New Products
03/01/2001
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Double-sided, single-wafer spin processor
Spin-Processor 8200 is a noncontact, single-wafer, double-sided cleaner that meets the requirements of next-generation technology nodes. It has a throughput of 200 wafers/hr. The four-chamber tool is based on this company's 4200 model, with incorporation of a double-sided cleaning system. A single-wafer tool, the 8200 is capable of immediate uniform coverage of the wafer and better end uniformity while using less chemistry than other systems performing pre-diffusion cleans. It also eliminates redeposition and cross-contamination because chemicals are spun off the wafer surface and the wafers are not touched during transport. The system offers the same (or better) throughput as batch processing, while eliminating water marks and residue contamination. SEZ AG, Villach, Austria; ph 43/4242-204-455, fax 43/4242-204-469, [email protected], www.sez.com.
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Portable leak-detection unit
The Heliot 100 Series is a complete line of portable dry helium leak detection units that provides the sensitivity and sophistication of a large console-size helium testing system in a small, portable package, reducing testing time and increasing productivity. The detectors use a dry backing pump in place of the traditional, oil sealed, rotary vacuum pump and are equipped with touch-screen control for ease of operation. Weighing only 32 lbs, Heliot's portability and automated features allow for reliable and high-sensitivity leak testing on objects large and small, such as vacuum process chambers, valves, pumps, heat exchangers, tanks, piping and tubing assemblies — in any environment, including cleanrooms. ULVAC Technologies Inc., Methuen, MA; ph 978/686-7550, fax 978/689-6300, [email protected], www.ulvac.com.
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Diode-pumped solid-state laser
The Millennia UV is the first all-solid-state, deep-UV (266nm) CW laser designed for use in such applications as wafer inspection and PC board inspection, providing a reliable alternative to power-hungry gas lasers. The proven Millennia platform is combined with a Double DeltaConcept frequency doubling cavity in a rugged, monolithic laser head. The geometry invariant cavity length stabilization provides enhanced power and beam pointing stability. The natural simplicity and stability of the design results in dependable, robust operation. As well as high reliability, Millennia UV delivers state-of-the-art performance, with a TEM00 output beam and superior beam pointing and output power stability. Spectra-Physics, Mountain View, CA; ph 650/966-5646, fax 650/969-3546, [email protected], www.spectra-physics.com.
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Memory testers
Kalos XW is designed for high-volume testing of nonvolatile memory semiconductors that are widely used in the communications sector. It is flexible enough for engineering, wafer probe, and final test without compromising cost or performance. Personal Kalos is a flash memory tester that is designed to develop and test programs and characterize devices from the engineer's desktop. These programs can then be seamlessly transferred to the Kalos production testers. The ASL 2000 offers a very low cost for analog mixed-signal test for the telecommunications, converter, power management, and industrial markets. The RFx is a mixed-signal test system for high-volume production test, offering very low COO for testing RF/wireless devices. Credence Systems, Fremont, CA; ph 510/623-4774, fax 510/623-2524, www.credence.com.
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Reduced-grain-size cobalt target
This new cobalt target has a reduced grain size and a high pass through flux (PTF), giving better film thickness uniformity and target utilization in advanced PVD contact processes. The target has a hexagonal-close-packed (HCP) target microstructure, which has proved to provide better magnetic properties in the target material. It has a fine grain size of <75µm, which can be nondestructively tested and verified. Because the target has a PTF >60% (as measured on this company's proprietary nondestructive measurement system), it demonstrates very good performance with lower sputtering impedance and better film uniformity. High-purity 3N5 and 4N5 solder-bonded cobalt target assemblies are available. The bond integrity is verified using ultrasonic C-scan techniques. Tosoh SMD Inc., Grove City, OH; ph 614/875-7912, [email protected], www.tsmd.com.
