Heated vacuum value brochure

11/01/1998

Heated vacuum valve brochure

This 16-page, color brochure details a line of vacuum valves designed to be used in semiconductor processes like low-pressure CVD, where production by-products can condense and build up. Because the poppet-style HPS Jalape?o vacuum valves are heated to a minimum internal temperature of 150?C, by-products that would interfere with the operation of conventional valves are changed to gases. The valves are available in angle and in-line models with seal, limit switch, and solenoid options, and their series 45 cleanroom-compatible jackets are made from materials that heat the component on the inside, leaving the outside warm to the touch. A series of safeguards, including a low-temperature alert that allows for ease of monitoring the operation of the heaters; a built-in thermostat that requires no external controller; and a thermal fuse that limits the high temperature of the jackets, are built into the heater jackets. Also included in the brochure are applications, a technical overview, specifications, dimensions, part numbers, and pricing. MKS Instruments, Vacuum Products Group, Boulder, CO; ph 800/345-1967 or 303/449-9861, web site www.mksinst.com.