Eurofocus
07/01/2001
Lambda Physik and Jenoptik form joint venture
Lambda Physik AG has founded a joint venture with Jenoptik Laser Optik Systeme GmbH for the purpose of developing and producing radiation sources in the extreme ultraviolet range (EUV). The two companies each hold a 50% stake in the new enterprise, named XTREME technologies GmbH.
"The founding of XTREME technologies accords with our goal of offering a four wavelength strategy (248, 193, 157, and 13.5nm) for microlithography. The shortest wavelength up to which excimer laser technology can be used is 157nm," explains Manfred Rahe, CTO of Lambda Physik. "The semiconductor industry favors EUV as the successor technology. Our goal is to offer customers a complete range of light source products with shorter wavelengths for the production of more efficient microchips. The joint venture will advance development and production of such EUV beam sources."
With sites in Göttingen and Jena, XTREME technologies GmbH will develop electrically excited discharge plasmas and laser-produced plasma sources.
Lambda Physik AG is contributing its expertise in gas discharge and pulsed circuit technologies and in excimer and solid-state laser technologies. Jenoptik Laser Optik Systeme brings to the partnership its expertise in solid-state laser development and in optics.
When ready, the products are to be sold via the distribution network of Lambda Physik, which will also make available its global service network to meet the after-sale needs of customers.
XTREME technologies is equally co-managed by Uwe Stamm, the former head of Lambda Physik's Science and Medicine Division, and by Henry Birner, the former head of business development at Jenoptik Laser Optik Systeme. "In addition to the target market of lithography, we also see good chances of using the developed EUV sources in other areas of application," says Stamm. In the first stage of development, which will run until 2004, the foundation is to be laid for later EUV production sources. The first prototypes of the EUV beam sources will be going into operation at application sites in 2002. For more information, visit www.lambdaphysik.com.
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Despite slowdown, European equipment suppliers buoyant
Although Europe now seems to be following the US into the economic doldrums — with the European Central Bank reversing course and lowering interest rates unexpectedly — semiconductor equipment suppliers in the area have no lack of good news to report.
Helmut Rutterschmidt, the managing director of Datacon Semiconductor Equipment GmbH, headquartered in Radfeld, Austria, recently announced an order from Asia, a four-million-euro investment in a new building in Austria, a special development for ultralight bonding, and the presentation of the epoxy writer for the modular MCM die bonder 2200 apm.
Besides the technical developments, the company is expanding, with 1500 m2 of new production space, 500 m2 more for R&D, and the opening of a separate EMC test room.
Peter Wolters strengthens position in 300mm. Peter Wolters CMP-Systems has doubled its number of employees to more than 100 specialists for system design, process engineering, service, production, quality, marketing & sales, and purchase. To speed up the progress of gaining process and system know-how, Peter Wolters has two R&D partners, the Fraunhofer Institute for Silicon Technology in Itzehoe, and a CMP consumables manufacturer, RODEL, Phoenix, AZ. In these locations, Peter
Wolters CMP-Systems runs several 200mm and 300mm tools to develop new processes, process modules, and process control systems to use for customer demos.
Changes at Carl Zeiss. At the beginning of the new fiscal year (Oct. 1, 2001), Carl Zeiss will split off its Semiconductor Technology business group as a separate stock corporation. "With this move," states Dieter Kurz, CEO of Carl Zeiss, "we are putting our business with optical systems used in chip fabrication on a future-oriented footing."
As a stock corporation, the business group will have a clear and transparent structure, enabling it to react to changes in the market with greater flexibility.
Carl Zeiss is expecting continuous and strong demand and is building a modern plant for optical systems used in chip fabrication. Plans envisage an overall investment of DM 500 million for the building and production facilities. When completed in 2003, the 45,000 m2 plant will be able to house 1000 employees.
Multitest and Everett Charles in merger. Executives and shareholders of Multitest AG, a manufacturer of semiconductor test handlers, have decided to join Everett Charles Technologies (ECT). ECT is a wholly owned subsidiary of Dover Technologies and Dover Corp. Multitest will continue to be directed by CEO Ekkehard Ueberreiter and his present management team. Multitest AG is the third German acquisition by Everett Charles Technologies in the past four years.