Gas analysis

11/01/1998

Gas analysis brochure

This six-page brochure describes improvements in the Transpector 2 gas analysis system, a quadrupole-based smart sensor that contains sensor drive electronics and a microprocessor in a compact enclosure attached to the sensor. New RF and preamplifier electronics provide accurate data for vacuum process monitoring, process diagnostics, and leak detection in semi-conductor manufacturing. Increased hydrogen sensitiv-ity makes contaminants visible at sub-ppm levels, and faster scanning over low-level signals with an expanded dynamic range provides cleaner data at lower detectable partial pressures. The brochure also includes information on physical vapor deposition, etch, CVD, and implant semiconductor applications, and a specification chart. Leybold Inficon Inc., E. Syracuse, NY; ph 315/434-1100, e-mail [email protected], web site www.leyboldinficon.com.