Europe

12/01/1998

Europe

Steag Micro Tech GmbH, Pliez-hausen, Germany, and IMEC, Belgium, have extended their cooperation on cleaning technology including the installation of a Poseidon Single Tank Tool at IMEC. The tool will be used in 0.25-?m prototyping and in advanced 0.18-?m, and even 0.13-?m, process developments.

Meissner + Wurst GmbH & Co., Stuttgart, Germany, will plan and construct a 22,000 m2 cleanroom and disposal systems for Taiwan Semiconductor Manufacturing Corp. The order is worth US$49.5 million. The facility will accommodate 200-mm production and a SMIF minienvironment.

ASM Europe B.V., Bilthoven, The Netherlands, has shipped its A412 dual reactor vertical furnace for 300-mm processing to Selete, Yokohama, Japan. The system includes an LPCVD silicon nitride and TEOS tube, and an LPCVD in-situ doped poly silicon tube, configured with pre-purged FOUP cassettes and a nitrogen purged mini-environment.