Portable cleanroom

11/01/1998

Portable cleanroom

The 200-mm Portable Clean Room is a hand-carried microenvironment, for worldwide wafer transport. It has two sections: a base housing and a wafer chamber. The sealed chamber is designed to maintain a positive pressure nitrogen ambient for more than three days to protect against airborne molecular contaminants (amines, etc.), oxygen, and particulates. The base housing accepts a standard wafer cassette and has two side carrying handles; it also contains a chamber pressure gauge, a pressure relief valve, and optional housing for a nitrogen canister (the unit normally operates on house nitrogen only). The chamber clamps and seals to the base housing with a large O-ring and has two quick-disconnect fittings to fill and purge the chamber contents. The chamber is made of UV-blocking, transparent molded polyurethane that has passed extensive outgassing tests, including GC/MS analysis. The nitrogen input line contains a filter rated at 0.002 ?m absolute. The chamber can be purged and filled with house nitrogen in less than a minute. Portable Clean Rooms Inc., Wayland, MA; ph 508/358-4969, fax 508/358-5033, e-mail [email protected].