Wafer chuck reconditioning

12/01/1998

Wafer chuck reconditioning

Wafer chuck reconditioning services are now being offered by a manufacturer whose fixtures accommodate round or square wafer/vacuum chucks up to 48 in. Precision vacuum chucks are manufactured to extreme flatness and parallelism, often with mirror-like finishes; porous chucks have ceramic, quartz, or metal inserts that can loosen; and dicing chucks are often damaged during blade setup procedures or by blade or flange height/depth miscalculations. Continuing to use a damaged chuck limits capabilities, compromises quality, and can cost thousands of dollars. Chuck reconditioning can restore a part to its original flatness and surface quality, giving years of added use for less money. Turnaround time is one to several days. Valley Design Corp., Westford, MA; 978/692-1971, fax 978/692-9549, e-mail [email protected], web site www.valleydesign.com.