Ultrapure nitric acid

12/01/1998

Ultrapure nitric acid

Offered as part of the Class 1 semiconductor chemical line, this new grade of ultrahigh-purity nitric acid meets sub-ppb specifications. It will be used in this company`s MAE mixed oxide etchants and PAE aluminum etchants. Developed to support sub-0.35-?m processes, the chemical is manufactured in a facility that includes two high-purity distillation units, an in-line sampling system, and four state-of-the-art storage vessels. Other chemicals in the Class 1 family include sulfuric acid, hydrofluoric acid, ammonium hydroxide, phosphoric acid, isopropyl alcohol, and hydrogen peroxide. General Chemical Corp., Electronic Chemicals Group, Pittsburg, CA; ph 800/247-4519.