New Literature
05/01/2001
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Thermal products web site
This redesigned web site highlights a line of heaters, sensors, controllers, software, and systems for the semiconductor industry. Features of the site include a reference section that allows users to search for data; guides; tutorials; equations for engineers; a distributor and sales office locator; and a new literature section with product information, including spec sheets and manuals. Watlow, St. Louis, MO; ph 800/492-8569 or 314/878-4600, fax 877/893-1005 or 314/878-6814, e-mail [email protected], www.watlow.com.
LPCVD silicon nitride trap brochure
The Vapor Sublimation Trap, a tool that catches ammonium chloride by-products generated in the LPCVD silicon nitride process, is featured in this six-page, color brochure. In the first stage, the tool traps effluent by-products, and in the second, it traps particulates, thus preventing contaminants from backstreaming into the reaction chamber and contaminating the vacuum pump. Applications information, a technical overview, specs, dimensions, part numbers, and pricing are also included in the brochure. HPS Products, MKS Inc., Boulder, CO; ph 800/345-1967 or 303/449-9861, fax 303/442-6880, www.mksinst.com.
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Filtration product overview guide
Designed to help customers more accurately specify the filtration products appropriate for their needs, this guide displays a wide range of high-tech filter options. In addition to a complete line of cartridge and bag filters and filter vessels, the guide features information on inPHorm filter selection computer software. Silicon chip manufacturers striving to produce larger wafers with more layers and more devices/layer as well as smaller linewidths, and process and specifying engineers who select filtration equipment will find the guide useful. Parker Hannifin Corp., Lebanon, IN; ph 888/238-5356 or 765/482-3900, fax 765/482-8410, www.parker.com.
ASIC system on a chip report
Written by design engineers and market research professionals, ASIC-System on a Chip for the 21st Century explains and addresses system on a chip (SOC)/IP/EDA to help engineers plan and implement SOC designs. MOS logic, standard cell and SOC historical data, along with forecasts through 2005 are included. According to the report, SOC dollar shipments increased to 64.9% in 2000. Continued growth in this segment is expected, with SOC revenues exceeding $11.6 billion in 2005, comprising 62.8% of total standard cell revenue. Integrated Circuit Engineering Corp. (ICE), Scottsdale, AZ; ph 480/515-9780, fax 480/515-9781, e-mail [email protected], www.ice-corp.com.
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FEOL production tools brochure
Front-end-of-line (FEOL) process tools for the next four technology nodes after 130nm are highlighted in this full-color brochure. The Pulsar, ALCVD, Polygon, Advance, Levitor, Eagle, Epsilon, A400, and A412 tools are used alone or in combination for processes like anneals; base epi; cap; contacts; etch stop; gate dielectric, electrode, and stack; grown source/drain; isolation; metal and sacrificial gate; raised source/drain; silicide anneal; silicon channel; source/drain cladding; spacer; and spike anneal. ASM International N.V., Bilthoven, The Netherlands; ph 31/30 229 84 11, fax 31/30 228 74 69.
Data capture and process control web site
This site focuses on data capture and control products for improved yields through better quality, rapid error and defect detection, and reduced downtime and scrap in semiconductor processes. Featured is the GOLDMAN SYSTEM, which captures data for the customer or takes data already being used and converts it with a proprietary file conversion process. The site also explains how data capture and process control can be used in applications such as Novellus CVD and Applied Materials P5X systems; Thermco TMX furnaces; TEL 3100, 3200, 4000, and TS400Z series furnaces; and BTI 7355 series furnaces. Also included on the site are technical articles like "Trace Data — Yesterday's News or Key to Vastly Superior Equipment Performance," "SPC and Equipment Productivity," and "The High-bandwidth Digital Data Network: A New Tool for Process Improvement," and charts on what types of data can be captured and ways to use it. Jon Goldman Associates Inc., Orange, CA; ph 714/283-5889, fax 714/283-2884, www.jga-inc.com.
Specialty gas newsletter
Scott Tech Newsline covers the technical, scientific, and legislative issues faced by specialty gas users, and highlights recent break-through developments in technology. Vol. 1, Issue 1 discusses the benefits of using ultra-high-purity HBr for etching; future issues will focus on a new Sigma 2000 HBr that will aid in the development of 0.13µm technology. Scott Specialty Gases, Plumsteadville, PA; ph 215/766-8861, e-mail [email protected], www.scottgas.com.