Issue



Wet enviroment robot


12/01/1998







Wet environment robot

The Gencobot Wet Environment Robot (GB7-W), the latest addition to the GPR series robots, has a protective enclosure to prevent water penetration, addressing problems associated with CMP or wet process applications. These include slurry deposits in vacuum lines, oxidation, problems related to moisture/humidity, and premature belt/bearing failure when mounted upside down. The GPR system is a six-degrees-of-freedom, servo-controlled robot that performs cassette alignment and arm deflection compensation during transport. Genmark Automation, Sunnyvale, CA; ph 408/745-6520, www.genmarkautomation.