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Rectangular flange
After 10 hours of pumping with an O-ring seal on a 300mm valve mounting port, the result is having pumped the equivalent of an additional 4375 sq in. of chamber area. A metal-sealed flange will eliminate this added pump load and increase efficiency. The Atlas rectangular flange is an aluminum flange with a robust stainless sealing surface. Atlas manufactures rectangular UHV flanges with either stainless knife-edges or stainless faces for crushable VAT gaskets. These metal seal flanges are MESC-compatible and will reduce pump downtime and eliminate O-ring contamination. In addition, CF flanges are built in all sizes to accommodate the other ports on users' process tools. Atlas Technologies, Port Townsend, WA; ph 360/385-3123, [email protected], www.atlasbimetal.com.
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LabVIEW software drivers
National Instruments' LabVIEW provides a graphical programming language for user-build of customized interfaces to diverse instruments and devices. Drivers for LabVIEW software are now available for the full range of Hiden Analytical Windows-based quadrupole mass spectrometers, allowing control and data integration concurrent with multiple process device operation and monitoring. The Hiden drivers are automatically self-configuring, with all mass spectrometer control parameters grouped within LabVIEW for convenient programming for the full application range, including residual gas analysis, surface science studies, gas and plasma analysis. All Hiden LabVIEW drivers are supplied with a pre-formed virtual instrument interface for convenient initial startup, and are offered free of charge. Hiden Analytical Inc., Peterborough, NH; ph 603/924-5008, [email protected], www.hidenanalytical.com.
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ESD flat and notch aligners
These ESD flat and notch aligners, available for 4-, 5-, 6- and 8-in. wafers, are constructed of electrostatic, dissipative, cleanroom-compatible plastics that prevent metal contamination while eliminating sources of particle generation. Precision molded hybrid urethane rollers are resilient to tear and abrasion resistant, creating no edge fracturing or damage to the wafers. The notch aligners eliminate friction at the notch
oller interface by disengaging the primary drive roller upon notch found wafer. This design eliminates particle generation and increases roller life. VariTech International, Richardson, TX; ph 972/644-7020, [email protected], www.varitechco.com.
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Rinsing and drying tool
The Scepter is a high-performance, high-productivity rinsing and drying tool that has a 50-wafer capacity in a single chamber and builds on this company's production-proven 25-wafer SRD. Features include: resistivity monitoring, for a reliable clean; <5 gal of water/cycle and <7 min for a complete cycle; a brushless DC motor that promotes centrifugal drying to remove water economically and efficiently; on-axis orientation for even spray; multiple hardware interlocks; dampened action valves that reduce fluid hammer; easily changed rotors for reconfiguration to an array of applications; and clean performance through filtered and heated nitrogen dry and low-pressure nitrogen purge. Semitool Inc., Kalispell, MT; ph 406/751-6325, [email protected], www.semitool.com.
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Encapsulated filter assembly
The UltraCap capsule filter assembly, for the filtration of metal and oxide CMP slurries, is an integrally sealed filter and housing system. The encapsulated, disposable system limits exposure to slurry compounds, while offering faster filter change-outs than traditional cartridge and filter housing systems. During filtration, UltraCap helps to regulate the slurry compound by trapping large, wafer-damaging particles and agglomerates within its filtration media. Smaller, working slurry particles can pass through the media — unaffected — to the rotating pad for polishing. Potentially yield-reducing particles are removed from the slurry material without disturbing the distribution of the polishing slurry. UltraCap is available with absolute removal ratings from 0.45-70µm to meet a range of slurry applications. Meissner Filtration Products Inc., Camarillo, CA; ph 805/388-9911, fax 805/388-5948, [email protected].
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Vacuum inlet trap
The MV Multi-Trap Model IC is a high-capacity vacuum inlet and exhaust trap for collecting solids in LPCVD, MOCVD, WCVD, and metal etch processes. It features water-cooled internal coils that provide more than 200 in.2 of surface area, along with two customizable filtration stages to condense and collect heavy particulates. Developed for production processes that generate large amounts of condensables, the trap has more than 500 in.3 of space to accumulate solids and keep production lines operating longer. The trap is constructed from all stainless steel and is offered with ISO-80 or ISO-100 flanges. The two filtration stages use five 4.5-in. replaceable elements: typically stainless steel gauze and micron-rated polypropylene. Other types are available. MV Products, Division of Mass-Vac Inc., No. Billerica, MA; ph 978/667-2393, fax 978/671-0014, [email protected], www.massvac.com.
