Defect inspection and review

12/01/1998

Defect inspection and review

DART Version 2.5 software for Windows NT 4.0 is used with this company`s inspection tools for full automation of wafer inspection, allowing the user to locate, evaluate and classify defects at any stage of the manufacturing process. The user-configurable system is compatible with almost all stand-alone microscopes, wafer loader systems that handle both micro and macro inspection, and fully automated Optistation-series wafer inspection stations. DART is fully GEM/SECS-compliant, and it supports OCR, DART image archiving and retrieval, wafer mapping/prober support, and the ability to interface with VARS. It also interfaces with automated defect-detection systems such as those made by KLA-Tencor. DART-reviewed wafers can be analyzed and tracked throughout the fab for enhanced defect yield management. Nikon Instrument Group, Melville, NY; ph 516/547-4200, www.nikonusa.com.