Remote monitoring/operation of ion implanters

12/01/1998

Remote monitoring/operation of ion implanters

The Dedicated Network Option allows the connection of any combination of this company`s high-energy, high-current, or medium-current implanters, by using a dedicated LAN. Key benefits of the system are: isolation of connected implanters from outside network traffic; remote operation and monitoring capability; and a secure network that can connect more than 200 implanters. The In-House Network Option can be implemented using the fab`s existing LAN or used in conjunction with the Dedicated Network Option as a single enhancement. Eaton Semiconductor Equipment Operations, Beverly, MA; ph 978/232-4000, e-mail [email protected], or [email protected].