDUSTRIES INC.
INSPEX INC.
INSULATOR SEAL, A DIVISION OF MDC VACUUM PRODUCTS
INTEGRATED DESIGNS, L.P./CYBOR CORP.
INTEGRATED FLOW SYSTEMS
INTEGRATED TECHNOLOGY CORP.
INTERNATIONAL WAFER SERVICE
INTERSTATE BUILDING MAINTENANCE
ION IMPLANT SERVICES
IONICS, INC.
ISHII TOOL & ENGINEERING CORP.
IWAKI WALCHEM

J&S GLOBAL TECHNOLOGIES INC.
JAPAN EXTERNAL TRADE ORGANIZATION
JELIGHT COMPANY INC.
JEM AMERICA CORP.
JEOL USA INC.
JIPELEC
JOHNSON MATTHEY
JSR MICROELECTRONICS INC.
JUSUNG AMERICA INC.

KANTO CORP.
KEITHLEY INSTRUMENTS
KENSINGTON LABORATORIES INC.
KEYASSETS.COM INC.
KIMBERLY-CLARK
KOKUSAI SEMICONDUCTOR EQUIPMENT CORP.
KTEC CLEANROOM SYSTEMS
KURT J. LESKER CO.

L-TECH CORP.
LAMBDA PHYSIK USA INC.
LEATHERWOOD PLASTICS
LEICA MICROSYSTEMS INC.
LEO ELECTRON MICROSCOPY INC.
LEYBOLD SEMICONDUCTOR VACUUM SOLUTIONS
LITMAS INC.
LOCKWOOD GREENE
LORANGER INTERNATIONAL CORP.
LUDL ELECTRONIC PRODUCTS LTD.
LUFRAN INC.
LUWA LEPCO
LYNN RESEARCH & TECHNOLOGY

M+W ZANDER
M.E.C. TECH INC.
MACTRONIX INC.
MARCH PUMP
MARK SYSTEMS INC.
MV PRODUCTS DIV., MASS-VAC INC.
MATEC APPLIED SCIENCES
MATERIALS DEVELOPMENT CORP.
MAX INTERNATIONAL ENGINEERING GROUP
MAXON PRECISION MOTORS
MCMILLAN COMPANY
MDC VACUUM PRODUCTS CORP./INSULATOR SEAL
MEASURLOGIC INC.
MEISSNER FILTRATION PRODUCTS INC.
METARA INC.
METROHM-PEAK INC.
METRON TECHNOLOGY
MGI ELECTRONICS LLC
MGI PRODUCTS INC.
MICRO LITHOGRAPHY INC.
MICRO MAGAZINE
MICROTOOL INC.
MIDAC CORP.
MIDDLESEX GENERAL INDUSTRIES
MILLIKEN & COMPANY
MLC CAD SYSTEMS INC.
MOMENTUM TECHNICAL CONSULTING INC.
MONTCO SILICON TECHNOLOGIES INC.
MOTT CORP.
MRL INDUSTRIES
MS CONTACTS
MTI INSTRUMENTS INC.

NAGASE CALIFORNIA CORP.
NANO-MASTER INC.
NETMERCURY
NEWPORT CORP.
NEXRAY
NIKKO MATERIALS (FORMERLY NIMTEC)
NIKON INSTRUMENTS INC.
NILFISK-ADVANCE AMERICA INC.
NOR-CAL PRODUCTS INC.
NORCIMBUS
NORTON
NT INTERNATIONAL

OEM SURPLUS INC.
OLYMPUS AMERICA INC.
OMRON ELECTRONICS-AUTOMATION CONTROLS
ONO SOKKI TECHNOLOGY INC.
OPTICAL GAGING PRODUCTS INC.
OSRAM SYLVANIA
OXFORD INSTRUMENTS

PACIFIC BEARING CO.
PACIFIC SCIENTIFIC INSTRUMENTS
PAGESOUTHERLANDPAGE
PALL MICROELECTRONICS/PALL CORP.
PANAMETRICS INC.
PARKER HANNIFIN CORP., INSTRUMENTATION GROUP
PARTICLE MEASURING SYSTEMS INC.
PARTICLE SIZING SYSTEMS
PCT SYSTEMS INC.
PEAK SENSOR SYSTEMS
PENNWELL — SOLID STATE TECHNOLOGY
PENTAGON TECHNOLOGIES
PERFORMANCE PLASTICS PRODUCTS/EGC
PERSYS TECHNOLOGY
PFEIFFER VACUUM INC.
PHILIPS ANALYTICAL INC.
PHOTO SCIENCES INC.
PHOTRONICS INC.
PIEZOSYSTEM JENA
PILZ AUTOMATION SAFETY L.P.
PLASCORE INC.
POCO GRAPHITE INC.
POLYPROS INC.
PORTER INSTRUMENT COMPANY INC.
PRECISE SENSORS INC.
PRECISION PLUS VACUUM PARTS
PRECISION SENSORS
PROBE 2000
PROCESS TECHNOLOGY
PROFESSIONAL PLASTICS
PRUDENTIAL CLEANROOM SERVICES
PTI ADVANCED FILTRATION INC.
PTI SEMINARS INC.
PURERON USA INC.