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High-volume sputtering source
Torus 7 is a new high rate magnetron sputtering source. It is designed for high-volume coating applications, having very good target utilization (40% to 60%) and high operating power (up to 20Kw DC for certain applications). The source accepts 7-in.-diameter targets, from 0.5 to 0.75 in. thicknesses. Other features include quick-release target clamps, rugged stainless-steel cooling wells, and magnets that are isolated from the cooling water. Targets can be directly or indirectly cooled, and two mounting styles are available. Kurt J. Lesker Co., Clairton, PA; ph 800/245-1656 or 412/233-4200, [email protected], www.lesker.com.
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Displacement measuring interferometer
The DMI 500 is a compact, self-contained, sealed unit that is mounted on a flat base for easy mounting or for securing into position. It can solve micropositioning and calibration problems in wafer-processing and disk drive applications. Based on a differential polarization Michelson interferometer, with a simplified detection design, the DMI 500 directs its measurement beam to a corner cube attached to the object for which linear displacement is to be measured. The beam returning from the corner cube re-enters the DMI 500, where it is recombined with a reference beam. Dimensions of the unit are 5.3 x 2.2 x 3.3 in. (L, H, W) and weight is 1.5 lbs. Resolution is 0.083µm and accuracy is 3ppm with environmental compensation. The unit's range is 500mm and slew rate is 100mm/sec with PC-80 or PC ISA counter board. The DMI500 has an integrated LCD display. LaserMax Inc., Rochester, NY; ph 800/527-3707, fax 716/272-5427, [email protected], www.lasermax-inc.com.
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Flow sensors
Series 106 Flo-Sensors can measure extremely low flow rates, from 15 ml/min to 50 l/min with ±1% accuracy. With a response time of <1 sec, the sensors are used primarily for semiconductor liquid flow applications where high purity and particle-free operation are essential. The 106 has only Teflon and sapphire as wetted surfaces. It can accurately measure DI water, as well as most highly corrosive liquids. McMillan Co., Georgetown, TX; ph 800/861-0231 or 512/863-0231, fax 512/863-0671, [email protected]. www.mcmflow.com.
Compact chiller
Thermocube is a compact thermoelectric chiller suitable for providing temperature control to a laser or other small equipment. It cools, heats or cycles temperature between -5 and 50°C within 0.2°C of setpoint. It is 1 ft3 in size and can provide up to 400W (air-cooled) or 600W (liquid-cooled) cooling capacity at normal room teperatures. Solid State Cooling Systems, Pleasant Valley, NY; ph 845/635-5500, fax 845/635-8081, [email protected], www.sscooling.com.
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Single-wafer clean/strip/etch
The Millennium is a fully automated, single-wafer system that performs a variety of cleaning, stripping, and etching processes. The high-volume production system can be configured to include spray, immersion, and vapor processes on wafer sizes up to 300mm. With multiple chambers, including the proprietary Capsule process chamber, the Millennium can perform a different process on each side of the wafer simultaneously. Configurable with one or two robots and up to 10 processing chambers, the system features precise, reliable, and cost-effective operation with high throughput in a compact footprint. Semitool Inc., Kalispell, MT; ph 406/751-6325, [email protected], www.semitool.com.
Advanced circuitry cleaner
The ACC-4000 advanced circuitry cleaner, for semiconductor and hybrid applications, is an in-line aqueous cleaner that removes particles and flux residue in such applications as BGA ball attach. Cleaning with a closed-loop DI water process allows control of cleanliness to <1µg/sq in. NaCl. The ACC-4000 also dries the product with adjustable, in-line, and precise air knives, all in a footprint of 38 x 84 x 64 in. The system features separate pre-wash, wash, and DI spray manifolds, while achieving production rates >400 BGA strips/hour. The alarm package includes full protection, digital temperature control, and a resistivity monitor. GPD Global, Grand Junction, CO; ph 970/245-0408, [email protected], www.gpd-global.com.
