Literature Update
12/01/1998
Gas analysis brochure
This six-page brochure describes improvements in the Transpector 2 gas analysis system, a quadrupole-based smart sensor that contains sensor drive electronics and a microprocessor in a compact enclosure attached to the sensor. New RF and preamplifier electronics provide accurate data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing. Increased hydrogen sensitivity makes contaminants visible at sub-ppm levels, and faster scanning over low-level signals with an expanded dynamic range provides cleaner data at lower detectable partial pressures. The brochure also includes information on physical vapor deposition, etch, CVD, and implant semiconductor applications, and a specification chart. Leybold Inficon Inc., E. Syracuse, NY; ph 315/434-1100, e-mail [email protected],
web site www.leyboldinficon.com.
Mass flow meter data sheet
Technical literature on the Model 640-S Smart Insertion mass flow meter is provided in this new data sheet. The microprocessor-based transmitter integrates the functions of flow measurement, flow-range adjustment, meter validation, and diagnostics in a compact, explosion-proof housing. Mass flow rate and totalized flow, as well as other configuration variables, are displayed on the meter`s backlit LCD panel. The sheet also provides specifications, dimensional drawings, and an ordering guide. Sierra Instruments Inc., Monterey, CA; ph 800/866-0200, fax 408/373-4402, www.Sierrainstruments.com.
Temperature products catalog
Information on a line of temperature, air velocity, and humidity-related equipment is offered in this 40-page catalog. Among the items featured are handheld thermocouple thermometers (including single and multiple inputs and dataloggers with infrared printer ink); a selection of Type J, T, E, K, R, S, and infrared probes; smart temperature controllers; RTDs; thermistors; a handheld unit that measures air velocity, temperature, and humidity; and an assortment of accessories, including field kits. Also described is the company`s custom-designed temperature sensor capability. Barnant Co., Barrington, IL; ph 800/637-3739, fax 847/381-7053, e-mail [email protected], web site www.barnant.com.
Transport module controller data sheet
This data sheet describes the Techware 5 Express, a standard controller for Marathon Express cluster tool automation platform configurations and components, including the MagnaTran 7 robot, the VCE 6 cassette elevator, and the drop-in in-cooler. With support for both direct and distributed I/O, a small form factor, and a scalable architecture, the tool can also be deployed for thin-film process control. The data sheet also details other features of the instrument, such as its CE-marked, industry standard VMEbus design; its key benefits, such as flexibility and expansion capabilities and worldwide service and spare part support; and technical specifications like physical dimensions, hardware options, and control software options. Brooks Automation Software Corp., Richmond, BC, Canada; ph 604/214-5000, fax 604/214-5001, e-mail [email protected], web site www.brooks.com.
Heated vacuum valve brochure
This 16-page, color brochure details a line of vacuum valves designed to be used in semiconductor processes like low-pressure CVD, where production by-products can condense and build up. Because the poppet-style HPS Jalape?o vacuum valves are heated to a minimum internal temperature of 150?C, by-products that would interfere with the operation of conventional valves are changed to gases. The valves are available in angle and in-line models with seal, limit switch, and solenoid options, and their Series 45 cleanroom-compatible jackets are made from materials that heat the component on the inside, leaving the outside warm to the touch. The brochure includes applications, a technical overview, specifications, dimensions, and pricing. MKS Instruments Inc., Vacuum Products Group, Boulder, CO; ph 800/345-1967 or 303/449-9861, web site www.mksinst.com.