Transport module controller data sheet

11/01/1998

Transport module controller data sheet

This data sheet describes the Techware 5 Express, a standard controller for Marathon Express cluster tool automation platform configurations and components, including the MagnaTran 7 robot, the VCE 6 cassette elevator, and the drop-in in-cooler. With support for both direct and distributed I/O, a small form factor, and a scalable architecture, the tool can also be deployed for thin-film process control. The data sheet also details other features of the instrument, such as its CE-marked, industry standard VMEbus design; its key benefits, such as flexibility and expansion capabilities and worldwide service and spare part support; and technical specifications like physical dimensions, hardware options, and control software options. Brooks Automation Software Corp., Richmond, BC, Canada; ph 604/214-5000, fax 604/214-5001, e-mail [email protected], web site www.brooks.com.