Direct-drive rotary stage
This direct-drive rotary stage has advantages over traditional worm gear-driven stages. Elimination of worm gearing offers the ability to reduce wear with zero backlash while exhibiting near-frictionless motion. High positioning accuracy, solely based on the stage's encoder, provides repeatability within ±2 encoder counts, with resolutions ranging to 0.5 arc sec. Peak output speeds of the RD series, using brushless DC servo motors, range up to 200 rpm, with significant torque capability. Bayside Motion Group, Port Washington, NY; ph 516/484-5353, fax 516/484-5496, www.baysidemotion.com.
Video measuring system
The YF10 noncontact 3D video coordinate measuring machine (VCMM) is a high-speed, high-accuracy tool that is equipped with an IEEE 1394-interface digital CCD camera and advanced metrology software. It is available with 10:1 zoom lens optics or a variety of fixed optical lens magnifications. Twin halogen light sources transmit illumination via fiber optics to provide coaxial episcopic and diascopic illumination. An advanced multi-LED programmable ringlight gives the operator great flexibility in setting oblique illumination to find blind features. The YF10 is a bridge-style VCMM equipped as standard with this company's 0.0001mm-resolution digital scales. It features a high-accuracy, servo-controlled stage and bridge assembly with closed-loop feedback for precise positioning and repeatability. The system has a measuring volume of 400 x 400 x 200mm. Setup and manual operations are simplified with the ability to move the machine via a joystick or mouse for continuous motion, incremental jog moves, and go-to position commands in absolute or incremental. Moves can also be specified via a stage view or a part graphical view. Sony Precision Technology America Inc., Lake Forest, CA; ph 949/770-8400, fax 949/770-8408, www.sonypt.com.
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300mm die attach and sort
This new platform, the Swissline 9020 series, has sophisticated wafer-handling with an adapter ring system, and 5-min changeover to different wafer sizes in combination with minimized wafer exchange times during operation (two wafers are processed in parallel). A new vision engine is integrated into a user-friendly graphical control interface. Alphasem AG, Berg, Switzerland; ph 41/71-637-6363, fax 41/71-637-6364, [email protected], www.alphasem.com.
300mm thermal chuck
Using the H1000 thermal chuck system, the 300mm Thermal Chuck seamlessly becomes part of the probing environment to provide very good thermal control while maintaining the accuracy and functionality of the probe station itself. Features include integrated conductive and isolating layers, in both coaxial and triaxial designs, which maximize heat transfer and uniformity while still providing high-performance electrical characteristics. Kinematic mounting minimizes expansion of the chuck up and into the probes or probe card during heating cycles. Cast-in heating and cooling elements provide for rapid temperature cycling while maintaining unequalled temperature uniformity over the entire surface of the chuck. The Micromanipulator Co., Carson City, NV; ph 775/882-2400, [email protected], www.micromanipulator.com.
Compact servo actuator
The AR servo actuator offers a compact integrated design, as the servo amplifier, servo driver and controller are integrated into a single unit. A self-contained electronic gear allows positioning data to be set easily without considering the machine's reduction gear ratio. Both absolute and incremental encoders are supported by the amplifier, and a built-in brake control function is synchronized with the actuator's on/off functions. Four types of AR servo actuator are available, with capacities ranging from 0.4 to 2.5kW, as well as seven types of gear ratio. Harmonic Drive Technologies, Peabody, MA; ph 800/921-3332, [email protected], www.harmonic-drive.com.
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Low-DP transmitters and manometers
These low differential pressure (DP) instruments — transmitters, calibrators, and manometers — extend DP measurement capabilities down to 0.04 in. of H2O. The heart of the transmitters and manometers is a highly accurate inductive transducer design that delivers long-term stability and low hysteresis. The transducer uses a beryllium copper diaphragm coupled to an inductive pickup to measure very small changes in pressure. The instruments cover the pressure range from 0.04 to 800 in. of H2O. A variety of outputs is provided, and models are available with integrated LED digital displays, square root extraction for flow measurement, and pneumatic overload protection. The new family includes a highly accurate portable pressure calibrator to generate pressure and calibrate sensors. Orange Research Inc., Milford, CT; ph 800/989-5657, fax 203/783-9546, [email protected].
