Mapping sensor

11/01/1998

Mapping sensor

The F3M-S mapping sensor allows the mapping of cassettes that have both silicon and glass wafers. The sensor automatically detects inexpensive opaque dummy wafers, with a transparency rate of 92% max, used for process checks. There is an automatic teaching function that ensures easy output adjustments within a minimal time, and there is a remote teaching function that ensures easy output readjustments. Omron Corp., Osaka, Japan; ph (US) 847/843-7900 ext. 298; fax 847/839-2298.