In situ photoresist sensor

11/01/1998

In situ photoresist sensor

This in situ sensor detects unwanted photoresist in the wafer de-gas stations of PVD systems. Fully integrated into PVD cluster tools, the detector interrupts the processing of any wafer that enters a vacuum processing system with detrimental levels of residual resist. High sensitivity and fast detection allow alarm triggers to halt the process before resist-contaminated product progresses through the tool. The tool is then stopped automatically, with no operator intervention. Spectra International, Morgan Hill, CA; ph 408/778-6060, e-mail [email protected], www.spectra-rga.com.