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Resist strip pre-filter
All-polypropylene AlpHA filters, for pre-filtration of photoresist stripping chemicals, have high dirt-loading capacity that traps gel formations in the solvent baths in order to protect and extend the life of the final filters. The filter's depth-type media provides high flow rates at low pressure drops, ensuring that there will be rapid bath turnover rates for fast bath recovery between wafer immersions. The polypropylene microfiber media enhances the removal of gelatinous contaminants, which can blind off membrane filters and cause rapid and premature plugging. The AlpHA filter is available in absolute retention ratings of 0.45, 0.6, 0.8 and 1.2µm. Meissner Filtration Products Inc., Camarillo, CA; ph 805/388-9911, fax 805/388-5948, [email protected].
Heated chucks for processing
Thermofoil heated chucks save weight and space while improving temperature uniformity. They are designed for such processes as lithography, CVD and PVD, dry etch, and stripping, in both 200mm and 300mm wafer sizes. Design options include polyimide insulated heaters bonded to aluminum chucks (to 260°C), mica insulated heaters sealed into welded chucks (to 500°C), and mica insulated heaters clamped between silicon carbide plates (to 600°C). Custom design options include profiled power for highly uniform temperature and integral sensors for accurate control. Hermetically sealed power connections are available for high-vacuum applications. Minco Products Inc., Minneapolis, MN; ph 763/571-3121, [email protected], www.minco.com.
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Liquid dispenser
The MicroMax Dispenser is part of a series of liquid dispensing systems that is ideal for non-heated applications in surface mount applications and semiconductor packaging. The MicroMax has a stable composite base with a footprint of 36.5 x 47 x 59.5 inches, and a work area of 12 x 12 inches. The system has a dispense rate up to 36,000 dots per hour at a speed of 30 in/sec, and can be operated as a conveyorized system for PCBs or boats/carriers. With the capability for mounting two valves at all times, the system dispenses dots as small as 10 mil. The MicroMax features x-y-z accuracy that is better than ± 0.0015 inch and x-y-z repeatability less than ± 0.0006 inch. GPD Global, Grand Junction, CO; ph 970/245-0408, [email protected], www.gpd-global.com.
Assembly and test software
Trilogy 5000 CAM software (release 6.0), for virtual prototyping, and assembly and test, addresses the time and cost problems associated with handling multiple types of engineering data, such as design data, bills of materials and approved vendor lists. Using the open ODB++ data exchange format, the software incorporates machine optimization and line balancing functions. Additionally, ProBOM is a new lightweight, standalone tool that has been developed to work with Trilogy 5000 and other systems for the reading and creation of first version BOMs early in the assembly cycle. Valor Computerized Systems, Lake Forest, CA; ph 949/586-5969, fax 949/586-1343, [email protected], www.valor.com.
CZT detector packaging
This company has introduced a low-temperature flip chip bonding alternative for packaging multi-electrode CZT radiation detectors. The conductive polymer technique offers several advantages over conventional solder reflow flip chip technology, including the elimination of electroplating or thin film vacuum deposition of solder. The ink provided can be cured at low temperature and still retain good volume resistivity. Polymer Flip Chip Corp., Billerica, MA; ph 978/667-0071, www.pfccorp.com.
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Odd form placement
The Polaris Assembly Cell provides automated odd form component placement and final assembly in one machine. Features include open architecture, multilevel assembly capability, customizable tooling, user-friendly interface, CAD-driven placements, vision inspection and orientation, and the flexibility to handle a wide component range. Universal Instruments Corp., Binghamton, NY; ph 607/786-8104, [email protected], www.uic.com.
Silicon-based conformal coatings
The 1900 series is a family of three silicon-based conformal coatings that are formulated to deliver high performance, PCB protection, cost-of-use advantages and compliance with most international regulatory standards. These silicon-based formulations offer flexible, low-stress protection for fine pitch leads and delicate components. All three coatings are self-priming materials using non-corrosive moisture/condensation cures. They can be cured at room temperature or accelerated by heat, forming transparent elastomers with good electrical properties over a wide temperature range (-55 to 200°C). Dow Corning, Midland, MI; ph 517/496-6000, www.dowcorning.com/electronics.