QUESTECH SERVICES CORP.

R&R LOTION
RABALAIS I&E CONSTRUCTORS
RECIF INC.
RF SERVICES INC.
RIGAKU/MSC INC.
RIPPEY CORP.
RMB PRODUCTS INC.
RSF ELECTRONICS INC.
RYAN HERCO PRODUCTS

SAES PURE GAS INC.
SAFETY VALVE SYSTEMS
SAINT-GOBAIN SEMICONDUCTOR COMPONENTS
SCIENTIFIC MANUFACTURING TECHNOLOGIES INC.
SCIENTIFIC SYSTEMS USA INC.
SCOTT CONTRACTORS INC.
SEC/N
SECON
SEMCO CORP.
SEMCO ENGINEERING
SEMI REGISTRY
SEMICHASE SYSTEMS INC.
SEMICON PRECISION INDUSTRIES
SEMICONDUCTOR ENGINEERING GROUP INC. (SEGI)
SEMICONDUCTOR EQUIPMENT AND MATERIALS INTERNATIONAL (SEMI)
SEMINET
SEMITOOL INC.
SEMIX INC.
SENSARRAY CORP.
SENTECH
SERMATECH SURFACE ENGINEERING
SETRA SYSTEMS INC.
SEZ AMERICA INC.
SHIPLEY COMPANY
SI AUTOMATION
SICK INC.
SIGMATECH
SITE SERVICES INC.
SKF MOTION TECHNOLOGIES
SKIRE INC.
SOFT SWITCHING TECHNOLOGIES
SOITEC/USA
SOLID STATE EQUIPMENT CORP.
SONIC-MILL
SOUTHWEST HI-TECH INC.
SPEA AMERICA
SPEARS MANUFACTURING COMPANY
SPECIALTY OPTICAL SYSTEMS INC.
SPEEDFAM-IPEC
SPM SEMICONDUCTOR PRODUCTS MANUFACTURING INC.
STERN & STERN INDUSTRIES INC.
SUNX SENSORS
SUPERIOR AUTOMATION
SUSS AMERICA INC. (KARL)
SV PROBE INC.
SWAGELOK COMPANY
SYNCRO VAC INC.

TANAKA SYSTEMS INC.
TECHLINK EQUIP EQUIPMENT AND TECHNOLOGY
TECHNICAL MANUFACTURING CORP.
TECHNOS INTERNATIONAL INC.
TEKSCAN INC.
TELEDYNE HASTINGS INSTRUMENT
TEPLA INC.
TEQCOM INDUSTRIES INC.
TESCOM CORP.
TETRALENE INC.
TEXAS ENGINEERING EXTENSION SERVICE
TEXAS INSTRUMENTS
TEXONICS INC.
THERMO ELEMENTAL
THERMO NICOLET CORP.
THERMO NORAN
THERMO TEK INC.
THERMOCOAX INC.
THK AMERICA INC.
THOMAS WEST INC.
THOMSON INDUSTRIES INC.
THORNTON INC.
TOSOH QUARTZ
TOSOH SMD INC.
TOYO TANSO USA INC.
TRAZAR CORP.
TREBOR-A UNIT OF IDEX CORP.
TRILOGY SYSTEMS
TUV RHEINLAND OF NORTH AMERICA INC.

ULTRAPURE & INDUSTRIAL SERVICES
UNDERWRITERS LABORATORIES INC.
UNICIRCUIT INC.
UNITED SILICA PRODUCTS INC.
UNIVERSAL PHOTONICS INC.
UNIVERSAL SYSTEMS
USFILTER

VACUUM GENERATORS
VALEX CORP.
VARIAN VACUUM TECHNOLOGIES
VAT
VEECO METROLOGY GROUP
VERITY INSTRUMENTS
VERSATILE TECHNOLOGIES INC.
VERTEQ INC.
VIDARO CORP.
VIRGINIA SEMICONDUCTOR INC.
VIRON INTERNATIONAL
VIRTUAL INDUSTRIES INC.

WATLOW ELECTRIC MANUFACTURING COMPANY
WEGENER NORTH AMERICA INC.
WESTLAKE PLASTICS COMPANY
WHITE KNIGHT FLUID HANDLING INC.
WHITE KNIGHT ENGINEERED PRODUCTS
WIKA INSTRUMENT CORP.
WILSHIRE TECHNOLOGIES INC.
WORKLON
WPC WELDALOY PRODUCTS CO.
WRIGHT WILLIAMS & KELLY
YAMADA AMERICA INC.

ZELLWEGER ANALYTICS INC.
ZYGO CORP.